近年 5G 技術蓬勃發展向高頻化邁進，隨著通訊設備的工作頻率擴展到
毫米波段，信號延遲問題變得尤為關鍵。因此，對於微波元件的關鍵材料─
微波介電陶瓷，性能要求更加嚴苛。低介電常數材料能夠有效降低基板與金
屬電極之間的交互耦合損耗，大幅縮短晶片間訊號的傳播延遲時間。其中橄
欖石結構的矽酸鎂（Mg2SiO4）有低介電常數與高品質因子，作為毫米波介
電陶瓷相當關鍵。但，矽酸鎂合成時常見的第二相問題，以及高燒結溫度使
其在工業上應用較為不利。本實驗將以工業上具有量產能力的噴霧乾燥法
合成純相矽酸鎂，並利用暫態液相燒結嘗試降低其燒結溫度，以達成節省成
本的目的。
實驗分成三個階段：首先使用不同的前驅物製備溶液，並以噴霧乾燥法
製備粉體，探討能夠製備出純相矽酸鎂的關鍵因素及前驅物選擇，測試其最
低煅燒溫度；接著觀察在前驅溶液中使用不同螯合劑對粉體形貌的影響，期
望獲得更接近圓球形的結果，提高堆積密度；最後以不同濃度及時間對粉體
進行酸洗，使粉體表面均勻分布非晶層，提高其燒結成效。
實驗結果顯示，透過酸洗進行暫態液相燒結的粉體能夠具有比起未經
過酸洗的粉體更高的燒結成效及更好的介電性質，並達成降低燒結溫度的
目的。

There has been a booming development of 5G technology in recent years.
Microwave components are rapidly moving towards higher frequencies. As
communication devices extend their operating frequencies to the millimeter-wave
range, signal latency becomes even more critical. Therefore, higher performance
requirements are placed on the key material for microwave components, which is
microwave dielectric ceramics. Compared to materials with medium to high
dielectric constants, low dielectric constant materials can effectively reduce the
coupling losses between the substrate and metal electrodes, significantly
shortening signal propagation delay between chips. One typical low-dielectric
ceramic is magnesium silicate (Mg2SiO4) with an olivine structure, which offers
a low dielectric constant and high-quality factor, making it crucial for millimeterwave dielectric ceramics. However, issues such as the presence of second phases
during magnesium silicate synthesis and the high sintering temperature pose
challenges for its industrial application. In this study, we will synthesize purephase magnesium silicate using the industrially scalable spray drying method and
attempt to lower the sintering temperature through transient liquid phase sintering,
aiming to achieve cost savings.
The experiment is divided into three stages. Firstly, different precursors are used
to prepare solutions, and powders are synthesized using the spray drying method
to investigate the key factors and precursor selection for obtaining pure-phase
magnesium silicate, while determining the minimum sintering temperature.
Secondly, the influence of different chelating agents in the precursor solution on
the particle morphology is observed, aiming to achieve a more spherical shape and improve packing density. Finally, acid etching is performed on the powders
using different concentrations and durations to achieve a uniform distribution of
the amorphous phase on the powder surface, thereby enhancing the sintering
efficiency.
The experimental results show that the powders subjected to acid etching for
transient liquid phase sintering exhibit higher sintering efficiency and better
dielectric properties compared to the powders without acid etching, thereby
achieving the goal of reducing the sintering temperature.

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