隨著光學玻璃的需求增加，對於特定的形狀，形式，表面紋理和大小(微型化) 的精密度要求也有所增加。適用於測量設備所使用的參考反射鏡的標準和表面精製度就顯得至關重要。因此，在製造工業上，表面精加工是不可缺少的。在這項研究中，提出了一種新型的自轉式多噴射磨料流體拋光技術; 在其中，一個無葉片式的特斯拉（Tesla）渦輪機被用作超精拋光過程的原動機。渦輪機的特點是在出口處的高旋轉速度; 因此，遠離渦輪機產生的高強度的動能的被用作拋光的動能。計算流體動力學（CFD）也被用來模擬磨料流在渦輪機葉片上的流動。藉由一個全新設計製造的拋光工具，針對改善冠狀光學玻璃（N-BK7）的表面粗糙度改善，探討最佳拋光參數。田口(Taguchi) 實驗方法，藉由一個L18正交陣列，被用來求得最佳的製程參數。變異數分析（ANOVA）也被運用來決定顯著因子。表面粗糙度（Ra）提升了約94.44％，由0.36μm至0.02微米。同時，本研究也對改善表面粗糙度的影響相關顯著因子進行深入討論。
此外，隨著現代科技的進步，高精密的表面處理技術用於光學玻璃也受到極大關注和開發，以滿足有效率工業處理流程的要求。不僅所使用的工具，過程參數對表面粗糙度的改善也有很大影響。在這項研究中，利用創新的旋轉磨料流體多噴射流拋光流程來改善微晶玻璃的光學玻璃的表面粗糙度的研究過程也同時呈現。出於同樣的目的，用於執行超精密拋光工具也被設計和製造。藉由田口實驗方法L18正交陣列，可求得最佳的加工參數，本研究也完成變異數分析以決定顯著因子。根據實驗結果發現，表面粗糙度（Ra）的提升已達成了大約了98.33％，由0.360微米至為0.006微米。本實驗結果表明，表面處理技術的實現能夠滿足光學性能面（粗糙度Ra <12毫微米）的要求。此外，顯著因子對表面粗糙度的改進的影響也在本研究中詳細討論。
拋光工具的進一步應用在無光學玻璃表面粗糙度的改善和消除單點金剛石車削（SPDT）刀痕，本研究也進行測試。藉由增加進給速率以產生最佳化的自轉式FJP參數，N-BK7球面光學玻璃的表面粗糙度（Ra）改善了約47.73％從0.398微米至0.208微米。此外，利用主軸輔助型多噴射流磨料流體微拋光工具，約48.74％的球形N-BK7光學玻璃的表面粗糙度（Ra）可獲得改善，從0.398μm至0.204μm。同時，主軸輔助型拋光製程，可以顯著地移除鍍鎳STAVAX模具鋼上的單晶鑽石刀具之加工痕跡。

As the demand for optical glasses has increased, precision requirements for specific shapes, forms, surface textures, and sizes (miniaturization) have also increased. The standards and surface finishes applied to the reference mirrors used in measuring appliances are crucial. Hence, enhancements in figuring and surface finishing are indispensable to manufacturing industries. In this study, proposes a novel self-propelled rotary multi-jet abrasive fluid polishing technique for an ultra-precision polishing process in which a bladeless Tesla turbine used as a rotary actuator. The turbine characterized by high swirling velocity at the outlet; therefore, high levels of kinetic energy moving away from the turbine were used as polishing energy. Computational fluid dynamics (CFD) was also used to simulate the flow on the turbine blades. With a newly designed and manufactured polishing tool, the optimal polishing parameters for improving the surface roughness of a crown optical glass (N-BK7) were investigated. Taguchi’s experimental approach, an L18 orthogonal array, was employed to obtain the optimal process parameters. An analysis of variance (ANOVA) was also conducted to determine the significant factors. The surface roughness has been improved by approximately 94.44% from (Ra) 0.36 μm to (Ra) 0.02 μm. This study also presents a discussion on the influence of significant factors on improving surface roughness.
Moreover, with the advance of contemporary technology, high precision surface finishing techniques for optical glasses are of great concern and developing to meet the requirements of the effective industrialized processes. Not only the used tools, but also process parameters have great influence on the surface roughness improvements. In this study, surface roughness improvement of Zerodur optical glass using an innovative rotary abrasive fluid multi-jet polishing process has been presented. For the same purpose, a tool for executing ultra-precision polishing was designed and manufactured. Taguchi’s experimental approach, an L18 orthogonal array was employed to obtain the optimal process parameters. ANOVA analysis has also been carried out to determine the significant factors. It was observed that about a 98.33% improvement on surface roughness from (Ra) 0.360 μm to (Ra) 0.006 μm has been achieved. The experimental results show that the polished surface can satisfy the requirements for optical-quality surface (Ra<12nm). In addition, the influence of significant factors on surface roughness improvement has been discussed in this study.
Further application of this developed polishing tool has been tested on 3D surface optical glasses on surface roughness improvement and removal of single point diamond turned (SPDT) marks. The surface roughness improvement on N-BK7 3D surface optical glass was about 47.73 % from (Ra) 0.398μm to (Ra) 0.208μmusing optimal self-propelled FJP parameters with feed rate enhancement. In addition to this, using spindle assisted mult-jet abrasive fluid polishing tool, about 48.74% of surface roughness improvement on 3D surface N-BK7 optical glass was achieved from (Ra) 0.398 μm to (Ra) 0.204 μm. Meanwhile, spindle assisted polishing process can significantly remove the SPDT marks considerably on Nickel plated STAVAX mold steel.

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