二氧化銥一維奈米晶體的成長與特性分析｜國立臺灣科技大學博碩士論文系統

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研究生：	張弘民 Hung-min Chang
論文名稱：	二氧化銥一維奈米晶體的成長與特性分析 Growth And Characterization of Iridium Dioxide One-Dimensional Nanocrystals
指導教授：	黃鶯聲 Ying-sheng Huang
口試委員:	孫澄源 Cheng-yuan Sun 蔡大翔 Dah-shyang Tsai 樂錦盛 Chin-sheng Ro
學位類別：	碩士 Master
系所名稱：	工程學院 - 材料科學與工程系 Department of Materials Science and Engineering
論文出版年：	2005
畢業學年度：	93
語文別：	中文
論文頁數：	83
中文關鍵詞：	奈米管、有機金屬化學氣相沉積法、氧化銥、拉曼、奈米柱
外文關鍵詞：	Spatial correlation model
相關次數：	點閱：367 下載：2
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利用垂直流冷壁式的有激金屬化學汽相沈積法，我們已成功地在不同基板上成長出二氧化銥一維奈米晶體（包含奈米柱與奈米管）與薄膜。同時也藉由場發射掃瞄式電子顯微術(FESEM)、X光繞射術(XRD)與拉曼散射(Raman Scattering)的量測技術，對各式的二氧化銥樣品之形貌、結構、晶向與組成做詳細的特性分析。透過有系統的研究，我們可以藉由不同的成長速率來準確地控制成長不同型態的二氧化銥一維奈米晶體，包含三角形/楔形奈米柱、未完整奈米管/螺旋奈米管、方形奈米管以及方形奈米柱等。結果顯示相較於這些一維的奈米晶體，包含連續性三維晶粒的薄膜是屬於較穩定的形貌。而根據成長動力學理論，我們已經完成二氧化銥的形貌分佈圖，並且對於這些奈米柱或奈米管的成長機制也進行相關的討論。X光繞射圖譜顯示這些二氧化銥一維奈米晶體與薄膜都具有近乎單晶品質的結構，而且也具有相同[001]長軸方向的訊號。拉曼散射譜線則顯示對於各種二氧化銥奈米晶體皆具有不同的殘留應力。而對於不同基板上所成長的二氧化銥晶體，其拉曼散射的結果也可證實存在於成長介面的晶格不匹配度對於一維奈米結構的成長有很大的影響。此外，我們可以藉由退火處理或是將二氧化銥成長在緩衝層上的方法減少其殘留應力。

Via the technique of vertical-flow cold-wall metal-organic chemical vapor deposition (MOCVD) using highly volatile (MeCp)(COD)Ir as the CVD precursor, self-assembled one-dimensional (1D) iridium dioxide (IrO2) nanocrystals, including nanorods (NRs) and nanotubes (NTs), as well as thin films have been successfully deposited on various substrates. A detailed characterization focusing on the morphology, structures, orientations, and compositions of the various IrO2 samples have been carried out by means of field-emission scanning electron microscopy (FESEM), X-ray diffractometry (XRD), and Raman scattering. From a systematic study, we observed the morphological evolution from triangular/wedged NRs, via incomplete/scrolled NTs to hollow square NTs and solid square NRs by precisely controlling the growth rate of these 1D nanocrystals. The results show that the polycrystalline films composed of continuous 3D grains belong to the most stable form as compared to the these 1D nanocrystals. The morphology diagram based on the growth kinetics is given and the possible mechanism of the formation of nanorods and nanotubes has been discussed. The XRD patterns of these various IrO2 1D nanostructures and thin film show the nearly single-crystalline quality and the same [001] long-axis direction. The micro-Raman spectra show there are different residual stress for these various IrO2 nanocrystal. The Raman results for IrO2 grown on different substrates can also prove the lattice mismatch existing between the interface influence the growth of 1D nanostructures very well. Besides, the residual stress can be reduced by annealing treatment or the IrO2 buffer layer.

中文摘要----------------------------------------------------------------------------I
英文摘要---------------------------------------------------------------------------II
致謝 ------------------------------------------------------------------------------- IV
目錄 -------------------------------------------------------------------------------- V
圖索引 --------------------------------------------------------------------------- VII
表索引 -------------------------------------------------------------------------- XIII
第一章　緒論--------------------------------------------------------------------- 1
1.1 二氧化銥晶體之結構---------------------------------------------- 1
1.2 二氧化銥晶體導電性----------------------------------------------4
1.3 二氧化銥晶體穩定性及應用-------------------------------------5
1.4 奈米晶體之研究動機----------------------------------------------7
第二章　實驗方法及步驟------------------------------------------------------9
2.1 實驗藥品及規格----------------------------------------------------9
2.2 實驗設備 ----------------------------------------------------------- 11
2.3 實驗步驟及條件 -------------------------------------------------- 13
    2.3.1 清洗晶片 --------------------------------------------------- 13
    2.3.2 二氧化銥緩衝層之濺鍍 --------------------------------- 13
    2.3.3 二氧化銥奈米晶體與薄膜沉積步驟 ------------------ 15
          2.3.4 二氧化銥奈米晶體退火步骤 --------------------------- 17
      2.4 特性分析之儀器 -------------------------------------------------- 18
第三章　結果與討論  ---------------------------------------------------------- 20
      3.1 二氧化銥一維奈米晶體形貌之演化 -------------------------- 20
          3.1.1 二氧化銥奈米晶體形貌演化之FESEM圖與其相圖
               分析---------------------------------------------------------21
          3.1.2  X-ray繞射分析-------------------------------------------34
          3.1.3 二氧化銥奈米晶體演化機制的討論------------------36
      3.2 利用拉曼散射技術檢測二氧化銥奈米晶體 ----------------- 38
          3.2.1 拉曼散射原理 --------------------------------------------- 38
3.2.2 不同形貌的二氧化銥奈米晶體之拉曼散射分析 --- 45
3.2.3 成長於不同基板上之二氧化銥奈米晶體之拉曼散射
     分析--------------------------------------------------------- 52
3.2.4 二氧化銥奈米晶體退火處理後之拉曼散射分析 --- 68
第四章　結論  -------------------------------------------------------------------  76
參考文獻--------------------------------------------------------------------------78
作者簡介--------------------------------------------------------------------------83

                                

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