本研究係在玻璃上塗布以TEOS溶膠-凝膠法合成的二氧化矽粒子於玻璃上並平滑化作為具光捕捉能力的散射層，之後再鍍上透明導電氧化物(TCO)層形成具光學散射功能的TCO玻璃並應用於矽基薄膜太陽能電池的製作。首先使用溶膠-凝膠法製備二氧化矽散射球體，藉由改變TEOS濃度、氨水濃度、分散劑劑量等合成條件以及塗布方式，探討製備出的二氧化矽散射球體層的形態、分散狀態及其光學表現。結果顯示，當控制二氧化矽球體的平均粒徑為1 μm、固定散射球體的平滑玻璃層(SOG層)厚度為300 nm、濺鍍摻鋁氧化鋅層厚度為700 nm時，可製作出片電阻為7.8 Ω/□、粒子均勻分佈、總透光率接近80 %的TCO玻璃。其光學散射能力對400~800 nm波長範圍的散射穿透率平均達50%，且在1200 nm的紅外光處仍有20%以上的散射穿透率。在此TCO玻璃上試作非晶矽薄膜太陽電池元件的結果顯示，相較於在Asahi U型玻璃上的電池Jsc僅有10.8 mA/cm2，本研究所製備的新型TCO玻璃上的電池Jsc可增加到12.9 mA/cm2 (提升19.4%)，顯示散射層確實具有增加光捕捉的效果。

SiO2 particles were synthesized by TEOS as a sol-gel agent on glass substrates to fabricate a light scattering layer accompanied with a spin-on glass (SOG) layer for surface smoothing treatment. Then, a new textured TCO glass for silicon based thin film solar cells was accomplished after depositing TCO layer on the light scattering layer.
First of all, the TEOS sol-gel process was used to make a mono-dispersed silica particle layer as the silica light scattering layer. Preparation conditions like the concentration of TEOS, the concentration of ammonium hydroxide, the quantity of dispersing agent and the coating type were systematically varied so as to investigate the morphological and optical properties of the silica scattering layer. Through a combination of 1-μm silica particle layer, 300-nm SOG layer, and 700-nm sputtered AZO layer, we obtained a textured TCO glass with sheet resistance of 7.8 Ω/□, total transmittance about 80%, and diffused transmittance (λ=400nm~800nm) over 50%.
A trial of a-Si:H thin film solar cell fabrication on the newly textured TCO glass showed a short circuit current density of 12.9mA/cm2, which is about 19.4% higher than that prepared on Asahi-U type glass, indicating the effectiveness of the light-scattering of the proposed TCO glass.

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