研究生: |
林士捷 Shih Chieh, Lin |
---|---|
論文名稱: |
掃描穿透式電子顯微學於高熵氧化物薄膜 (Cr, Mn, Fe, Co, Ni)3O4之研究 Study of High-Entropy-Oxide (Cr, Mn, Fe, Co, Ni)3O4 Grown on MgO and MgAl2O4 by Scanning Transmission Electron Microscopy |
指導教授: |
郭俞麟
Yu-Lin Kuo 朱明文 Ming-Wen Chu |
口試委員: |
郭俞麟
Yu-Lin Kuo 朱明文 Ming-Wen Chu 王丞浩 Chen-Hao Wang |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 機械工程系 Department of Mechanical Engineering |
論文出版年: | 2023 |
畢業學年度: | 111 |
語文別: | 中文 |
論文頁數: | 47 |
中文關鍵詞: | 穿透式電子顯微鏡 、掃描穿透式電子顯微鏡 、薄膜 、高熵氧化物 、尖晶石結構 、氧化物異質介面 、氧化鎂 、鎂鋁尖晶石 、聚焦離子束 、電子損失能譜儀 、四面體 、八面體 、交互擴散 、電子結構 |
外文關鍵詞: | transmission electron microscopy, scanning transmission electron microscopy, thin film, high-entropy oxides, spinel structure, oxide heterostructure interface, magnesium oxide, magnesium aluminate spinel, focused ion beam, electron-energy loss spectroscopy, tetrahedral, octahedral, inter-diffusion, electronic structures |
相關次數: | 點閱:467 下載:0 |
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本研究使用穿透式電子顯微鏡與掃描穿透式電子顯微鏡技術,分析薄膜高熵氧化物異質介面系統分析。
一種基於尖晶石結構的高熵氧化物,成長在兩種不同的氧化物基板上,並使用聚焦離子束製備試片。在高解析穿透式電子顯微鏡中,我們驗證high-entropy oxide (HEO) /MgO與high-entropy oxide (HEO) /MgAl2O4的介面型態皆為不連貫介面。
我們發現經由FIB所製備的樣品,即便存在些許的汙染物與厚度梯度的問題,還是可以進行掃描穿透式電子顯微鏡與電子損失能譜儀結合Smart Align軟體的原子能譜分析,並在此研究中達到原子級解析,使我們以直觀的方式理解此材料的晶體結構、化學組成分佈、四面體與八面體格隙分佈、介面交互擴散以及半定量電子結構。
In this study, we utilized transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) techniques to characterize thin film high-entropy oxides (HEO) heterostructure interfaces. The high-entropy oxides based on a spinel structure was grown on two different oxide substrates and we used a focused ion beam (FIB) prepared sample. In high-resolution TEM, we confirmed that the interfacial coherence of HEO/MgO and HEO/MgAl2O4 was an incoherent interface. We found that even with some contaminations and thickness gradients, FIB-prepared samples can be characterized using scanning transmission electron microscopy and electron-energy loss spectroscopy combined with the Smart Align software, achieving an atomic resolution in this study. This allowed us to understand the crystal structures, chemical composition distributions, tetrahedral and octahedral site distributions, interface inter-diffusion, and semi-quantitative electronic structures of the material in an intuitive way.
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