研究生: |
林孟駿 Meng-Jyun Lin |
---|---|
論文名稱: |
飛秒雷射製作鍍鉻玻璃光柵 Manufacturing of glass grating with chromium coating by femtosecond laser |
指導教授: |
鄭正元
Jeng-Ywan Jeng |
口試委員: |
洪基彬
Ji-Bin Hong 謝宏麟 Hung-Lin Hsieh |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2015 |
畢業學年度: | 103 |
語文別: | 中文 |
論文頁數: | 61 |
中文關鍵詞: | 飛秒雷射 、繞射光柵 |
外文關鍵詞: | femtosecond laser, diffraction grating |
相關次數: | 點閱:172 下載:4 |
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本研究探討飛秒雷射對金屬鍍層加工後的狀況,飛秒雷射具有冷加工之稱,加工機制不同於傳統長脈衝型雷射的光熱加工,而是由光化學機制打斷材料鍵結,移除材料,依此特性能得到良好的加工表面。實驗藉由進行不同加工參數測試,得到對應加工後的線寬與邊緣,建立參數比較結果,可得後續加工所需要的依據,並使用光學顯微鏡與光學繞射法做為觀察量測方法。結果顯示在參數調整與線寬會呈現單向發展趨勢,繞射量測各階數以較高的duty cycle有較好的繞射功率。
This research is discussing about the condition of metal coating layer after femtosecond laser machining. The time of heat transfer is longer than material removing during femtosecond laser processing. Traditional long pulsed laser uses photo-thermal mechanism to remove material where femtosecond laser uses photo-chemical mechanism to remove material by breaking the bonding of material. Based on these properties, it can get good surface after machining. The experiment will compares different parameter and have a result with line width and edge which correspond to each parameter, these data should be a basis of following process. The method of measurement and observation use optical microscope and optical diffraction. After the test, it can be found that line width changes based on the parameter with single trend direction, and higher duty cycle make higher diffraction power.
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