本論文主要是開發以動態光罩微影系統應用於3D列印 (3 Dimension Printing，3DP)技術，可製作出大面積立體微結構。
在本實驗中針對大面積立體微結構之製作其中包含了硬體、軟體及微結構分析，在硬體設備上，首先建構出一個完整具有3D成型能力之微影設備，硬體部份包含可控制的三維驅動機構、微影系統之光源和電腦控制單元等。在軟體控制上則是建立一個人機介面平台，相容於其他硬體的驅動程式，即可建立控制系統之軟體和硬體整合，完成設備製作。最後，根據成型之立體微結構，用以分析光學投影及影像成像之焦點、解析度等之研究。本實驗使用藍光光感應硬化樹脂做為立體微結構之實驗材料，以藍光動態光罩之切層圖案藉由藍光微影系統投影使樹脂材料層疊硬化，驗證其成型之曝光時間、線寬和厚度等參數，能符合線寬尺寸5μm精度。
本實驗所研發之3D微影曝光系統，可輕易的變更光源模組，並有效且準確的大面積位移控制，若經適當的機構變更後，更能增加其實用性和應用，期望將來能運用在更多的領域中。

This research is mainly to develop a Three Dimension Printing (3DP) technology that apply the Dynamic Mask Lithography System to fabricate a stereo micro-structure with large area, including hardware, software and the analyze of micro-structure. Based on the target of this research, we will build up an integrated 3D printing lithography system, for hardware development, including a controllable three dimension stage, a light source of lithography system and computer system. For software development, to edit an user interface with compatible of variety of drivers. To analyze the photo imagine such as focus and resolution of this research. The light-curing resin is used for the experiment; the layered patterns project via blue light lithography system and induced a cured resin layer by layer. Verify the process parameters: exposure time, line-width and thickness of the micro-structure, check and measure the dimensions of the micro-structure with the precise of 5μm requirement. The advantage of the lithography system is that easily to modify the light source and high accuracy positioning control, after a lite hardware re-design, function will be expanded and became a multifunction system.

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