由於目前LCD面板的需求量越來越大，為了提升產品的良率且降低製造成本，於是本文以垂直層流式面板儲存櫃為研究課題，深入探討其中之氣流夾層區域，並著重於內部流場與污染粒子排除的分析；期望以不變動內部元件配置，且節省經濟成本的方式作為設計之基礎，利用有限體積法的軟體FLUENT來分析計算其結果。採用暫態之動態網格方式，分析物體運動狀態之流場分佈，以模擬真實狀況中，移動物體對內部氣流所造成之重大影響。本文利用原始設計分析出內部流場之均勻度與粒子滯留情形，針對氣流夾層區域裝設擋板及配置整流板之兩種方案，與原始設計相比較其差異性，並分析改善後所得之結果；最後以分析之最佳氣流夾層設計為基礎，做一系列參數化分析及探討，針對不同之塵埃粒徑、入口風速及自動運載裝置之速度做模擬分析，以了解參數變化對於整體流場之影響，並藉由其流場變化，得到最佳之操作參數，使得整體設計更加完善。由模擬的結果可得知，為了使整體潔淨度提高及污染微粒迅速排除，氣流夾層區域必須控制得當，以避免內部迴流的發生，才得以達到最佳效能，而所得之結論亦可提供關於垂直層流式面板儲存櫃之建造及改良作為參考，以達到提升產品良率之成效。

To meet the increasing demand on quality improvement and cost reduction of LCD panel technology, the outlet flow distribution of utility air plenum for the stock region inside a clean room becomes the research topic in this study. By setting the operation cost as the major design concern, the major emphases are focused on the discussions of the flow pattern and the distribution of polluted particles inside the stocker region for various designs of the utility air plenum. At first, unsteady flowfield simulations for the AGV (automatic guided vehicle) moving inside the stocker region are accomplished under various operating conditions with the aids of FLUENT CFD code and dynamic mesh technique. Later, the uniform ratio and the mote deposition inside the flow field for the initial design are examined carefully based on the numerical results. Several unfavorable phenomenons, such as non-uniform distribution, circulation, and reversed flow, are found inside the utility air plenum.
Afterwards, two alternatives, blockage plate and flow straightener, are proposed to be installed at several locations inside the utility air plenum for a better mote deposition. CFD outcome shows that the air plenum design with straighteners and the flap plate at each corner can improve the overall flow patterns. It was observed that this improved design can dispose all the particles after 18 seconds while some particles are still trapped inside the original design. This improvement can upgrade the cleanness rate, shorten the disposed time of particles, and also reduce the operation cost.
Thereafter, a comprehensive parametric study is carried out to realize their influences on the flow patterns and mote deposition for this improved design. The parameters considered includes diameter of particle, inlet air velocity, and AGV velocity. Extensive discussions on these results are summarized to serve as the guideline for attaining the appropriate parameter settings for a better cleanroom design. In conclusion, the air’s clean ratio can be improved and the polluted motes can be excluded efficiently when the flow streams at the exit of the utility air plenum and inside the clean room are uniformly distributed.

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