近年來，鈣鈦礦太陽能電池(Perovskite solar cells, PSCs)因為在效率表現上超越許多新世代太陽能電池，因此成為許多研究關注的焦點。而目前大多是透過溶液製程(Solution process)的方式來合成鈣鈦礦的薄膜，因為溶液製程是藉由旋轉塗布的方式，所以製程時間快速，因此大多數的研究皆是採取此方法。但溶液製程因為是在手套箱環境下製作的，而且全程使用手動的方式操作，所以薄膜的穩定度不佳，也不容易量產，再加上過程中會使用大量有毒的有機溶劑，所以會對環境造成汙染，因此利用真空製程(Vacuum process)的方式製作鈣鈦礦薄膜是有其重要性的。
本論文藉由使用共蒸鍍製程(Co-evaporation process)的方式合成鈣鈦礦薄膜，透過調整機台參數，使前驅物能夠順利沉積到基板，而使用蒸鍍的方式所製作出的鈣鈦礦薄膜，其薄膜的狀況較好，而且穩定度較佳，並透過量測薄膜的吸收曲線來驗證合成的好壞，最後利用此合成出來的鈣鈦礦薄膜製作鈣鈦礦太陽能電池，經過優化成功製作出轉換效率為11.76 % 的鈣鈦礦太陽能電池。

In recent years, perovskite solar cells (PSCs) have become the focus of many researches due to perovskite surpassed many new-generation solar cells in efficiency. At present, most of the perovskite films are synthesized through the solution process. Because the solution process is use spin-coating method, the process time is fast. Therefore, most researches use this method to process. However, the solution process is made in a glove box environment, and the entire process is operated manually. Therefore, the stability of the film is not good, and it is not easy to mass production. In addition, a lot of toxic organic solvents are used in the solution process, so it will destroy the environment. Therefore, when we fabricate the perovskite films, vacuum process is very important.
In this thesis, we synthesized the perovskite film by using the co-evaporation process. By adjusting the evaporation machine parameters, the perovskite precursor can be successfully deposited on the substrate. We found that the perovskite film fabricated by vapor deposition has better film quality and better device stability. We measure the absorption curve of the film to verify the quality of the synthesis. Finally, we use synthesized perovskite film to make the perovskite solar cell. After optimization, we can successfully fabricated a perovskite solar cell with 11.76% power conversion efficiency(PCE).

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