本論文研究主要分為兩大部分，第一部份以Ni-YSZ碟型基材作為陽極支撐(anode-supported)，第二部份以YSZ碟型基材作為電解質支撐(electrolyte -supported)，利用這兩種不同材料作為固態氧化物燃料電池的支撐系統，再利用濺鍍的方式製備多孔結構的薄膜電極，藉以增加三相界面反應點，進而降低反應極化電阻。
實驗第一部份是以60wt%的NiO和40wt%的8YSZ混合粉末壓錠成形，經燒結與吹氫還原形成多孔Ni-YSZ碟型基材，電解質與陰極分別以反應式濺鍍和共濺鍍的方式沉積8YSZ薄膜與PtOx-YSZ複合薄膜，最後再進行退火熱處理使PtOx-YSZ還原成多孔Pt-YSZ複合薄膜陰極。由於經過熱處理後8YSZ薄膜會產生裂縫，而燃料電池對於電解質的要求必須極為緻密，因此造成在量測電池效能時由於電解質有裂縫而使兩端電極導通無法量測。
實驗第二部份是以8YSZ粉末壓錠成形，經高溫燒結形成緻密的電解質碟型基材，厚度為0.5mm。陽極以共濺鍍方式沉積NiO-YSZ複合薄膜，陰極以濺鍍方式沉積LSM薄膜。另外，為了使LSM薄膜產生多孔結構，嘗試與PMMA和Ag共濺鍍，再經過800℃高溫熱氧化將PMMA去掉和讓Ag揮發而產生孔隙，並使LSM薄膜與NiO-YSZ薄膜由非晶質轉變為結晶相，之後進行800℃吹氫還原將NiO-YSZ薄膜還原為多孔性Ni-YSZ薄膜。
本實驗進行單電池量測是採用雙氣室量測系統，於量測時在陽極端通入20%H2-80%Ar混合氣，陰極則曝露在空氣下。以Ni-YSZ薄膜陽極與LSM薄膜陰極製備電解質支撐之燃料電池，量測結果在800℃開路電壓為0.9V與最大功率密度31.35 mW/cm2。這結果也證實了利用磁控式濺鍍法製備的薄膜陽極與薄膜陰極應用在固態氧化物燃料電池的可行性。而由於利用PMMA與LSM共濺鍍無法產生多孔結構，和利用Ag與LSM共濺鍍使得薄膜的熱膨脹係數增大與基材附著性不佳，造成量測電池性能無法有效提升。

In this study, we study two different configurations of solid oxide fuel cell (SOFC). One is anode-supported SOFC using Ni-YSZ disc, the other is electrolyte-supported SOFC using YSZ disc. By using sputter deposition technique, we produced a thin film with porous structure as the electrode. The porous sturucture is excepted to increase the three phase boundary, and decrease the polarization loss of the cell.
The first part of study used 60wt% NiO and 40wt% 8YSZ mixed powders to form a NiO-YSZ disc which was then sintered and reduced in H2 to form Ni-YSZ. 8YSZ and PtOx-YSZ thin film were sputter-deposited and worked as electrolyte and cathode of SOFC, respectively. The PtOx-YSZ were converted to Pt-YSZ after annealing in air. The YSZ thin film were found cracked after heat treatment, resulting in test fail under performance measurement of the cell.
The second part of study used 8YSZ disc as the electrolyte. The Ni-YSZ and LSM thin film were deposited by sputtering as anode and cathode, respectively. Besides, in order to produce porous structure, we tried to use PMMA and Ag with LSM by co-sputtering for cathode of SOFC.
Performance of the cell was measured in two chamber system by using the gas of 20%H2-80%Ar as anode flow and exposed cathode to air. For the LSM thin film cathode, the maximum open circuit voltage is 0.9V and the maximum power density is 31.35 mW/cm2 at 800℃. This result demonstrate that it was feasible to use thin film as electrode for SOFC. Due to technical problems incurred when using co-sputter of PMMA with LSM, or co-sputter of Ag with LSM, the performance of the cell didn’t increase effectively.

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