本論文研究以Cu-CeO2-YSZ與Ni-CeO2-YSZ兩種不同材料系統作為固態氧化物燃料電池的陽極材料，分別利用磁控式共濺鍍系統製備CuO-CeO2-YSZ薄膜與NiO-CeO2-YSZ薄膜，再予以適當的熱處理與還原方式，使其形成多孔性結構的CuO-CeO2-YSZ薄膜與NiO-CeO2-YSZ薄膜，用於固態氧化物燃料電池的陽極材料，藉以增加三相界面反應點，進而降低反應極化電阻，提高電池效能。
實驗第一部份是以Cu-CeO2-YSZ為陽極的材料系統，再分別以共濺鍍方式沉積CuO-CeO2-YSZ複合薄膜與Cu-Ce-Zr-Y金屬薄膜，分別進行500℃熱處理與300℃氫氣還原。實驗結果發現在9.46 vol%以上Cu含量的試片經過熱處理後會有銅的顆粒析出於薄膜表面，使得薄膜內部的銅含量降低，還原後僅在析出至表面的銅顆粒聚集處發現孔洞，薄膜內部並無發現明顯之孔洞形成。由於CuO-CeO2-YSZ材料系統經熱處理與還原後沒有形成多孔性微結構，且目前尚無適當方式解決此現象，故改以Ni-CeO2-YSZ作為薄膜陽極材料。
實驗第二部份是以Ni-CeO2-YSZ為陽極的材料系統，以共濺鍍方式沉積NiO-CeO2-YSZ複合薄膜後，分別嘗試以直接吹氫還原與二階段熱處理還原兩種方式，將NiO-CeO2-YSZ薄膜還原為多孔性Ni-CeO2-YSZ薄膜。實驗結果發現，剛濺鍍出的NiO-CeO2-YSZ薄膜在未經過退火處理直接進行800℃氫氣還原，會在薄膜表面成長出金屬鎳的奈米線結構，並留下具有孔洞的微結構。而若是剛濺鍍出的NiO-CeO2-YSZ薄膜經過900℃熱處理後，再進行800℃氫氣還原，則無奈米線結構的生成，並有多孔的結構。鎳奈米線的析出造成薄膜內的Ni含量減少，因此採用二階段熱處理還原方式製備多孔性的Ni-CeO2-YSZ薄膜陽極。
本論文研究之Ni-CeO2-YSZ薄膜進一步應用為燃料電池之陽極，並與以La0.7Sr0.3MnO3與8YSZ粉末依照50wt%：50wt%的比例網印於圓碟型電解質YSZ上以形成電池之陰極，共同組成燃料電池。電池於以甲烷與空氣為燃料氣氛的單氣室電池量測系統中進行量測，量測結果得到在550℃下有最大開路電壓0.4V與最大功率密度0.23 mW/cm2。

In this study, we investigate two different material systems, Cu-CeO2-YSZ and Ni-CeO2-YSZ, for the anode of solid oxide fuel cell (SOFC). By using co-sputter deposition technique, we deposit CuO-CeO2-YSZ or NiO-CeO2-YSZ film, and then use appropriate annealing and reducing conditions to form porous Cu-CeO2-YSZ or Ni-CeO2-YSZ film. The porous structure is expected to increase the three phase boundary and to reduce the polarization loss of the cell.
The first part of study focuses the Cu-CeO2-YSZ material system. We deposited CuO-CeO2-YSZ thin film and Cu-Ce-Zr-Y metal thin film, respectively, following 500℃ annealing and 300℃ reduction in H2. It is found that some Cu particles precipitated out from the surface of thin film, which contains more than 9.46vol%-Cu, after annealing. The Cu precipitation reduced the concentration of Cu in the film. Pores are induced on the region of separated particles only, but not in the inner of the film. There is no appropriate way to overcome this problem at this moment, so the focus was changed to Ni-CeO2-YSZ.
The second part of study focuses on the Ni-CeO2-YSZ material system. NiO-CeO2-YSZ thin films were deposited by co-sputtering, and then heat-treated by two different methods, direct reduction in H2 atmosphere and 2-step annealing and reduction. After the post treatments, the NiO-CeO2-YSZ thin films were converted to Ni-CeO2-YSZ thin film. The Ni nanowire would appear on the surface of the thin film if it is reduced in H2 directly without prior annealing. There were some pores in the thin films prepared by direct reduction. On the other way, if it was annealed at 900℃ firstly and then reduced in H2, the structure will become porous without forming Ni nanowire. Therefore, porous Ni-CeO2-YSZ films were prepared using the 2-step annealing and reduction.
The Ni-CeO2-YSZ was used as anode, 8YSZ disc as electrolyte, and La0.7Sr0.3MnO3 - 8YSZ (50 wt%: 50 wt% ) as cathode to form fuel cells. Performance of the cell was measured in single chamber system using the mix gases of CH4, dry air and water vapor. The maximum open circuit voltage is 0.4V and the maximum power density is 0.23 mW/cm2 at 550℃.

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