本研究利用半導體黃光微影技術，以石英為基材，製作壓電式IDA微金電極，IDA微金電極之線寬與長度分別為7.894 μm與2245.3 μm。本論文研究分成三部分：(1) 以二氧化矽保護層與四氟化碳 (CF4) 電漿，改質IDA微金電極，製備葡萄糖生物感測器；(2) 以甲殼素(chitosan)和矽酸乙酯(tetraethyl orthosilicate, TEOS) 溶膠凝膠法，固定葡萄糖氧化酶 (glucose oxidase, GOx) 於IDA微金電極，製備葡萄糖生物感測器；(3) 第三部分則是利用石英基材特有的壓電性質，以電漿沈積丙烯胺 (allylamine) 於IDA微金電極上，控制L-929纖維母細胞的生長，並以網路分析儀量測因細胞數目改變而造成頻率變化，計算不同型態細胞的質量。
第一部份，研究為確保IDA微金電極量測時不受以循環伏安法進行電化學實驗時施加電位之影響，以二氧化矽薄膜保護IDA微金電極，但由於沈積二氧化矽薄膜後導致所量測的電流強度下降，本研究利用CF4電漿進行表面改質，使電流響應提高，同時，在電極上加入葡萄糖氧化酶後，可應用於製備IDA微金電極葡萄糖感測器，實驗結果顯示所製備的感測器感測葡萄糖之靈敏度為0.13 贡A/mg/dL (1.83 贡A/mg/dL责cm2)。
第二部份是以甲殼素-矽酸乙酯 (chitosan-TOES) 溶膠凝膠法混合葡萄糖氧化酶，固定葡萄糖氧化酶於IDA微金電極，IDA微金電極以雙電極模式(dual mode, 同時使用collector與generator兩電極)、四極式電極的形式進行電化學量測，可同時量測氧化與還原反應之電流響應，獲得的實驗結果可偵測濃度範圍為0-35 mM之葡萄糖，靈敏度為0.62 贡A/mM (8.74 贡A/mM责cm2)。
第三部份是以電漿聚合丙烯胺單體，形成電漿高分子膜於IDA微金電極表面，藉由以不同時間沈積allylamine 獲得具有不同胺官能基數目的表面，以控制的細胞生長數目與型態，藉由Network Analyzer 測量頻率改變，因此本實驗可計算出圓球型的細胞質量約為 4.13 pg，而延展型細胞質量約為12.87 pg，延展型細胞的質量約為圓球型的3倍。

A glucose biosensor with superior accuracy and sensitivity was successfully developed based on an interdigital transducer array (IDA) microelectrode (贡-electrode). The IDA 贡-electrode was prepared by a photolithography procedure with sputter coated thin layers of both gold and SiO2, followed by tetrafluoromethane (CF4) plasma treatment. The enzymatic interactions between glucose and the reactants were monitored by cyclic voltammetry method to determine the blood glucose concentration. The surface properties of the developed glucose biosensor were characterized by electron spectroscopy for chemical analysis (ESCA), atomic force microscopy (AFM), and surface wettability. The correlations between the results of surface analyses and the current responses indicated that the CF4 plasma facilitated both the exposure of gold layer underneath the protection layer and the raise of surface hydrophobicity, and therefore the enhancement of the current responses. The developed IDA-贡-electrode-based glucose biosensor showed particular precision and excellent reproducibility in measuring glucose concentration under the presence of common interferences and in real human blood measurements. Moreover, the IDA 贡-electrode displayed a sensitivity of 0.13 贡A/(mg/dL) (1.83 贡A/mg/dL责cm2) which is much higher than commercially available products.
The prepared IDA 贡-electrode was further used as an enzymatic glucose biosensor with a layer of glucose oxidase (GOx), entrapped in a three-dimensional network composed of chitosan (CS) and tetraethyl orthosilicate (TEOS) sol-gel. The experimental parameters for the best glucose sensing performance were optimized according to the loading of GOx, the applied voltages, the concentration of mediator, and the pH for glucose detection. The resulted biosensor exhibited a good response to glucose with a wide linear range from 0 - 35 mM and a low detection limit of 1 mM. The glucose sensor also showed a short response time (within 5 s) that the fast response was reflected by the small Michaelis-Menten constant (KMapp) with a value of 2.94 mM. The reported glucose biosensor exhibited good sensitivity (8.74 μAmM-1•cm-2), reproducibility, and stability.
The prepared IDA 贡-electrode was constructed using quartz as substrate which possesses the piezoelectric property that the change of frequency reflects the mass change on the surface of the quartz. This part took the particular property of quartz material and coated the surface of quartz with different amount of amine functional groups by using plasma polymerization of allylamine (PPA) for the cultivation of L-929 fibroblasts in order to evaluate the mass of an individual cell. The plasma polymerization revealed constant deposition rate for the PPA and the amine functional groups increased as function of the deposition time for the first 60 minutes and reached a constant value. The number of L-929 fibroblasts on the PPA deposited IDA 贡-electrode was quantified by the Network Analyzer for finding the frequency shift and the corresponding mass. The mass of the individual cell with different morphology can therefore be estimated that the cell with spherical morphology is about 4.13 pg and the highly extended cell is about 12.87 pg.

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