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研究生： 莊英泰
Ying-Tai Chuang
論文名稱： 金屬玻璃鍍層應用於刺青針之人體實驗及修整裝置之研究
Beneficial Effects of Metallic Glass Coating on Tattoo Needles and Conditioning Device
指導教授： 朱瑾
Jinn Chu
口試委員: 朱瑾
Jinn Chu
陳炤彰
Chao-Chang A. Chen
朱閔聖
Min-Sheng Chu
曾元生
Yuan-Sheng Tseng
學位類別： 碩士
Master
系所名稱： 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年： 2022
畢業學年度： 110
語文別： 英文
論文頁數： 173
中文關鍵詞： 刺青針 、修整裝置 、金屬玻璃鍍層
外文關鍵詞： Tattoo needles, conditioning devices, TFMG
相關次數： 點閱：163  下載：0 
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    • Chapter 1. Introduction 1 1.1 Overview of thin film metallic glass 1 1.2 Objective and motivation 1 Chapter 2. Literature Review 3 2.1 Introduction of tattoo 3 2.1.1 Composition of tattoo inks and their properties 4 2.1.2 Four stages of healing process after tattooing 5 2.1.3 Classification of each tattoo needles in coding system 6 2.2 Principle of Chemical Mechanical planarization 7 2.2.1 Introduction of conditioning device 8 2.2.2 Specification of conditioning device 8 2.2.3 Effect of pad groove geometry on material removal characteristics in CMP process 11 2.3 Thin film metallic glass 13 2.3.1 Low coefficient of friction (CoF) 15 2.3.2 Biocompatibility and Antibacterial application 17 2.3.3 Application of TFMG on tattoo needles 20 2.3.4 Application of TFMG on dicing blade to improve dicing properties 25 2.4 High power impulse magnetron sputtering (HiPIMS) 26 Chapter 3. Experimental Procedures 28 3.1 Sample preparations 29 3.1.1 Tattoo needle preparations (Part 1-Tattoo needles) 29 3.1.2 Conditioning device preparations (Part 2-Conditioning devices) 30 3.2 Thin film metallic glass deposition 31 3.3 Material characterizations of TFMG 33 3.3.1 Crystallographic analysis (XRD) 33 3.3.2 Microstructure analysis (SEM) 34 3.3.3 Chemical composition analysis (EPMA) 35 3.3.4 Hydrophobicity analysis (Contact angle meter) 35 3.4 Insertion Test (MTS) (Part 1-Tattoo needles) 36 3.4.1 Test material: Pork skin 37 3.4.2 Surface morphology observation on pork skin (Confocal microscopy) 37 3.4.3 Tattoo ink coloring analysis (Image J) 38 3.5 Human test (Part 1-Tattoo needles) 38 3.5.1 Characterizations of tattoo needles and rotary tattoo machine 39 3.5.2 Subject recruitment 40 3.5.3 Wound healing observation and condition of tattoo ink coloring 40 3.6 CMP experiment (Polishing machine and swing-arm system) (Part 2-Conditioning devices) 41 3.6.1 Experimental consumables 45 3.6.1.1 Specification of oxide wafer 45 3.6.1.2 Specification of polishing pad with non-groove and x-y type groove 46 3.6.1.3 Specification of slurry 48 3.6.2 Surface roughness measurement of oxide wafers (CCI) 48 3.6.3 Material removal rate analysis (Ellipsometer) 49 Chapter 4. Results and discussion 51 4.1 Characterizations of TFMG 51 4.1.1 Crystallographic analysis 51 4.1.2 Chemical composition analysis (EPMA) 52 4.1.3 Hydrophobicity analysis (Water and tattoo ink contact angle) 52 4.2 Insertion/retraction performance of tattoo needle (Part 1-Tattoo needles) 56 4.2.1 Insertion test results – Needle type: 1005RL 56 4.2.1.1 Rubber insertion 58 4.2.1.2 Tattoo ink coloring effect 59 4.2.2 Insertion test results – Needle type: 1205M1 62 4.2.2.1 Rubber insertion 62 4.2.2.2 Tattoo ink coloring effect 63 4.3 Human Test (Part 1-tattoo needles) 66 4.3.1 Wound healing observation and condition of tattoo ink coloring 66 4.3.2 SEM observation of the needles 74 4.4 Chemical mechanical planarization experiment (Part 2-Conditioning device) 81 4.4.1 Effects of TFMG coatings on polishing pad roughness and bearing area ratio 82 4.4.1.1 The type of polishing pad: IC1000 polyurethane pad with non-groove 82 4.4.1.2 The type of polishing pad: IC1000 polyurethane pad with x-y type groove 92 4.4.2 Effects of TFMG coatings on wafer roughness 101 4.4.2.1 The type of polishing pad: IC1000 polyurethane pad with non-groove 101 4.4.2.2 The type of polishing pad: IC1000 polyurethane pad with x-y type groove 114 4.4.3 Effects of TFMG coatings on material removal rate 123 4.4.3.1 The type of polishing pad: IC1000 polyurethane pad with non-groove 123 4.4.3.2 The type of polishing pad: IC1000 polyurethane pad with x-y type groove 129 4.4.4 Effects of TFMG coatings on pad cutting rate 135 4.4.5 Surface composition analysis on oxide wafers 137 4.4.6 Composition analysis of TFMG coating on conditioning device 147 4.5 Discussion 148 4.5.1 Tattoo needle 148 4.5.2 Conditioning device 148 Chapter 5. Conclusions and suggestions for future works 150 5.1 Conclusions 150 5.2 Future works 151 5.2.1 Tattoo needles 151 5.2.2 Conditioning device 151 References 152

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