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研究生: Markos Yenesew
Markos Yenesew
論文名稱: The Fabrication of Gas Sensing and Optoelectronic Devices Based on ZnO Nanostructures with Composites of Thin Film Metallic Glass and Ultrananocrystalline Diamond
The Fabrication of Gas Sensing and Optoelectronic Devices Based on ZnO Nanostructures with Composites of Thin Film Metallic Glass and Ultrananocrystalline Diamond
指導教授: 黃柏仁
Bohr-Ran Huang
口試委員: Bohr-Ran-Huang
Bohr-Ran-Huang
Jinn P. Chu
Jinn P. Chu
Shyankay Jou
Shyankay Jou
Shoou-Jinn Chang
Shoou-Jinn Chang
Li Chang
Li Chang
Chia-Liang Cheng
Chia-Liang Cheng
學位類別: 博士
Doctor
系所名稱: 電資學院 - 光電工程研究所
Graduate Institute of Electro-Optical Engineering
論文出版年: 2018
畢業學年度: 106
語文別: 英文
論文頁數: 96
中文關鍵詞: Ultrananocrystalline diamond filmsThin film metallic glassZnO nanostructuresHydrogen gas sensorsUV photodetectors
外文關鍵詞: Ultrananocrystalline diamond films, Thin film metallic glass, ZnO nanostructures, Hydrogen gas sensors, UV photodetectors
相關次數: 點閱:442下載:0
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  • Abstract
    In this Ph.D. thesis, composites of ultrananocrystalline diamond (UNCD), thin film metallic glass (TFMG), and a forest of zinc oxide (ZnO) nanostructures (nanorods and nanotubes) have been developed for gas sensing and optoelectronic applications. The composite-structures provide a number of synergetic properties including a large surface area, optimized crystallinity, work function, electrical properties, and surface passivation layers. The ZnO based composite-structures offer good performance in applications for hydrogen gas sensors and ultraviolet (UV) photodetectors.
    Simple two-step hydrothermal method in conjunction with microwave plasma enhanced chemical vapor deposition (MPECVD) system have been applied to synthesize ZnO nanorods and UNCD films, respectively. Additionally, radio frequency (RF) magnetron sputtering technique was used for the deposition of TFMG. The grown ZnO-based composite-structures in this thesis emphasized controlling the surface morphology of UNCD films beneath ZnO nanostructures. Defect-controlled gas sensitivity were investigated by varying deposition time of UNCD films. It is found that a partially grown UNCD films that were deposited for 7.5 min are the optimized underlayers for hydrogen gas sensing applications. These optimized ZnO-based composite structures exhibit extremely higher gas response than that of the pristine ZnO sensor. The reason for the improvement in sensing performance of the composite-structures have been investigated in terms of the defect-related sensitivity and energy band theory of the heterostructures.
    Furthermore, in this thesis, a metal-semiconductor-metal (MSM) UV photodetectors have been fabricated by using a silicon substrate on top of which a silver paste was deposited as an electrode. Bilayer of TFMG/ZnO nanotubes were grown on UNCD films and this ZnO-based composite-structures have enhanced their optoelectronic properties. The nanostructures are characterized by SEM, EDX, TEM, HRTEM, XRD, Raman, and PL spectroscopy. From the characterization of the materials, we observed that these nanostructures emit a ~ 377 nm (UV) usually called the near band edge emission and a band green band related to the defects and surface states at about 600 nm.
    The ZnO-based composite-structures are successfully synthesized at low manufacturing temperatures. This dissertation gives an overview of the optical properties of composites of UNCD, TFMG, and ZnO nanostructures and proposes an effective way to enhance the efficiency of optoelectronic and hydrogen gas sensing devices. The fabrication of ZnO-based composite- structures will be useful for the development of next-generation devices.


    Abstract
    In this Ph.D. thesis, composites of ultrananocrystalline diamond (UNCD), thin film metallic glass (TFMG), and a forest of zinc oxide (ZnO) nanostructures (nanorods and nanotubes) have been developed for gas sensing and optoelectronic applications. The composite-structures provide a number of synergetic properties including a large surface area, optimized crystallinity, work function, electrical properties, and surface passivation layers. The ZnO based composite-structures offer good performance in applications for hydrogen gas sensors and ultraviolet (UV) photodetectors.
    Simple two-step hydrothermal method in conjunction with microwave plasma enhanced chemical vapor deposition (MPECVD) system have been applied to synthesize ZnO nanorods and UNCD films, respectively. Additionally, radio frequency (RF) magnetron sputtering technique was used for the deposition of TFMG. The grown ZnO-based composite-structures in this thesis emphasized controlling the surface morphology of UNCD films beneath ZnO nanostructures. Defect-controlled gas sensitivity were investigated by varying deposition time of UNCD films. It is found that a partially grown UNCD films that were deposited for 7.5 min are the optimized underlayers for hydrogen gas sensing applications. These optimized ZnO-based composite structures exhibit extremely higher gas response than that of the pristine ZnO sensor. The reason for the improvement in sensing performance of the composite-structures have been investigated in terms of the defect-related sensitivity and energy band theory of the heterostructures.
    Furthermore, in this thesis, a metal-semiconductor-metal (MSM) UV photodetectors have been fabricated by using a silicon substrate on top of which a silver paste was deposited as an electrode. Bilayer of TFMG/ZnO nanotubes were grown on UNCD films and this ZnO-based composite-structures have enhanced their optoelectronic properties. The nanostructures are characterized by SEM, EDX, TEM, HRTEM, XRD, Raman, and PL spectroscopy. From the characterization of the materials, we observed that these nanostructures emit a ~ 377 nm (UV) usually called the near band edge emission and a band green band related to the defects and surface states at about 600 nm.
    The ZnO-based composite-structures are successfully synthesized at low manufacturing temperatures. This dissertation gives an overview of the optical properties of composites of UNCD, TFMG, and ZnO nanostructures and proposes an effective way to enhance the efficiency of optoelectronic and hydrogen gas sensing devices. The fabrication of ZnO-based composite- structures will be useful for the development of next-generation devices.

    Contents Abstract (in Chinese) ………………………………………………………………...……. i Abstract …………………………………………………………………………...…….…. iii Acknowledgments …………………………………………………….…………………… v Contents …………………………………………………………………..………..…........ vi List of Figures …………………………………………………………………...…..…….. ix List of Tables …………………………………………………………………………....... xiii Chapter 1 Introduction …………………………………………………………………….. 1 1.1 Background of the study………………………………….................................. 1 1.2 Motivation and Goals…………………………………………………….……. 5 1.3 Thesis organization………………………………………………..................... 5 Chapter 2 Literature review and Experimental instruments ……………………………….. 7 2.1 Basic properties of ZnO ………………………………………........................... 7 2.2 Fundamentals of Diamond ……………………………………………............... 13 2.2.1 Basic properties of UNCD ……………………………….…………. 16 2.3.2 UNCD Growth …………………………………………..………….. 18 2.3 Basic properties of TFMG …………………………………………………… 20 2.4 Hydrogen sensors ………………………………………………………………. 22 2.5 Ultraviolet (UV) photodetectors ……………………………………………... 25 2.6 Experimental instruments …………………………………………................. 26 2.6.1 RF sputtering system ………………………………………………. 26 2.6.2 MPCVD system ……………………………………………………. 28 2.6.3 X-ray diffraction analysis ………………………………………….. 29 2.6.4 Raman scattering …………………………………………………… 31 2.6.5 Photoluminescence spectroscopy ……………………….................. 32 2.6.6 Electron microscopy …………………………………….................. 33 Chapter 3 Fabrication of hybrid UNCD/ZnO nanorods and their hydrogen gas Sensing Properties ……………………………………………………………………… 35 3.1 Fabrication of UNCD/ZnO nanorods ………………………………………. 35 3.2 Morphological and structural characterizations …………………………….. 36 3.3 Gas sensing response ………………………………………….…................... 41 3.4 Summary …………………………………………………………………….. 45 Chapter 4 Fabrication of hybrid TFMG/UNCD/ZnO nanorods and their hydrogen gas sensing properties ……………………………………………………….................... 46 4.1 Fabrication of TFMG/UNCD/ZnO nanorods ………………………………. 46 4.2 Morphological and structural characterizations …………………………… 48 4.3 Hydrogen Gas sensing response ……………………………………………. 53 4.4 Summary ……………………………………………………………………. 59 Chapter 5 Fabrication of hybrid UNCD/ZnO/TFMG nanostructures and their hydrogen gas sensing properties ………………………………………………………. 61 5.1 Fabrication of UNCD/ZnO/TFMG composite-structures ………………….. 61 5.2 Morphological and structural characterizations ……………………………. 62 5.3 Gas sensing response ………………………………………………………. 70 5.4 Summary ………………………………………………………………….. 73 Chapter 6 Investigation of hybrid UNCD/ZnO/TFMG nanostructures for UV photodetection ……………………………………………………………….……..… 74 6.1 Synthesis of TFMG/ZnO nanotubes on UNCD films ……………………. 74 6.2 Morphological and structural characterizations ………………………….. 76 6.3 Photoresponses.……………………………………………….................... 81 6.4 Summary …………………………………………………………………. 85 Chapter 7 Conclusion and future research ………………………………………..….. 87 7.1 Conclusion ……………………………………………………………….. 87 7.2 Future research …………………………………………………………….. 88 References ……………………………………………………………………………… 91 List of publication ………………………………………………………………………. 96  

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