本論文分別就兩個主題進行研究討論：一為反應性濺鍍氮化鋯薄膜及其作為銅導線之阻障之研究，另一為以鎳電極系統作為生物感測器。
有關於擴散阻障層的部分，VLSL技術的發展，常利用銅作為內接線材料，但在低溫中，銅會與矽發生反應，形成銅矽化合物(Cu-Si compounds)，此化合物容易導致元件失效，因此需要擴散阻障層來防止銅擴散到矽。由於低電阻率及低的生成熱，氮化鋯具備作為阻障層的潛力。本文採用濺鍍儀製備氮化鋯薄膜，並研究改變氮氣流率對氮化鋯薄膜微結構、晶體結構、組成以及電性的影響。阻障層失效之機制研究是用Cu(60 nm)/ZrNX(25 nm)/Si多層膜進行退火分析。使用四點探針分析片電阻變化率、X-繞射儀分析結晶結構、X光光電子能譜儀的縱深分析可得各元素分佈圖、掃描式電子顯微鏡可觀察材料表面型態，依據以上儀器的量測結果，確認銅穿透過阻障層與矽反應的失效溫度。結果顯示，隨N2/Ar流量比增加失效溫度會上升，會使得氮化鋯的沉積速率以階梯變化下降、結晶結構由hexagonal-Zr變成NaCl-ZrN及電阻率會上升。根據XPS分析結果，在N2/Ar流量比大於0.07時，薄膜組成趨近於計量比。在N2/Ar流量比為0~0.07時，晶粒尺寸會隨氮氣量增加而減少，但在0.07以後不再有明顯的變化。ZrN 薄膜中氮原子含量越多，失效溫度就越高。實驗結果顯示ZrN0.96為最好的阻障層，在800 °C下退火30分鐘時，能有效阻擋銅的擴散。
在生物感測器的部分，由於糖尿病是常見的疾病，若人體的血糖值超過或低於人體的正常值80-120 mg/dL (4.4-6.6 mM) 時，會造成心臟病、腎功能衰竭及失明等疾病。因此葡萄糖生物感測器在偵測血糖值扮演著重要的角色。本篇利用溶膠(sol-gel)及幾丁聚醣(chitosan)所合成的複合材料固定酵素，製作低成本且簡單的葡萄糖生物感測器。同時基於成本考量，本論文成功設計並製造出鎳電極，以取代傳統常用的貴重金屬材料，如金、白金等。使用計時安培法探討包埋膜配方、施加於工作電極的電位、酵素於固定層中的含量、以及溶液中電子傳遞物質等參數，對葡萄糖生物感測器性能的影響，並找到其最佳性能。實驗結果顯示以貴重金屬的奈米粒子改質之碳管來修飾電極，能夠增加電極表面積，使電流的訊號變強。葡萄糖生物感測器的最適化配方為TEOS:H2O:chitosan=100:275:1.28、以0.25 V的施加電位、20 unit的酵素固定量以及75 mM的溶液中電子傳遞物質濃度。葡萄糖生物感測器的反應時間為( 5 s )，並具適當的線性範圍2.99~37.50 mM (R-square=0.9916)，高的靈敏度(2.80 μA/mM)，偵測極限為0.5 mM (S/N>3)，Michaelis-Menten常數為38 mM。

Two topics were investigated in this thesis: diffusion barrier and nickel based biosensor.
For the preparation of diffusion barrier, Cu thin films for interconnect applications in VLSI technology have become a very popular technique. However, at relatively low temperatures, Cu reacts with Si to form a Cu-Si compound leading the break down of devices. Therefore, there is a need to develop a thin diffusion barrier film for the prevention of Cu diffusion into silicon. ZrN is a promising candidate for a diffusion barrier material due to its low electrical resistivity and large negative heat of formation. The ZrNX films were prepared by reactive sputtering. This work presents the effects of nitrogen flow rate on the microstructure, crystalline structure, composition and electrical properties of ZrNX films. The multilayers of Cu(60 nm)/ZrNX(25 nm)/Si after thermal annealing were adopted to conduct failure mechanism analyses. In this study, differnet analytical tools were utilized including four point probe (FPP), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) to analyze the changing rate of sheet resistance, crystalline structure, element distribution of depth profile and microscopic images, respectively. Based on the above measurements, it was identified that the failure temperature leading Cu to pass through diffusion barrier and to react with Si. The results showed that the increased N2/Ar flow ratio resulted in the deposition rate of ZrNX films decreased with stairway variation, the changes of crystalline structure from hexagonal-Zr to NaCl-ZrN, and an increased resistivity, respectively. Based on the XPS analyses, ZrNX showed a near-stoichiometric composition when N2/Ar flow ratio is 0.07. The grain size of the ZrNX decreased with increasing N2/Ar flow ratio while N2/Ar flow ratio was 0~0.07, and no significant change when N2/Ar flow ratio was larger than 0.07. The More nitrogen composition of ZrNX resulted in a larger failure temperature. Finally, ZrN0.96 possessed the best barrier performance that can prevent Cu to react with Si up to 800 °C for 30 min.
The second part of this thesis. Diabetes mellitus is a worldwide public health problem which is the cause of heart disease, kidney failure, blindness, etc. These symptom reflected by blood glucose concentration higher or lower than the normal range of 80-120 mg/dL (4.4-6.6 mM). Amperometric enzyme electrodes, based on glucose oxidase (GOX), played a leading role in the blood sugar test. This work presented a low cost and simple method for the fabrication of glucose biosensor. The biosensor was constructed by entrapping glucose oxidase in chitosan/silica sol-gel hybrid membranes (CSHMs) on a new type of nickel electrode. The immobilization of enzymes has been widely used in organic-inorganic technology which was prepared from tetraethyl orthosilicate (TEOS) and water under hydrolysis by hydrocholoric acid as catalyst and, then mixed with chitosan solution. On the basis of economic considerations, the nickel electrode was designed and successfully fabricated in this study to replace noble metal materials such as gold and platinum. The amperometric technique was used to investigate the effects of operational parameters such as CSHMs composition, the operating potential of the working electrode, enzyme loading, and mediator concentration on performance of the glucose biosensor. Experimental results indicated that a noble metal nanoparticles/carbon nanotube nanohybrids was introduced to biosensor systems which can increase electrode surface area and enlarge the current responses. The optimized conditions for the fabricated in glucose biosensor were CSHMs composition ratio of (TEOS:H2O:Chit=100:275:1.28), the applied potential (0.25 V), the enzyme loading (20 unit) and mediator concentration (75mM). The biosensors exhibited the fast amperometric response (within 5s), a good linearly range from 2.99 mM to 37.50 mM glucose concentration (R=0.9916), a higher sensitivity (2.80 μA/mM) and a detection limiting 0.5 mM (S/N>3). The apparent Michaelis-Menten constant (KMapp) for biosensor was 38 mM.

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