簡易檢索 / 詳目顯示

研究生: 吳紘有
Hung-you Wu
論文名稱: 三五族半導體發光二極體光電特性與接面溫度之研究
The Study of Optoelectrical Properties and Junction Temperature in Ⅲ-Ⅴ Compound Semiconductor Light-Emitting Diodes
指導教授: 郭明哲
Ming-Tse Kuo
口試委員: 黃忠偉
Jong-Woei Whang
吳亞芬
Ya-Fen Wu
學位類別: 碩士
Master
系所名稱: 電資學院 - 電機工程系
Department of Electrical Engineering
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 83
中文關鍵詞: 多重量子井多重量子能障電激發光外部量子效率熱效應
外文關鍵詞: Multi-quantum wells, Multi-quantum barriers, Electroluminescence, External quantum efficiency, Heating effect
相關次數: 點閱:281下載:2
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報

我們在氮化銦鎵/氮化鎵(InGaN/GaN)多重量子井(MQW)發光二極體的能障層當中,加入氮化銦鎵/氮化鎵(InGaN/GaN)多重量子能障(MQBs)異質結構,並藉由變溫與變電流電激發光光譜的量測,來研究此發光二極體的特性。在多重量子井的能障層中加入多重量子能障結構,可提高有效的能障高度,減少載子溢出的現象,使載子侷限在作用層內的數量增加。此外,我們也建立數學模型來研究溫度和注入電流對氮化銦鎵/氮化鎵(InGaN/GaN)多重量子井發光二極體的熱效應,包括熱躍遷、捕獲、輻射和非輻射複合等載子遷移機制,在此模型中都有考慮到。電激發光光譜隨溫度變化的趨勢可以用此模型計算出來,模擬結果與實驗數據的趨勢吻合。由實驗與理論分析的結果可以知道,具有多重量子能障的樣品,不僅發光強度較強,外部量子效率對溫度變化的敏感性較低,且接面溫度較低,隨注入電流增加其接面溫度上升的幅度也較小,證實的確改善了發光二極體之光電特性。


We introduce the InGaN/GaN multi-quantum barriers (MQBs) into InGaN/GaN multi-quantum well (MQW) heterostructures to improve the performance of light-emitting diodes. The temperature and injection current dependent electroluminescence were carried out to study the characteristics of InGaN/GaN MQWs. We observe the enhancement of carrier confinement in the active layer and the inhibited carrier leakage overthe barrier for the sample with MQBs. In addition, a steady-state thermal model is presented to investigate the thermal effect of InGaN/GaN multi-quantum well light-emitting devices. The important mechanisms for the carrier dynamics, including thermal emission, capturing, radiative and nonradiative recombination, are taken into account in this model. The temperature-dependent emission energies of the EL spectra are calculated with this model. The simulation results are in fair agreement with the experimental data. Based on the theoretical and experimental results, it is found that the radiative efficiency of the sample possessing MQBs exhibits less sensitive temperature dependence and leads to an improved efficiency in the high temperature and high injection current range.

摘要 I Abstract II 致謝 III 目錄 IV 圖目錄 VI 表目錄 IX 第一章 緒論 1 1.1前言 1 1.2 研究動機 2 1.3 文獻回顧 4 1.4 研究方法 7 1.5 本文大綱 8 第二章 原理 9 2.1 發光二極體的發光原理 9 2.1.1 氮化鎵發光二極體原理 11 2.1.2 電子溢流現象 13 2.1.3 直接能隙與間接能隙 14 2.2 LED晶片結構 15 2.3 LED發光效率 19 2.4 LED光萃取結構 22 2.5 光學特性基礎理論 25 2.5.1 光通量 26 2.5.2 色溫 27 2.5.3 演色性 28 2.6 氮化鎵材料特性 28 2.6.1 應力的產生 28 2.6.2 壓電效應 30 2.6.3 量子侷限史塔克效應與壓電場屏蔽效應 31 第三章 實驗 34 3.1 電激發光 34 3.1.1 簡介 34 3.1.2 電激發光原理 34 3.1.3 電激發光架構 36 3.2 樣品結構 44 第四章 實驗結果與討論 46 4.1 基本電激發光光譜量測 46 4.2 定電流變溫電激發光光譜量測 50 4.3 變電流變溫電激發光光譜量測 53 4.4 外部量子效率 59 4.5 接面溫度之數學模型 61 第五章 總結 69 5.1 結論 69 5.2 未來展望 70 參考文獻 71 作者簡介 80

【1】U. Zehnder, A Weimar, U. Strauss, M. Fehrer, B. Hahn, H. J. Lugauer, and V. Harle, “Industrial Production of GaN and InGaN Light Emitting Diodes on SiC Substrates” , Journal of Crystal Growth, Volume 230, No. 3-4, pp. 497-502 (2001).
【2】T. Egawa, T. Jimbo, and M. Umeno, “Characteristics of InGaN/AlGaN Light Emitting Diodes on Sapphire Substrates” , Journal of Applied Physics, Volume 82, NO. 11, pp. 5816-5821 (1997).
【3】S. Strite and H. Morkoc, “GaN, AlN and InN: a review” , Journal of Vacuum Science and Tachnology, Volume B-10, No. 4, pp. 1237 (1992).
【4】C. N. Han, T. L. Chou, C. F. Huang, and K. N. Chiang, “Sapphire-removed Induced the Deformation of High Power InGaN Light Emitting Diodes” , EuroSimE2008, Freiburg im Breisgau, Germany (2008).
【5】E. M. S. Jnr, F. L. M. Antunes and A. J. Perin, “Junction Temperature Estimation for High Power Light-Emitting Diodes” , International Symposium on Industrial Electronics, Vigo, Spain (2007).
【6】M. Sizong, L. Junhui, D. Ji-an and D. Guiling, “Bump Thermal Management Analysis of LED with Flipchip Package” , International Conference on Electronic Packaging Technology, Shanghai, China (2006).
【7】M. Arik, C. Becker, S. Weaver and J. Petroski, “Thermal Management of LED: Package to System” , Third International Conference on Solid State Lighting, San Diego, CA, USA (2003).
【8】S. Buso, G. Spiazzi, M. Meneghini and G. Meneghesso, “Performance Degradation of High Brightness Light Emitting Diodes under DC and Pulsed Bias” , IEEE Transactions on Device and Materials Reliability, Volume 8, No. 2, pp. 312-322 (2008).
【9】N. Holonyak, “John Bardeen and the Point-Contact Transistor” , Physics Today, Volume 45, No. 4, pp. 36-43 (1992).
【10】R. Mueller-Mach, G. O. Mueller, M. R. Krames and T. Trottier, “High-Power Phosphor-Converted Light-Emitting Diodes Based on Ⅲ-Nitrides” , IEEE Journal of Selected Topics in Quantum Electronics, Volume 8, No. 2, pp. 339-345 (2002).
【11】M. Meneghini, L. Trevisanello, C. Sanna, G. Mura, M. Vanzi, G. Meneghesso and E. Zanoni, “High Temperature Electro-Optical Degration of InGaN/GaN HBLED” , Microelectronics Reliability, Volume 47, No. 9-11, pp. 1625-1629 (2007).
【12】Y. C. Hsu, C. C. Tsai, M. H. Chen, Y. T. Lo, C. W. Lee and W. H. Cheng, “Decay Mechanisms of Lumen and Chromaticity for High-Power Phosphor-Based White-Light-Emitting Diodes in Thermal Aging” , Light-Emitting Diodes: Research, Manufacturing, and Applications XII, San Jose, CA, United States (2008).
【13】B. Fan, H. Wu, Y. Zhao, Y. Xian and G. Wang, “Study of Phosphor Thermal-Isolated Packaging Technologies for High-Power White Light-Emitting Diodes” , IEEE Photonics Technology Letters, Volume 19, No. 15, pp. 1121-1123 (2007).
【14】M. Meneghini, L. R. Trevisanello, G. Meneghesso and E. Zanoni, “A Review on the Reliability of GaN-Based LED” , IEEE Transaction on Device and Materials Reliability, Volume 8, No. 2 (2008).
【15】N. Narendran, Y. Gu, J. P. Freyssinier, H. Yu, and L. Deng, “Solid-state Lighting: Failure Analysis of White LED” , Journal of Crystal Growth, Volume 268, No. 3-4, pp. 449-456 (2004).
【16】S. Todoroki, M. Sawai and K. Aiki, “Temperature Distribution along The Striped Active Region in High Power GaAlAs Visible Lasers” , Journal of Applied Physics, Volume 58, No. 3, pp. 1124-1128 (1985).
【17】H. I. Abdelkader, H. H. Hausien and J. D. Martin, “Temperature Rise and Thermal Rise-Time Measurements of a Semiconductor” , Review of Scientific Instruments, Volume 63, No. 3, pp. 2004-2007 (1992).
【18】S. Murata and H. Nakada, “Adding a Heat Bypass Improves the Thermal Characteristics of a 50μm Spaced 8-Beam Laser Diode Array” , Journal of Applied Physics, Volume 72, No. 6, pp. 2514-2516 (1992).
【19】D. C. Hall, L. Goldberg and D. Mehuys, “Technique for Lateral Temperature Profiling in Optoelectronic Devices Using a Photoluminescence Microprobe” , Applied Physics Letters, Volume 61, No. 4, pp. 384-386 (1992).
【20】P. W. Epperlein and G. L. Bona, “Influence of the Vertical Structure on the Mirror Facet Temperature of Visible GaInP Quantum Well Lasers” , Applied Physics Letters, Volume 62, No. 24, pp. 3074-3076 (1993).
【21】Y. Xi and E. F. Schubert, “Junction –Temperature Measurement in GaN Ultraviolet Light-Emitting Diodes Using Diode Forward-Voltage Method” , Applied Physics Letters, Volume 85, No. 12, pp. 2163-2165 (2004).
【22】Z. Ma, X. Zheng, W. Liu, X. Lin and W. Deng, “Fast Thermal Resistance Measurement of High Brightness LED” , 6th International Conference on Electronics Packaging Technology, Shenzhen, China (2005).
【23】S. L. Kuo, C. K. Liu, M. J. Dai, C. K. Yu, H. C. Chien, and C. Y. Hsu, “Characteristic of Thermal Resistance for High Power LED” , 10th Electronics Packaging Technology Conference, Singapore (2008).
【24】賴彥霖,「氮化銦鎵(類量子點)/氮化鎵多重量子井之微結構與光學性質之研究」,博士論文,國立成功大學材料科學及工程學系,台南 (2006)。
【25】T. Matsuoka, H. Okamoto, M. Nakao, H. Harima, E. Kurimoto, “Optical bandgap energy of wurtzite InN” , Applied Physics Letters, Volume 81, No. 3, pp. 1246-1248 (2002).
【26】K. Domen, R. Soejima, A. Kuramata, and T. Tanahashi, “Electron Overflow to the AlGaN p-Cladding Layer in InGaN/GaN/AlGaN MQW Laser Diodes” , MRS Internet Journal Nitride Semiconductor Research, Volume 3, article 2 (1998).
【27】H. Amano, M. Kito, K. Hiramata, and I. Akasaki, “P-Type Conduction in Mg-Doped GaN Treated with Low-Energy Electron Beam Irradiation (LEEBI)” , Japanese Journal of Applied Physics, Volume 28, pp. L2112-L2114 (1989).
【28】S. Nakamura, T. Mukai, M. Senoh and N. Iwasa, “Thermal Annealing Effects on P-Type Mg-Doped GaN Films” , Japanese Journal of Applied Physics, Volume 31, pp. L139-L142 (1992).
【29】P. Kozodoy, Y. P. Smorchkova, M. Hansen, H. Xing, S. P. DenBaars, U. K.Mishra, A. W. Sazler, R. Perrin, and W. C. Mitchel, “Polarization-enhanced Mg doping of AlGaN/GaN superlattices,” , Applied Physics Letters, Volume 75, No. 16, pp. 2444-2446 (1999).
【30】I. D. Goepfert, E. F. Schubert, A. Osinsky, P. E. Norries, and N. N. Faleev, “Experimental and theoretical study of acceptor activation and transport,” , Journal of Applied Physics, Volume 88, No. 4, pp. 2030-2038 (2000).
【31】K. Kumakura and N. Kobayashi, “Increased electrical activity of Mg-Acceptors in AlxGa1-xN/GaN superlattices,” , Japanese Journal of Applied Physics, Volume 38, pp. L1012-1014 (1999).
【32】K. Kumakura, T. Makimoto, and N. Kobayashi, “Efficient hole generation above 1019 cm-3 in Mg-Doped InGaN/GaN superlattices at room temperature,” , Japanese Journal of Applied Physics, Volume 39, pp. L195-196 (2000).
【33】T. Nishida, H. Saito, and N. Kobayashi, “Submilliwatt operation of AlGaN-based ultraviolet light-emitting diode using short-period alloy superlattice,” , Applied Physics Letters, Volume 78, No. 4, pp. 399-400 (2001).
【34】M. R. Krames, M. Ochiai-Holcomb, G. E. Hofler, C. Carter-Coman, E. I. Chen, I.-H. Tan, P. Grillot, N. F. Gardner, H. C. Chui, J-W. Huang, S.A. Stockman, F. A. Kish, and M. G. Craford, “High-power truncated- pyramid (AlxGa1-x)0.5 In0.5P/GaP light-emitting diodes exhibiting >50% external quantum efficiency,” , Applied Physics Letters, Volume 75, No. 16, pp. 2365-2367 (1999).
【35】D. B. Thompson, A. Murai, M. Iza, S. Brinkley, S. P. DenBaars, U. K. Mishra, and S. Nakamura,” Hexagonal truncated pyramidal light emitting diodes through wafer bonding of ZnO to GaN, laser lift-off, and photo chemical etching,” , Japanese Journal of Applied Physics, Volume 47, pp. 3447-3449 (2008).
【36】I. Schnitzer, E. Yablonovitch, C. Carneau, T. J. Gmitter, and A. Scherer, “30% external quantum efficiency from surface textured, thin-film light emitting diodes,” , Applied Physics Letters, Volume 63, No. 16, pp. 2174-2176 (1993).
【37】T. Fujii, Y. Gao, R. Sharma, E. L. Hu, S. P. DenBaars, and S. Nakamura, “Increase in the extraction of GaN-based light-emitting diodes via surface roughening,” , Applied Physics Letters, Volume 84, No. 6, pp. 855-857 (2004).
【38】S. C. Hsu, C. Y. Lee, J. M. Hwang, J. Y. Su, D. S. Wuu, and R. H. Horng, “Enhanced light output in roughened GaN-based light-emitting diodes using electrodeless photoelectrochemical etching,” IEEE Photonics Technology Letters, Volume 18, No. 23, pp. 2472-2474 (2006).
【39】M. Yamada, T. Mitani, Y. Narukawa, S. Shioji, I. Niki, S. Sonobe, K. Deguchi, M. Sano, and T. Mukai, “InGaN-based near-ultraviolet and blue-light-emitting diodes with high external quantum efficiency using a patterned sapphire substrate and a mesh electrode,” , Japanese Journal of Applied Physics, Volume 41, pp. L1431-L1433 (2002).
【40】Y. Narukawa, J. Narita, T. Sakamoto, K. Deguchi, T. Yamada, and T. Mukai, “Ultra-high efficiency white light-emitting diodes,” , Japanese Journal of Applied Physics, Volume 45, pp. L1084-L1086 (2006).
【41】D. S. Han, J. Y. Kim, S. I. Na, S. H. Kim, K. D. Lee, B. Kim, and S. J. Park, “Improvement of light extraction efficiency of flip-chip light-emitting diode by texturing the bottom side surface of sapphire substrate,” IEEE Photonics Technology Letters, Volume 18, No. 13, pp. 1406-1408 (2006).
【42】M. Boroditsky, T. F. Krauss, R. Coccioli, R. Vrijen, R. Bhat, and E.Yablonovitch, “Light extraction from optically pumped light-emitting diode by thin slab photonic crystals,” , Applied Physics Letters, Volume 75, No. 8, pp. 1036-1038 (1999).
【43】E. F. Schubert, Light Emitting Diodes, 2nd (2006).
【44】M. Planck, “The Theory of Heat Radiation” , Dover Publications, New York (1959).
【45】D. A. Steiqerwald, J. C. Bhat, D. Collins, R. M. Fletcher, M. O. Holcomb, M. J. Ludowise, P. S. Martin and S. L. Rudaz, “Illumination with Solid State Lighting Technology” , IEEE Journal of Selected Topics in Quantum Electronics, Volume 8, No. 2, pp. 310-320 (2002).
【46】C. Cooper, D. I. Westwood, and P. Blood, “ Laser diodes in piezoelectric quantum-well structures” , Applied Physics Letters, Volume 69, No. 16, pp. 2415-2417 (1996).
【47】X. Zhang, S.-J. Chua, S. Xu, K.-B. Chong, and K. Onabe, “Optical property of a novel (111)-oriented quantum structure” , Applied Physics Letters, Volume 71, No. 13, pp. 1840-1842 (1997).
【48】G. Martin, A. Botchkarev, A. Rockett, and H. Morkoc, “Valence-band discontinuities of wurtzite GaN, AlN, and InN heterojunctions measured by x-ray photoemission spectroscopy” , Applied Physics Letters, Volume 68, No. 18, pp. 2541-2543 (1996).
【49】T. Takeuchi, S. Sota, M. Katsuragawa, M. Komori, H. Takeuchi, H. Amano, and I. Akasaki, “Quantum-Confined Stark Effect due to Piezoelectric Fields in GaInN Strained Quantum Wells” , Japanese Journal of Applied Physics, Volume 36, pp. L382-L385 (1997).
【50】C. M. Lueng, H. L. W. Chan, C. Surya, and C. L. Choy, “Piezoelectric coefficient of aluminum nitride and gallium nitride” , Journal of Applied Physics, Volume 88, No. 9, pp. 5360-5363 (2000).
【51】P.Riblet, H. Hirayama, A. Kinoshita, A. Hirata, T. Sugano, and Y. Aoyagi, “Determination of photoluminescence mechanism in InGaN quantum wells” , Applied Physics Letters, Volume 75, No. 15, pp. 2241-2243 (1999).
【52】T. Takagi, F. Koyama, and K. Iga, “Electron‐wave reflection by multi‐quantum barrier in n‐GaAs/i‐AlGaAs/n‐GaAs tunneling diode” , Applied Physics Letters, Volume 59, No. 22, pp. 2877-2879 (1991).
【53】J. I. Chyi, S. K. Wang, J. H. Gau, J. L. Shieh, and J. W. Pan, “Characteristics of multistack multiquantum barrier and its application to graded-index separate confinement heterostructure lasers ” , IEEE Journal of Quantum Electronics, Volume 32, No. 3, pp. 442-447 (1996).
【54】N. Yoshimoto, T. Matsuoka, T. Sasaki, and A. Katsui, “Photoluminescence of InGaN films grown at high temperature by metalorganic vapor phase epitaxy ” , Applied Physics Letters, Volume 59, No. 18, pp. 2251-2253 (1991).
【55】R. Tsu and L. Esaki, “Tunneling in a finite superlattice” , Applied Physics Letters, Volume 22, No. 11, pp. 562-564 (1973).
【56】A. Hori, D. Tasunaga, A. Satake, and K. Fujiwara, “Temperature and injection current dependence of electroluminescence intensity in green and blue InGaN single-quantum-well light-emitting diodes” , Journal of Applied Physics, Volume 93, No. 6, pp. 3152-3157 (2003).
【57】Y. Yamane, K. Fujiwara, and J. K. Sheu “Largely variable electroluminescence efficiency with current and temperature in a blue (In, Ga)N multiple-quantum-well diode” , Applied Physics Letters, Volume 91, No. 7, pp. 037501-037503 (2007).
【58】S. Dhar, U. Jahn, O. Brandt, P. Waltereit, and K. H. Ploog, “Influence of exciton localization on the quantum efficiency of InGaN/GaN multiple quantum wells grown by molecular-beam epitaxy” , Applied Physics Letters, Volume 81, No. 4, pp. 673-675 (2002).
【59】N. Otsuji, K. Fujiwara, and J. K. Sheu, “Electroluminescence efficiency of blue InGaN/GaN quantum-well diodes with and without an n-InGaN electron reservoir layer” , Journal of Applied Physics, Volume 100, No. 11, pp. 113105-113111 (2006).
【60】K. Kazlauskas, G. Tamulaitis, A. Žukauskas, M. A. Khan, J. W. Yang, J. Zhang, G. Simin, M. S. Shur, and R. Gaska, “Double-scaled potential profile in a group-III nitride alloy revealed by Monte Carlo simulation of exciton hopping” , Applied Physics Letters, Volume 83, No 18, pp. 3722-2724 (2003).
【61】S. Sanguinetti, M. Henini, M. G. Alessi, M. Capizzi, P. Frigeri, and S. Franchi, “Carrier thermal escape and retrapping in self-assembled quantum dots” , Physical Review B, Volume 60, No 11, pp. 8276-8283 (1999).
【62】T. E. Nee, Y. F. Wu, C. C. Cheng, and H. T. Shen,
“Carrier dynamics study of the temperature-and excitation-dependent photoluminescence of InAs/GaAs quantum dots ” , Journal of applied physics, Volume 99, No 1, pp. 013506-013512 (2006).
【63】J. C. Lee, Y. F. Wu, Y. P. Wang, and T. E. Nee, “Temperature and current dependences of electroluminescence from InGaN/GaN multiple quantum wells” , Journal of Crystal Growth, Volume 310, No 23, pp. 5143-5146 (2008).
【64】E. C. L. Ru, J. Fack, and R. Murray, “Temperature and excitation density dependence of the photoluminescence from annealed InAs/GaAs quantum dots” , Physical Review B, Volume 67, No 24, pp. 245318- 245329 (2003).
【65】Q. Li, S. J. Xu, W. C. Cheng, M. H. Xie, S. Y. Tong, C. M. Che, and H. Yang, “Thermal redistribution of localized excitons and its effect on the luminescence band in InGaN ternary alloys” , Applied Physics Letters, Volume 79, No 12, pp. 1810-1812 (2001).
【66】Y. F. Wu, J. C. Lee, T. E. Nee, and J. C. Wang, “Carrier localization effect on luminescence spectra of III–V heterostructures” , Journal of Luminescence, Volume 131, No 7, pp. 1267-1271 (2011).
【67】P. G. Eliseev, P. Perlin, J. Lee, and M. Osiński, “" Blue" temperature-induced shift and band-tail emission in InGaN-based light sources” , Applied Physics Letters, Volume 71, No. 5, pp. 569-571 (1997).

無法下載圖示 全文公開日期 2017/07/30 (校內網路)
全文公開日期 本全文未授權公開 (校外網路)
全文公開日期 本全文未授權公開 (國家圖書館:臺灣博碩士論文系統)
QR CODE