研究生: |
劉彥麟 YEN-LIN LIU |
---|---|
論文名稱: |
開發一檢測球面微透鏡陣列之快篩式自動化光學系統 Development of an Rapid-Screening and Automated Optical System used for Inspection of Spherical Microlens Array |
指導教授: |
陳品銓
Pin-Chuan Chen 鄧昭瑞 Geo-Ry Tang |
口試委員: |
陳品銓
Pin-Chuan Chen 鄧昭瑞 Geo-Ry Tang 修芳仲 Fang-Jung Shiou 陳亮光 Liang-kuang Chen |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2018 |
畢業學年度: | 106 |
語文別: | 中文 |
論文頁數: | 76 |
中文關鍵詞: | 快篩式自動化光學檢測系統 、球面微透鏡陣列檢測系統 |
外文關鍵詞: | Automated optical detection system, Spherical microlens array |
相關次數: | 點閱:245 下載:0 |
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本研究旨在開發一套檢測球面微透鏡陣列之快篩式自動化光學系統,主要功能包含兩個部分,一為快速判斷陣列中個別微透鏡產品是否包含瑕疵,二為檢測陣列中個別微透鏡陣列之直徑及焦距是否符合規格。判別微透鏡瑕疵的方法是利用影像比對的方式,本研究使用商用的微透鏡陣列影像去比對需要檢測之微透鏡陣列之影像,將未達標準之微透鏡篩選出來。
系統之組成元件有紅光氦氖雷射、短焦與長焦擴束鏡組、偏振片、光圈、分光鏡、螺桿平台與馬達驅動設備以及CCD相機搭配遠心鏡頭。硬體架構能將雷射光經由擴束後,先透過偏振片與光圈增進雷射光的一致性,再經由分光鏡改變光路將光線投射於待測的微透鏡陣列上,再藉由CCD相機擷取影像,傳送給後端軟體程式分析處理。量測微透鏡陣列的直徑與焦距是透過擷取的影像尋圓,藉由比例因子換算得知個別微透鏡的直徑,接著移動CCD相機平台與分析微透鏡內部光斑面積大小,求出個別球面微透鏡的焦距。
在驗證本系統的效能實驗上,量測利用既有之商用微透鏡陣列為標準片,取像分析並演算,而後利用立體顯微鏡得到的量測數據推算樣本真實的直徑以及焦距。對比兩邊實驗結果,本研究自行開發的量測系統與工具顯微鏡的量測結果,在直徑誤差上小於4%以內,在焦距的量測結果上,實驗結果接近於商用標示規格的±3%。
An automated optical inspection system through rapid screening is developed in this study, which is used to: (1) detect flaw on the microlens array; and (2) measure the diameter and focus length of the microlens array. This inspection system consists of a laser beam, beam expansion system, polarizers, spectroscope and CCD camera.
In the detection of flaw on the microlens array, a CCD camera was used to capture the image of microlens array under the exposure of laser beam. Then the captured image was analyzed by an image-processing algorithm to highlight the defects, the method of distinguishing the defects of microlens array is to use pattern match, through the method of pattern match can screen out the flaw of microlens.
In the estimation of microlens array uniformity and the focal length of microlens array, an image-processing algorithm associated with the motorized X-Y table were used. To validate the measurement from the home-built inspection system, a stereomicroscope was used. The comparison between the home-built system and the stereomicroscope show a good agreement and proved that this optical inspection system for microlens array is highly useful.
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