溶膠-凝膠法合成氧化鎢奈米薄膜與其光電特性研究｜國立臺灣科技大學博碩士論文系統

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研究生：	林佳宜 Chia-yi Lin
論文名稱：	溶膠-凝膠法合成氧化鎢奈米薄膜與其光電特性研究 Synthesis and characterization of tungsten oxide thin film by Sol-Gel method and its optoelectronic properties
指導教授：	黃柏仁 Bohr-Ran Huang
口試委員:	張守進 Shoou-Jinn Chang 周賢鎧 Shyan-Kay Jou
學位類別：	碩士 Master
系所名稱：	電資學院 - 光電工程研究所 Graduate Institute of Electro-Optical Engineering
論文出版年：	2011
畢業學年度：	99
語文別：	英文
論文頁數：	95
中文關鍵詞：	氧化鎢奈米薄膜、溶膠-凝膠法、光檢測器
外文關鍵詞：	Photodetector, Tungsten oxide nano thin film, Sol-Gel method
相關次數：	點閱：367 下載：2
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上一筆

本論文以溶膠－凝膠法製備氧化鎢奈米薄膜金半金光檢測器之光電特性研究。實驗中，氧化鎢薄膜光檢測器的暗/光電流及光響應在回火後有顯著的改善，而拒斥比可提升2個數量級，同時我們可得到氧化鎢薄膜在600℃回火後製作之光檢測器(PD_600)有最佳的光響應特性。
PD_600光檢測器分別置於氧氣、大氣、真空、氧氣－大氣－氧氣及氧氣－真空－氧氣五種氣體環境下，觀察氣體環境對光電流之影響。我們可觀察到PD_600光檢測器在真空環境下相較於在大氣及氧氣環境下有較好的光響應，但在切換氣體的環境下，氧氣－大氣－氧氣環境對氧化鎢薄膜光檢測器的光響應有較好的增加效果。比較大氣與氧氣－大氣－氧氣環境對光響應之影響，我們可觀察出在氧氣－大氣－氧氣環境下光響應可提升0.5個數量級。而比較真空與氧氣－真空－氧氣環境對光響應的影響，我們可觀察出兩者對於提升光響應無明顯增加，故PD_600光檢測器在真空環境下的光響應特性較穩定。
最後探討不同回火溫度對氧化鎢薄膜光檢測器在氧氣、大氣、真空、氧氣－大氣－氧氣及氧氣－真空－氧氣的環境下觀察光響應之變化。由實驗結果證實在600℃回火的光檢測器在任何氣體環境下確實有較佳的光響應特性。

In this thesis, the effects of different annealed temperatures and gases environments on the performance of W18O49-based metal-semiconductor- metal (MSM) photodetectors (PDs) were thoroughly studied. Scanning electron microscopy (SEM), X-ray diffraction (XRD), transmittance, and photoluminescence (PL) spectra revealed that the sol-gel prepared W18O49 film became more porous and more crystallization as annealed temperature ncreased. The PD of W18O49 film annealed at 600oC (PD_600) possessed the better performance with photo-to-dark current contrast ratio and rejection ratio of 6.5×102 and 407.8, respectively.
PD_600 was further studied versus different gases environments, pure O2, air, vacuum, O2-Air-O2 (OAO), and O2-Vacuum- O2 (OVO). Ultraviolet (UV) light was used as the source for measuring the photocurrent. It was observed that in O2 gases environment, the adsorption of O2 molecules may capture electrons in the bulk W18O49 film surface and reduced both of the dark and photocurrent. Similar phenomenon was observed in other conditions. The maximum photo-response of PD_600 measured in air, vacuum, OAO, and OVO were 45.7, 75.2, 28.0, and 82.9 respectively.
Finally, PDs with different annealed temperature treatment were inspected in various gases environments. In air environment, PD with W18O49 annealed at 600oC performed the highest photocurrent properties. The photo-responses among the different environmental tests suggested that the W18O49-based PD with 600oC-annealed film was promising for the application on light sensing.

Contents

Chapter 1 Introduction
1-1 General background..........................................................................1
1-2 Motivation................................................................................2
1-3 Organization....................................................................2

Chapter 2 Background and Literature Review
2-1 Characteristic of tungsten oxides...........................................4
2-2 General methods of tungsten oxides syntheses....................................4
2-2-1 The sol-gel method.......................................................................5
2-2-2 Hydrothermal and solvethermal method.......................................7
2-2-3 Other synthesis methods...............................................................8
2-3 Applications of tungsten oxides..............................................8
2-4 Photodetectors based on various materials................................10
2-5 Theory of metal-semiconductor contact….........................................11
2-5-1 Theory of metal-semiconductor contact.....................................11
2-5-2 Current transport mechanism......................................................15
2-6 Theory of photodetectors.................................................................18
2-6-1 Metal-Semiconductor-Metal (MSM) photodetectors.................18
2-6-2 Current transport mechanism......................................................19
2-6-3 Parameters of photodetectors......................................................20

Chapter 3 Experiment and Measurement Systems
3-1 Synthesis of tungsten oxide thin film by Sol-Gel method.................34
3-2 Field Emission Scanning Electron Microscope (FESEM) ................35
3-3 X-ray Diffraction System (XRD) ......................................................37
3-4 Optical transmittance measurement system.......................................38
3-5 Photoluminescence (PL) Spectrum System.......................................38
3-6 Current-Voltage (I-V) Measurement System.....................................39

Chapter 4 Characterization of Tungsten Oxide Thin Film prepared by Sol-Gel Method
4-1 Introduction........................................................................................44
4-2 Results and discussion.......................................................44
4-2-1 Surface morphology and structural characteristics analysis.......44
4-2-2 Optical and electrical properties analyses...................................46
4-3 Summary............................................................................................50

Chapter 5 The 600℃ AnnealedW18O49 Photodetectors with Various Gas Conditions
5-1 Introduction........................................................................................57
5-2 Theory of gas sensing UV photodetectors.........................................57
5-3 Photocurrent measurement in uniform gas environment.................58
5-3-1 O2 environment...........................................................................58
5-3-2 Air environment..........................................................................59
5-3-3 Vacuum environment..................................................................60
5-4 Photocurrent measurement in gas changing environment..................61
5-4-1 O2-Air-O2 environment...............................................................61
5-4-2 O2-Vacuum-O2 environment.......................................................62
5-5 Summary............................................................................................63

Chapter 6 The Effects of Different Annealing Temperatures on W18O49 Photodetectors with Various Gas Conditions
6-1 Introduction........................................................................................70
6-2 Photocurrent measurement of different photodetectors in uniform gas environment....................................................................................70
6-2-1 O2 environment...........................................................................70
6-2-2 Air environment..........................................................................71
6-2-3 Vacuum environment..................................................................72
6-3 Photocurrent measurement of different photodetectors in gas changing environment.......................................................................72
6-3-1 O2-Air-O2 environment...............................................................72
6-3-2 O2-Vacuum-O2 environment......................................................73
6-4 Summary............................................................................................73

Chapter 7 Conclusion and Future Works
7-1 Conclusion..........................................................................................80
7-2 Future works.......................................................................................82
Reference..........................................................................83

                                

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Chapter 5
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