研究生: |
林世昌 Shih-Chang Lin |
---|---|
論文名稱: |
共平面結構之分佈反饋式雷射與電致吸收調變器積體化的元件與製程設計 Design of Device Structure and Fabrication Procedures for Integrated Distributed-Feedback Laser with Electro-Absorption Modulator on Semi-Insulating Substrate |
指導教授: |
李三良
San-liang Lee |
口試委員: |
邱逸仁
Yi-jen Chiu 曹恆偉 Hen-wai Tsao 劉政光 Cheng-kuang Liu |
學位類別: |
碩士 Master |
系所名稱: |
電資學院 - 電子工程系 Department of Electronic and Computer Engineering |
論文出版年: | 2009 |
畢業學年度: | 97 |
語文別: | 中文 |
論文頁數: | 90 |
中文關鍵詞: | 積體化 、分佈反饋式雷射 、電致吸收調變器 、量子井混合 |
外文關鍵詞: | DFB Laser, EAM, Integrate, Distributed-Feedback Laser, QWI |
相關次數: | 點閱:234 下載:8 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
本論文主要之研究為利用量子井混合效應來設計製作雷射與電
吸收調變器共平面結構之積體化元件,使其能運用在高速的光通訊系
統中。主動層材料為磷砷化銦鎵(InGaAsP)的材料。發光波段主要
設計在1550 nm。
在元件製作的結構上,為了達到高速傳輸(>40 Gbits/s),元件的
寄生電容要越小越好,而行波式電極克服了集總式電極所產生的高電
容電阻效應,可達到更高速的調變,故本研究選擇行波式共平面結構
來製作。而經由模擬電吸收調變器吸收頻譜的分析,為了達到傳輸時
較低的傳輸損耗(<10 dB)與較高的信號明滅比(>15 dB),分析出
來雷射區與電吸收調變區最佳的能隙波長偏移量為52 nm至64 nm之
間,在操作偏壓為1.2 伏特的條件下,信號明滅比可達到18 dB。而
藉由本實驗所設計出的量子井混合效應造成的能隙偏移量,至多可達
98 nm左右的偏移,足以達成本實驗所要求之最佳能隙偏移值。
本論文亦以單一主動層(Single Active Layer)技術設計一對照組
與量子井混合技術比較。此技術是直接將布拉格波長設置在電吸收調
變器吸收邊緣上,不需額外的蝕刻或離子佈值。經由模擬分析,雷射
主動層結構之發光波段預估可達到1600 nm。
The quantum well intermixing(QWI)technique is used to fabricate
the integrated device that combines a distributed feedback laser(DFB)
and an electro-absorption modulator(EAM) on semi-insulating substrate
for very high speed fiber communication system(>40 Gbits/s). The
active layers of quantum wells are made of InGaAsP materials, and the
lasing wavelength is designed to be 1550 nm.
In the device structure, the traveling-wave(TW)structure is better
than the lumped structure due to its lower parasitic capacitance, which
leads to a high modulation bandwidth. We choose the traveling-wave
coplanar structure to realize the DFB/EAM integrated devices.
To obtain lower transmission loss (< 10 dB) and higher extinction
ratio(>15 dB), the EAM absorption spectrum is analyzed, and the
optimal blue shift value is approximately 52 to 64 nm. In this range of
blue shift wavelength, a high extinction ratio(>18dB)can be obtained for
1.2 V driving voltage. The maximum blue shift value can reach to 98 nm
for the QWI annealing test.
For comparisons with the QWI device, the identical active layers
and used for realizing the integrated DFB/EAM laser, the key concept of
this technique is to locate the lasing wavelength of the DFB at the
absorption edge of EAM. Therefore, we should make sure that the laser
could lase at the wavelength of absorption edge of the EAM. From the
simulation results, the lasing wavelength may exceed 1600 nm.
[1]M. Arumugam, “Optical fiber communication—an overview,” J. Phys., vol. 57, pp. 849-869, 2001
[2]T. L. Koch and J. Bowers, “Nature of wavelength chirping in directly modulated semiconductor lasers,” IEEE Electron Lett., vol. 20, pp. 1038-1040, 1984.
[3]S. Zhang, “Traveling-wave electro-absorption modulators,” University of California, Santa Barbara, Ph. D. Dissertation, 1999.
[4]J. G. Mendoza-Alvarez, L. A. Coldren, A. Alping, R. H. Yan, T. Hausken, K. Lee, And K. Pedrotti, “Analysis of depletion edge translation lightwave modulators,” IEEE J. Lightwave technol., vol. 6, pp. 793-808, 1988.
[5]Q. Zhao, J. Q. Pan, J. Zhang, B. X. Li, F. Zhou, B. J. Wang, L. F. Wang, J. Bian, L. J. Zhao, W. Wang, “Monolithic integration of electro-absorption modulator and DFB laser for 10-Gb/s transmission,” Optics Communications 260.,pp.666-669,2006.
[6]H. Fukano, T. Yamanaka, M. Tamura, H. Nakajima, Y. Akage, Y. Kondo and T. Saitoh, “40 Gbits/s electro-absorption modulators with 1.1V driving voltage,” IEEE Electron Lett., vol. 40 , pp.1144-1146, 2004.
[7]T. Ido, H. Sano, M. Suzuki, S. Tanaka, and H. Inoue, “Ultra-high-speed multiple-quantum-well electro-absorption optical modulators with integrate waveguides,” IEEE J. Lightwave Technol., vol. 14, pp. 2026-2034, 1996.
[8]K. Sato, I. Kotaka, K. Wakita, Y. Kondo and M. Yamamoto, “Strained-InGaAsP MQW electro-absorption modulator integrated DFB laser,” IEEE Electron. Lett., vol. 129, pp. 1087-1089, 1993.
[9]H. Fukano, Y. Akage, Y. Kawaguchi, Y. Suzaki, K. Kishi, T. Yamanaka, Y. Kondo, and H. Yasaka, “Low chirp operation of 40 Gbit/s electro-absorption modulator integrated DFB laser module with low driving voltage,” IEEE Quantum Electron., vol. 13, pp. 1129-1134, 2007.
[10]Q. Zhao, J.Q. Pan, J. Zhang, B.X. Li, F. Zhou, B.J. Wang, L.F. Wang, J. Bian, L.J. Zhao, W. Wang, “MQW electro-absorption modulator integrated DFB laser modules for high-speed transmission,” Semicond. Sci. Technol., vol. 21, pp. 734-739, 2006.
[11]A. Ramdane. F. Devaux, N. Souli, D. Delprat, and A. Ougazzaden, “Monolithic integration of multiple-quantum-well lasers and modulators for high-speed transmission,” IEEE Quantum Electronics., vol. 2, pp. 326-335, 1996.
[12]S. Tarucha. H. Kobayashi, Y. Horikoshi and H. Okamoto, “Carrier induced energy-gap shrinkage in current injection GaAs/AlGaAs MQW hetero-structures,” Japan. Appl. Phys., vol. 23, pp. 874-878, 1984.
[13]J. H. Marsh, “Quantum well intermixing,” Semlcond. Sci.Technol., vol. 8, pp. 1136-1155, 1993
[14]D. J. Han, J. S. Niu , H. L. Zhu , H. Q. Zhu and W. R Zhuang, “ Impurity-free vacancy diffusion technique for InGaAsP/InP multiple quantum well laser structure,” Chin. Phys. Lett., vol. 18, pp. 100-102, 2001.
[15]J. W. Raring, L. A. Johanssont, E. J. Skogent, M. N. Sysakt, H. N. Poulsent, S. P. DenBaars, and L. A. Coldren, “Low drive voltage, negative chirp 40 Gbits/s EA-modulator/widely-tunable laser transmitter, using quantum-well-intermixing,” OFC ., PDP26, pp 1-3, 2006.
[16]L. Hou, Z. Ren, S. Yu, H. Zhu, and W. Wang, “Electro-absorption-modulated DFB laser integrated with dual-core spot-size converters,” J. Lightwave Technol., vol. 25, pp. 239-248, 2007.
[17]G. L. Li, P. K. L. Yu, “Optical intensity modulators for digital and analog applications,” J. Lightwave. Technol., vol. 21, pp. 2204-2206, 2003.
[18]G. L. Li, C. K. Sun, S. A. Pappert, W. X. Chen, and P. K. L. Yu, “Ultrahigh-speed traveling-wave electro-absorption modulator design and analysis,” IEEE Transactions On Microwave Theory And Technique, vol. 47, pp.1177-1183, 1999.
[19]C. E. Zah. R. Bhat, B. N. Pathak, F. Favire, W. Lin, M. C. Wang, N. C. Andreadaki, D. M. Hwang, M. A. Koza, T. P. Lee, Z. Wang, D. Darby, D. Flanders, and J. J. Hsieh, “High-performance un-cooled 1.3-m AlxGayIn1-x-yAs/InP strained-layer quantum-well lasers for subscriber loop applications,”IEEE Quantum Electron., vol. 30, pp. 511-521, 1994.
[20]H. Fukano, T. Yamanaka, M. Tamura, and Y. Kondo,“Very-low-driving-voltage electro-absorption modulators operating at 40 Gb/s, IEEE J. Lightwave Technol., vol. 24, pp. 2219-2224, 2007.
[21]G. Muller, D. Hofmann, P. Kipfer, F. Mose1,“The preparation of Fe-doped and nominally un-doped semi-insulating InP,”IEEE, pp. 21-24, 1990.
[22]P. Gerlach, M. Peschke, T. Wenger, B. K. Saravanan, C. Hanke, S. Lorch, R. Michalzik,“Complex-coupled distributed feedback laser monolithically integrated with electro-absorption modulator and semiconductor optical amplifier,” Proc. SPIE., vol 6183. pp. 61831J-1-61831J-9, 2006.
[23]鄭宏祥,“有機基板上的貫穿孔之電性特性分析與模型化,”碩士論文,國立中山大學, 2007
[24]Y. J. Chiu, H. F. Chou, V. Kaman, P. Abraham, and J. E. Bowers,“ High extinction ratio and saturation power traveling-wave electro-absorption modulator,” IEEE Photon. Technol. Lett., vol. 14, pp. 792-794. 2002.
[25]S. Tarucha. S. Tarucha, H. Kobayashi, Y. Horikoshi, and H. Okamoto, “Carrier induced energy-gap shrinkage in current injection GaAs/AlGaAs MQW hetero-structures,” Japan. Appl. Phys., vol. 23, pp. 874-878, 1984.
[26]S. H. Park, J. I. Shim, K. Kudo, M. Asada, and S. Arai, “Bandgap shrinkage in GaInAs/GaInAsP/InP multi-quantum well lasers,” Japan. Appl. Phys., vol. 72, pp. 279-281, 1992.
[27]T. Knödl, C. Hanke, B. K. Saravanan, M. Peschke, R. Schreiner, and B. Stegmüller, “Integrated 1.3 μm InGaAlAs-InP laser–modulator with double–stack MQW layer structure,” Infineon Technologies AG., vol. 5451, pp 1-7. 2004.