本研究之創新為在既有線放電加工製程上建立不同厚度的輔助電極，並於矽晶圓基材上串聯輔助電極並加工，進而分析此試片特徵之加工誘發電流、表面合金化以及表面粗糙度。其中利用全因子實驗方法(Full-factorial experiments, 3×2×2×2 Test array)與變異數分析 (ANOVA)，找出多晶矽基材材料透過線放電加工(WEDM)及無使用輔助電極、使用15 mm輔助電極以及使用25 mm輔助電極尋找最佳製程參數組合。本實驗之參數組合參考四種可變因子、(三水平輔助電極厚度：0 mm、15 mm、25 mm；二水平伺服電壓：80-100V；二水平脈衝持續時間：50-100 μs；二水平迴路設定電阻：1.4-1.7Ω) 的全因子直交表。於線放電加工製程後，觀察24種參數在加工誘發電流、表面合金化以及表面粗糙度等各項定量指標在工件上的變化，並從中找出最佳線放電加工多晶矽基材參數。並利用統計分析方法中的變異數分析 (ANOVA) 及找出各項指標中之顯著因子，最後將各指標進行分析與結論。
本次實驗結果顯示無使用輔助電極的材料移除率最高為8.74 mg/min，無表面合金化，表面粗糙度最大為Sa 8.76 µm；使用15 mm輔助電極的材料移除率最高為8.91 mg/min，最高表面合金化含量為10.39%，表面粗糙度最大為Sa 8.73 µm；使用25 mm輔助電極的材料移除率最高為9.43 mg/min，最高表面合金化含量為18.28%，表面粗糙度最大為Sa 9.44 µm。

This study presentsa state-of-the-artconcept using assistant source electrodes assembled with target polycrystalline silicon workpiece to enhance machining performances on the observations of material removal rate, surface alloying and surface roughness in wire electrical discharge machining. The designed experiment elaborated key parameters such as three levels of the thickness of the source electrodes (0/15/25 mm), two levels of the servo voltage (80/100V), pulse-on time (50/100 µs) and determined electrical resistivity (1.4/1.7 Ω) in the predetermined discharging circuit for seeking the best parametric combinations. These entailed total 24 tests in a full factorial experiment. The observations are analyzed using statistical methods (Main effect plots and ANOVA) for the examinations of the significance of the operated parameters. The results reflected that the material removal rates were up to 9.43 mg/min when assistant electrodes of 25mm were facilitated whereas the same was only 8.74 mg/min without using assistant electrodes. In addition, the use of assistant electrodes produced surface alloying by up to 18.28% of aluminum content in the scanned matrix. Similarly, the measurements of the surface roughness suggested the greater value (Sa 9.44 µm) were produced with assistant electrodes of 25 mm, compared to the null value recorded without assistant electrode involved.

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