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研究生： 謝岳呈
Yue-Cheng Hsieh
論文名稱： 二硫化鎢單晶與單層奈米結構之光電導特性研究
Photoconductive Properties in WS2 Single Crystals and Monolayer Nanostructures
指導教授： 陳瑞山
Ruei-San Chen
口試委員: 李奎毅
Kuei-Yi Lee
謝雅萍
Ya-Ping Hsieh
黃逸帆
Yi-Fan Huang
學位類別： 碩士
Master
系所名稱： 應用科技學院 - 應用科技研究所
Graduate Institute of Applied Science and Technology
論文出版年： 2023
畢業學年度： 111
語文別： 中文
論文頁數： 99
中文關鍵詞： 二硫化鎢 、光電導 、單晶 、單層
外文關鍵詞： monolayer, single, crystal, Photoconductive
相關次數： 點閱：285  下載：0 
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    • 中文摘要 i ABSTRACT ii 誌謝 iii 目錄 iv 表目錄 vii 圖目錄 viii 1 第一章 緒論 1 1.1 研究背景 1 1.2 研究動機 2 2 第二章樣品介紹 3 2.1 二硫化鎢層狀晶體成長 3 2.2 單層二硫化鎢單層成長 4 3 第三章 實驗方法與原理 5 3.1 二硫化鎢晶體檢測 5 3.1.1 拉曼散射光譜儀 (Raman Scattering Spectroscopy) 5 3.1.2 掃描式電子顯微術 (Scanning Electron Microscopy, SEM) 8 3.2 二硫化鎢單層檢測 10 3.2.1 光激發螢光光譜儀 (Photoluminescence Spectrometer) 10 3.2.2 原子力顯微術 (Atomic Force Microscopy) 14 3.3 二硫化鎢層狀半導體塊材元件製作 17 3.3.1 基板製作 17 3.3.2 晶體定位及遮罩製作 18 3.3.3 直流磁控濺鍍法 19 3.3.4 漆包線接合 22 3.4 二硫化鎢層狀半導體單層元件製作 23 3.4.1 二硫化鎢單層遮罩製作與電極濺鍍 23 3.4.2 漆包線接合 24 3.5 二硫化鎢元件暗電導量測 25 3.5.1 電流對電壓曲線量測 (Current-Voltage Measurement) 25 3.6 二硫化鎢元件光電導量測 27 3.6.1 功率相依的光電導量測 (Power-Dependent Photoconductivity Measurement) 27 3.6.2 環境變化之光電導量測 (Ambience-Dependent Photoconductivity Measurement) 28 3.7 二硫化鎢元件之高時間解析光電導量測 30 3.7.1 功率相依之高時間解析光電導量測 (Power-dependent high-frequency time-resolved photoconductivity measurement) 30 3.7.2 溫度變化與環境變化之高時間解析光電導量測 (Temperature-dependent and Ambience-dependent High time-resolved photoconductivity measurement) 34 4 第四章 結果與討論 37 4.1 二硫化鎢塊材晶體結構分析 37 4.1.1 二硫化鎢晶體之拉曼散射光譜 37 4.1.2 二硫化鎢晶體之表面形貌 39 4.2 二硫化鎢單層之結構分析 40 4.2.1 二硫化鎢單層之拉曼散射光譜 40 4.2.2 二硫化鎢單層之光激發螢光光譜 42 4.2.3 二硫化鎢單層之厚度量測 43 4.3 二硫化鎢暗電導分析 44 4.3.1 二硫化鎢塊材之電導率量測 44 4.3.2 二硫化鎢單層之電導率量測 49 4.4 二硫化鎢之光電導分析 51 4.4.1 二硫化鎢塊材之功率相依光電導 52 4.4.2 二硫化鎢塊材之環境相依光電導 53 4.4.3 二硫化鎢單層之波長與功率相依光電導 57 4.4.4 二硫化鎢單層之波長與環境相依光電導 60 4.5 二硫化鎢之高時間解析光電導分析 64 4.5.1 二硫化鎢塊材功率相依之載子活期分析 65 4.5.2 二硫化鎢塊材環境相依之載子活期分析 67 4.5.3 二硫化鎢塊材溫度相依之載子活期分析 68 4.5.4 二硫化鎢單層溫度相依之載子活期分析 71 4.5.5 二硫化鎢單層波長與功率相依之載子活期分析 74 4.5.6 二硫化鎢單層波長與環境相依之載子活期分析 78 5 第五章 結論 81 參考文獻 82

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