研究生: |
吳奎霖 Kuei-Lin Wu |
---|---|
論文名稱: |
針對層狀定向自組裝技術考慮雙重圖形和最小化短導引樣板之細部繞線 Lamellar DSA-aware Detailed Routing Considering Double Patterning and Short Template Minimization |
指導教授: |
方劭云
Shao-Yun Fang |
口試委員: |
呂學坤
Shyue-Kung Lu 陳勇志 Yung-Chih Chen 劉一宇 Yi-Yu Liu |
學位類別: |
碩士 Master |
系所名稱: |
電資學院 - 電機工程系 Department of Electrical Engineering |
論文出版年: | 2022 |
畢業學年度: | 111 |
語文別: | 英文 |
論文頁數: | 58 |
中文關鍵詞: | 層狀定向自組裝技術 、細部繞線 |
外文關鍵詞: | lamellar DSA, detailed routing |
相關次數: | 點閱:156 下載:0 |
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[2] Y. Ma, J. Kye, G.-S. Khaira, L. Hong, J. Word, Y. Sun, J. Mi- tra, J.-A. Torres, G. Fenger, and H. J. Levinson, “Design technol- ogy co-optimization (DTCO) study on self-aligned-Via (SAV) with lamel- lar DSA for sub-7 nm technology,” Proc. SPIE 10148, Design-Process- Technology Co-optimization for Manufacturability XI, 101480B (30 March 2017); https://doi.org/10.1117/12.2258056
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