近年來金屬植入物逐漸成為骨骼受損時用以代替骨骼的治療方案，在金屬材料鍍上具有生物活性的材料，使植入物擁有良好的機械性質及生物相容性，減少植入後的異物反應與副作用。目前擁有很多種方法製備薄膜，使用磁控濺鍍法製備之薄膜，具有良好的致密性、成分均一且無汙染的優勢。

本實驗使用45S、58S和68S不同比例之生物活性玻璃，依照粉體中含有的SiO2的含量來區分，以磁控濺鍍的方式披覆於純鈦板上，提升其生物活性及相容性。首先將製備用於實驗的靶材，使用噴霧乾燥法，可以快速獲得大量生物活性玻璃粉末，藉由調整前驅物溶液配比達到不同比例的粉體，再透過冷壓法將粉末壓成生胚並送進高溫爐燒結後便可使用。爾後，使用X光繞射儀和傅立葉光譜儀，量測結晶結構及薄膜鍵結，並透過場發射雙束型聚焦離子束及奈米壓痕儀，分析薄膜化學組成、薄膜厚度及微硬度。最後進行生物活性測試及細胞毒性測試。

本研究成功做出45S、58S及68S靶材，並藉由改變工作氣體壓力，使沉積的生物活性玻璃薄膜化學成分組成符合原本設定之比例。此外，透過體外生物活性測試，於鈦金屬表面發現具有氫氧基磷灰石生成，證明使用磁控濺鍍法製備之生物活性玻璃薄膜具有生物活性。

In recent years, metal implants have gradually become a treatment option to replace bones when bones are damaged.When the metal material is covered with bioactive material which has good mechanical properties and biocompatibility that gives the implant less foreign body reaction and side effects after implantation. At present, there are many methods to prepare bioactive thin films. The thin films prepared by magnetron sputtering have the advantages of good density, uniform composition and no pollution.

In this experiment, different ratio of bioactive glass taget was used. According to the content of SiO2 in the bioactive glass can be classified into 45S, 58S,and 68S.By using magnetron sputtering to improve bioactivity and compatibility with pure titanium plate. First, the target material for the experiment is prepared. Using the spray drying method, a large amount of powder can be quickly obtained. By adjusting the ratio of the precursor solution to achieve different proportions of powder, the powder is pressed into tablets by cold pressing and sent to sintering in a high temperature furnace. Then, X-ray diffractometer and Fourier transform spectrometer were used to measure the crystal structure and film bonding, and the chemical composition, film thickness, and microhardness were analyzed by dual-beam focused ion beam scsnning electron microscope and nanoindenter. In the end, in vitro tests and cytotoxicity tests were carried out.

In this study, 45S, 58S, and 68S targets were successfully fabricated, and by changing the working gas pressure, the chemical composition of the deposited bioactive glass film conformed to the original ratio. In addition, in vitro test found that hydroxyapatite was formed on the surface of titanium substrate, which proved that the bioactive glass film prepared by magnetron sputtering had bioactivity.

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