本研究以簡單與低成本的製程技術製備高效能的氫氣感測元件，內文將分為三個部分。第一部分探討超奈米鑽石之氫氣感測及物性分析。接著在不同退火溫度之超奈米鑽石成長氧化鋅奈米柱之氫氣感測及物性分析。第二部分則是探討氧化鎵之氫氣感測及物性分析。接著在不同退火溫度之氧化鎵成長氧化鋅奈米柱之氫氣感測及物性分析。第三部分則是將氧化鋅奈米柱複合於超奈米鑽石與氧化鎵，再做氫氣感測及物性分析。此外，針對氫氣感測最好的試片，將其進行穩定性、重複性及選擇性量測。

In this study, a structure of Ultra-nanocrystalline diamond)(UNCD) combined with zinc oxide nanorods (ZNR) was synthesized using a simple and cost-effective method. V arious analyses were used to confirm the successful formation of the ZNR/N-UNCD structure. The hydrogen sensing properties of ZNR/N-UNCD were investigated, which shows that remarkably improved H2 sensing performances for ZNR since the N-UNCD layer releases a large amount of carbon, which increases the adsorption capacity for the ZNR/N-UNCD structure.
Then the ZnO grown on Ga2O3 films(ZnO/ Ga2O3) and ZnO/Ga2O3-N2annealed were studied. It was found that the nanorods and nanosheets structure effectively increased the surface area that provides more active sites, which leads to the rapid gas adsorption/desorption, thereby exhibit a higher response for both of the ZnO/Ga2O3 and ZnO/Ga2O3-N2annealed samples.
This studies shows promising hybrid nanostructures of UNCD with Ga2O3 as substrtates for future hydrogen sensor applications.

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