本研究在玻璃基板上進行表面改質，用以增強光學與光催化性能，特別針對紫外光 之吸收率改善。在玻璃基板的表面改質過程中，依序研究濺鍍之鋁與鋅金屬，以確認不 同製程對於薄膜之影響。利用射頻濺鍍機在透光玻璃基板上沉積鋁薄膜;並透過電化學 加工，製造具備奈米孔洞陣列結構之陽極氧化鋁薄膜(AAO)，之後再使用不同之濺鍍參 數在玻璃與陽極氧化鋁薄膜複合基板上濺鍍鋅薄膜，以沈積出分佈均勻且平整的鋅薄膜。 為了使濺鍍後之鋅薄膜擁有光學與光催化性能，進一步氧化鍍後之鋅薄膜形成氧化鋅薄 膜，由於奈米孔洞陣列結構之陽極氧化鋁薄膜使得沈積在基板上之氧化鋅薄膜會依照奈 米孔洞陣列結構沉積，使得氧化鋅薄膜能夠擁有更多表面積誘發更佳之光學與光催化特 性。分析過程中，使用 SEM 和 X 光繞射儀確認製備樣品的形態和結構，並使用紫外-可 見光譜量測儀鑑定表面改質後之複合玻璃的透光率。結果顯示，在表面改質後之玻璃基 板，紫外光之吸收度由 20 上升至 90%。而從結果得知紫外光之吸收度與光觸媒效應之 效能分別與濺鍍金屬之濺鍍量與濺鍍表面積有關，氧化鋅金屬之量越多，紫外光的吸收 能力越高;而擁有越多表面積，光觸媒效應之效能也隨之提升，故在表面改性後之玻璃 基板具備紫外光吸收和光催化特性並保有優異的可見光透射率，其具備在許多實際應用 中使用的潛力。

In this study, the surface modification of glass substrate was carried out to enhance the optical and photocatalytic properties especially for the light transmittance. The modification of glass substrates was investigated with sequence of process to determine its behavior towards the Al and Zn films. The Al was sputtered over the glass substrate using radio frequency sputtering instrument and treated in electrochemical bath to form a uniform well-ordered aluminum anodic oxide structure with optimized conditions. Besides, the thin Zn film was sputtered over the glass/AAO substrate using different operating conditions to provide uniform well distributed layer. The resulted Zn was further oxidized in accordance to ZnO formation and their optical transmittance behavior. The sputtering condition allows the Zn to diffuse deeper and dispersal along the AAO structure which was major concern in the ZnO film formation. In the modification of ZnO/AAO/glass substrate, the working parameters were optimized to acquire tunable structures related to optical properties. The morphology and structural formation of the as-prepared sample were confirmed using SEM and X-ray diffraction. The optical transmittance attributed to the modified AAO and ZnO/AAO films were identified by UV spectra. The results showed that after the surface modification of the glass substrate, the absorption of ultraviolet light increased from 20 to 90%. The absorption of ultraviolet light and the photocatalyst effect were related to the amount of metal sputtered and the surface area of the substrate after sputtering. The greater the amount of zinc oxide attributed higher the absorption capacity of ultraviolet light. While increasing the surface area would improve the efficiency of the photocatalyst effect. Therefore, a surface-modified glass with ZnO/AAO revealed the excellent visible light transmittance in relation to ultraviolet light absorption and photocatalyst effects which has the potential to be used in wide array of practical applications.

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