本論文研究以簡單及低成本的製程技術製備高響應值的氫氣感測元件，內文分為四個部分。第一部分為不同濃度及縮短製程時間的氧化鋅奈米柱(ZNR)之氫氣感測特性及分析；第二部分則是以前面氧化鋅奈米柱之氫氣感測分析最好的濃度作為基底，再以不同的製程手法參雜二硫化鎢奈米片(WS2 nanosheets)並進行氫氣感測及特性分析；第三部分為第二部分中二硫化鎢最佳克數參雜氧化鋅奈米柱的結果，成長在不同時間的超奈米鑽石薄膜(N-UNCD)上之氫氣感測及特性分析；第四部分則是將第二部分的最佳結果，成長在濺鍍不同瓦數的氧化鎵(Ga2O3)薄膜上，並進行氫氣感測及特性分析。
研究顯示，ZNR-WS2(0.03g)從光激發螢光(photoluminescence, PL)所得到INBE/IDLE為0.62其氧缺陷為87.24%，此時在500ppm的氫氣流量下，響應值為40.04%；而ZNR/WS2(0.03g) 從PL所得到INBE/IDLE為2.01其氧缺陷為75.99%，此時在500ppm的氫氣流量下，響應值為32.04%，造成響應值提升，其原因為整體的比表面積較大，加上摻雜二硫化鎢後之氧化鋅奈米柱的氧空位相較未摻雜的大，導致更多的氧氣吸附。
由於奈米鑽石結晶與氧化鎵薄膜都是寬能隙的材料，與氧化鋅與二硫化鎢去做複合結構，可以發現在500ppm的氫氣流量下，ZNR-WS2/N-UNCD(5min)靈敏度為24.06%，ZNR-WS2/N-UNCD_A400靈敏度為57.61%，ZNR/WS2/N-UNCD(5min)靈敏度為42.29%， ZnO/WS2/β-Ga2O3(80W)氫氣靈敏度最高響應為52.93%，其響應時間為27.25秒，恢復時間為100.82秒，相較ZNR/WS2/N-UNCD(5min)響應時間快約10秒，恢復時間快約25秒，其選擇性氣體量測也是較好的。

There are four subobjectives in this study with simple and low-cost process technology. The zinc oxide nanorod (ZNR) with different concentrations in a hydrothermal process of 30 mins is used as the base materials in the beginning; Then ZNR/WS2 and ZNR-WS2 are adapted for the 2nd nanostructures. The ZNR/WS2/UNCD and ZNR-WS2/UNCD structures are studied in the 3rd subobjectives. Finally, ZNR/WS2/β-Ga2O3 is fabricated for analysis.
Studies have shown that it achieves an INBE/IDLE value of 0.62 from PL and an oxygen defect percentage of 87.24% for the ZNR-WS2 (0.03 g) sample. For this sample, the hydrogen response is 40.04% under a hydrogen flow of 500 ppm. On the other hand, while the ZNR/WS2 (0.03 g) sample achieves an INBE/IDLE value of 2.01 from PL and an oxygen defect percentage of 75.99%, the hydrogen response becomes 32.04% under a hydrogen flow of 500 ppm. This phenomenon may due to the larger overall specific surface area and more oxygen adsorption for both types of zinc oxide nanorods hybrid structures (ZNR-WS2 and ZNR/WS2).
Furthermore, ultra-nanocrystalline diamond and gallium oxide films are used as substrates for ZNR-WS2/N-UNCD and ZnO/WS2/β-Ga2O3 hybrid structure studies. Studies have shown that under a hydrogen flow of 500 ppm, the sensitivity of ZNR-WS2/N-UNCD (5 min), ZNR-WS2/N-UNCD_A400, ZNR/WS2/N-UNCD (5 min), and ZnO/WS2/β-Ga2O3 (80W) are 24.06%, 57.61%, 42.29%, and 52.93% respectively.
It is noted that the ZnO/WS2/β-Ga2O3 (80W) hybrid structures achieves high hydrogen sensitivity of 52.93% with response time of 27.25 s and recovery time of 100.82 s. However, the hydrogen sensitivity of 42.29 % with response time and recovery time of 37.08 s and 125.26 s are for the ZNR/WS2/N-UNCD (5 min) hybrid structures; Moreover, the selectivity to a target gas (H2) is also better for the ZnO/WS2/β-Ga2O3 (80W) hybrid structures.

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