研究生: |
黃仲豪 Chung-Hao Huang |
---|---|
論文名稱: |
三軸微型銑削工具機研製與微銑切無氧銅之最佳參數研究 Research on the Development of a Meso-scale 3-axis Milling Machine and the Optimal Micro-milling Parameters for the Oxygen Free Copper |
指導教授: |
修芳仲
Fang-Jung Shiou |
口試委員: |
鄧昭瑞
Geo-Ry Tang 鍾俊輝 Chun-Hui Chung |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2012 |
畢業學年度: | 100 |
語文別: | 中文 |
論文頁數: | 162 |
中文關鍵詞: | 微型銑削工具機 、線性馬達 、PID控制 、田口實驗 、微銑削 |
外文關鍵詞: | meso-scale 3-axis milling machine, liner motor, PID control, Taguchi’s experimental, micro-milling |
相關次數: | 點閱:392 下載:1 |
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本研究主旨在開發一三軸微型銑削工具機,此工具機主要由XY共平面平台及Z軸高速主軸夾持及配重機構組合而成, X、Y、Z三軸皆使用線性滑軌做為移動軸承,驅動方式由LNC-M600 CNC控制器與Elmo驅動器對線性馬達進行運動控制,位移訊號經由光學尺回授給驅動器,形成一閉迴路控制系統。
本工具機之X、Y軸全行程位移為50 mm,Z軸全行程位移為30 mm,連接PC、LNC-M600 CNC控制器與Elmo 驅動器,建立一閉迴路PID控制系統,X軸之步階定位能力可控制在30 nm,Y軸之步階定位能力控制在40 nm,Z軸之步階定位能力控制在30 nm。X軸系統誤差範圍為0.00267~-0.00183 mm,Y軸系統誤差範圍為0.00093~-0.00591 mm,Z軸系統誤差範圍為 -0.00125~-0.00402 mm。
本研究另一結果為於CL-2MD 高速雕刻機進行微銑削無氧銅之最佳化參數實驗,以直徑0.2 mm微銑刀切削無氧銅,並以表面粗糙度望小做為田口實驗分析法的品質特性,於田口L9直交表實驗後,可得到最佳微銑削無氧銅的參數組合為:主軸轉速50,000 rpm、切削深度0.005 mm、切削間距0.02 mm、進給率75 mm/min 。
There are two main parts in this study. First, the development of a meso-scale 3-axis milling machine has been introduced. Second, the optimal micro-milling parameters have been determined for cutting the oxygen free copper using a high speed spindle.
The developed micro 3-axis milling machine system is constructed with a XY coplanar stage and a Z-axis high-speed spindle clamping mechanism mounted on a pagoda structure. The XY coplanar stage and Z-axis structural were guided by a linear guideways. The developed machine tool was driven by the LNC-M600 CNC controller and Elmo digital servo driver for the precision motion control of the linear motors.
Based on the test results, the closed loop 3-axis milling machine system was able to provide precision positioning with the travel of 50 mm along XY-axis and the travel of 30 mm along Z-axis. By utilizing the LNC-M600 CNC controller and Elmo digital servo driver closed-loop of PID control system, the positioning capability of X-axis was about 30 nm, Y-axis was about 40 nm, and Z-axis was about 30 nm. Based on the linear displacement measurement results, the system error along X-axis was 0.00267~-0.00183 mm, Y-axis was 0.00093~-0.00591mm, and Z-axis was -0.00125~-0.00402 mm.
The Taguchi’s experimental method was applied to determine the optimal micro-milling parameters for the oxygen free copper by using a micro-mill with a diameter of 0.2 mm. Based on the results of Taguchi’s L9 matrix experimen and the analysis of variation (ANOVA), the optimal micro-milling parameters for milling the oxygen free copper were the combination of the spindle speed of 50,000 rpm, the depth of cut of 0.005 mm ,the stepover of 0.02 mm, and the feed of 75 mm/min.
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