針對層狀定向自組裝技術考慮雙重圖形和最小化短導引樣板之細部繞線

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研究生：	吳奎霖 Kuei-Lin Wu
論文名稱：	針對層狀定向自組裝技術考慮雙重圖形和最小化短導引樣板之細部繞線 Lamellar DSA-aware Detailed Routing Considering Double Patterning and Short Template Minimization
指導教授：	方劭云 Shao-Yun Fang
口試委員:	呂學坤 Shyue-Kung Lu 陳勇志 Yung-Chih Chen 劉一宇 Yi-Yu Liu
學位類別：	碩士 Master
系所名稱：	電資學院 - 電機工程系 Department of Electrical Engineering
論文出版年：	2022
畢業學年度：	111
語文別：	英文
論文頁數：	58
中文關鍵詞：	層狀定向自組裝技術、細部繞線
外文關鍵詞：	lamellar DSA, detailed routing
相關次數：	點閱：147 下載：0
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Abstract    iv
List of Tables    viii
List of Figures    ix
Chapter 1.    Introduction    1
1.1    Directed Self-Assembly    1
1.2    DSA with Self-Aligned Via    2
1.3    Motivation    3
1.4    Contributions    5
1.5    Thesis Organization    7
Chapter 2.    Preliminaries    8
2.1    Design Constraints    8
2.2    Problem Formulation    9
Chapter 3.    Lamellar DSA-aware Routing    11
3.1    Prerouting    11
3.1.1    Net Interaction Graph Construction    12
vi
3.1.2    Dense Graph Finding    13
3.1.3    ILP formulation for Dense Graph Trunk Assignment    16
3.1.4    Conflict Graph and Via Forbidden Map Construction    25
3.2    Short Template-aware Detailed Routing    38
3.2.1    Routing Graph Model    38
3.2.2    A* Search Cost Function    39
3.2.3    Rip-Up and Rerouting    40
3.3    Post Optimization    41
Chapter 4.    Experimental Results    42
Chapter 5.    Conclusion    46
Bibliography    47

                                

[1] A.-J. Shih, S.-Y. Fang, and Y.-Y. Liu, “Guiding Template Design for Lamellar DSA with Multiple Patterning and Self-Aligned Via Process,” IEEE/ACM International Conference On Computer Aided Design (ICCAD), pp. 1-6, 2020.
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[7] K.-L. Lin, and S.-Y Fang, “Guiding Template-aware Routing Considering Redundant Via Insertion for Directed Self-Assembly,” In Proc. ACM/IEEE Asia South Pacific Design Autom. Conf., pp. 170-175, Jan. 2017.
[8] J. Ou, B. Yu, X. Xu, J. Mitra, Y. Lin, and D.-Z. Pan, “DSAR:DSA aware routing with simultaneous DSA guiding pattern and double patterning assignment,” In Proc. of ISPD, pp. 91-98, 2017.
[9] H. -J. Yu, and Y. -W. Chang, “DSA-friendly detailed routing considering double patterning and DSA template assignments,” In Proc. of DAC, pp. 1-6, 2018.
[10] IBM ILOG CPLEX Optimizer.
http://www-01.ibm.com/software/integration/optimization/cplex-optimizer/
[11] B. Bollob´as, “Modern Graph Theory,” Vol. 184 of Graduate Texts in Mathe- matics. New York: Springer-Verlag, 1998.
[12] T. -H. Cormen, C. -E. Leiserson, and R. -L. Rivest, “Introduction to Algo- rithms,” The MIT Press, 1990.

全文公開日期 2027/10/19 (校內網路)
全文公開日期 2027/10/19 (校外網路)
全文公開日期 2027/10/19 (國家圖書館：臺灣博碩士論文系統)

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