表面增強拉曼光譜(Surface-Enhanced Raman Spectroscopy, SERS)係一利用具有奈
米結構之基材以提升拉曼訊號強度之分析手法，並廣泛應用於分析化學、環境檢測、食
品安全等重要領域。一高度靈敏之 SERS 藥品裝載之基材由其所具備之表面電漿共振
(Surface Plasmon Resonance, SPR) 特性來進行對於特徵峰強度之貢獻，而該特性會受到
基材之材料組成、奈米結構形貌之影響。本研究旨在利用半導體之微影製程技術以及物
理氣象沉積之磁控濺鍍技術以開發一具有微米級距之孔洞陣列可撓式薄膜，並且嘗試將
其應用於實際分析環境中。
本研究可分為二章節，首先透過不同光罩中之孔洞陣列設計，利用濺鍍一銀薄膜於
其上，並且製備一系列具有不同形貌以及排列之微米孔洞陣列，其中包含圓形、三角形
以及菱形。透過利用羅丹明 6G (R6G) 作為待測之探針分子，發現具有三角晶格排列之
菱形孔洞結構之孔洞陣列能夠提供最佳之訊號提升。
而後為了進一步提升其作為 SERS 基材之提升訊號響應之潛力，本研究嘗試利用磁
控濺鍍鍍覆奈米銀顆粒於其上，並且成功透過奈米銀顆粒以及金屬銀孔洞陣列之間的耦
合效應來提升其拉曼強度，利用 R6G 作為待測分子時，其最低可偵測之濃度可達 10-11
M，增強因子(EF)為 8.29×1012
, 相對標準差(RSD)為 6.18%。為了進一步探討其在實際用
途上，亦利用孔雀石綠(malachite green, MG)作為分析分子進行分析，亦發現其 LOD 可
達 10-6M，並且可在吳郭魚表皮上附著其 SERS 基材並且有效提升 MG 於魚表皮上之拉
曼訊號。證實金屬銀孔洞陣列作為 SERS 基材其所具有的規則孔洞可提供良好的定點量
測，並能進一步提升分析數據之精準度以及可信度

SERS is an analytical technique that amplifies Raman signals using a nanostructured
substrate. In important fields such as analytical chemistry, environmental monitoring, and food
safety, it finds extensive applications. High-sensitivity SERS substrates rely on their surface
plasmon resonance (SPR) characteristics, which depend on their materials and nanostructures.
This study aims to develop a flexible thin film with a micro-scale hole array using lithography
and physical vapor deposition techniques and explore its utility in real analysis.
There are two main sections to the study. In the first section, through the use of various
photo masks and patterned templates, silver is sputtered onto a photoresist patterned substrate,
which creates a series of microhole arrays with various shapes and arrangements, including
circular, triangular, and rhombus. Using Rhodamine 6G (R6G) as the probe molecule, it was
founded that an array with rhombus-shaped holes with a triangular lattice arrangement could
enhance the signal most significantly.
Moreover, silver nanoparticles were sputtered onto the metal mesh substrate using
magnetron sputtering in order to enhance its potential as a SERS substrate. In addition to
enhancing the signal response, the silver nanoparticles were successfully coupled with the
metallic silver hole array. With R6G utilized as the probe molecule, the limit of detection (LOD)
was determined to be 10-11 M, the enhancement factor (EF) was calculated to be 8.29×1012, the
relative standard deviation (RSD) was determined to be 6.18%. The use of malachite green
(MG) as an analytical molecule was also applied in order to explore its practical application. A
limit of detection (LOD) of 10-6 M was observed for MG, and the SERS substrate was capable
of affixed to tilapia skin, effectively amplifying the Raman signal of MG. Based on these
findings, the metal silver micro-hole array, functioning as a SERS substrate, has regular holes
that facilitate precise measurements as well as enhance the accuracy and reliability of analytical
results.

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