研究生: |
田詠富 Yung-Fu Tien |
---|---|
論文名稱: |
改良一自動光學系統用於檢測球面微透鏡陣列 Improvement of an Automated Optical System for Inspecting Spherical Microlens Array |
指導教授: |
陳品銓
Pin-Chuan Chen 鄧昭瑞 Geo-Ry Tang |
口試委員: |
陳亮光
Liang-kuang Chen 修芳仲 Fang-Jung Shiou 鄧昭瑞 Geo-Ry Tang 陳品銓 Pin-Chuan Chen |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2020 |
畢業學年度: | 108 |
語文別: | 中文 |
論文頁數: | 92 |
中文關鍵詞: | 自動化光學檢測系統 、球面微透鏡陣列檢測系統 |
外文關鍵詞: | Automated optical inspection system, Spherical microlens array |
相關次數: | 點閱:374 下載:0 |
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本研究主旨為改良現有快速檢測球面微透鏡陣列之自動化光學檢測系統。系統的主要目的為在短時間內量測透鏡陣列中個別透鏡之直徑與焦距直尺寸,並能依據規格標示出合格及不合格透鏡位置,並計算合格透鏡之良率。
現有系統量測速度在雖然快於光學干涉儀,但是對於製造程序上需要更快的量測速度。故本研究藉由程式修改以加快量測速度,並變更相機提升影像解析度,以量測更小的透鏡;藉由影像處理分析,以控制馬達移動透鏡位置,達到連續檢測目的。
為了驗證系統之效能,實作中利用既有之商用微透鏡陣列作為標準,經由本系統與商用雷射掃描顯微鏡分別量測後比較效能。數據分析顯示,改良系統後在檢測速度上更快,節省約90%時間。與雷射掃描顯微鏡的量測結果比較,在直徑誤差小於4%;在焦距的量測結果上,實驗結果接近於商用雷射掃描顯微鏡量測數據之5.37%。
This study aims to improve the prototype automated optical system for rapid screening and inspecting spherical microlens array. It can measure the diameter and focal length of the microlens array and highlight acceptance or rejection by specification.
Although the measurement speed of the prototype system is faster than that of the optical interferometer, we need faster measurement speed for manufacturing process. Therefore, in this research, the measurement speed is accelerated by program modification. In addition, the camera is changed to improve the image resolution to measure smaller microlens. The microlens array position is controlled by image processing to achieve continuous detection.
The results show that the improved system is more faster, saving about 90% of time. To validate the measurement from our system, a 3D laser scanning microscope was used. The comparison between our system and the 3D laser scanning microscope show a good agreement and proved that this optical inspection system for microlens array is highly useful.
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