本研究主要是探討在室溫下以反應磁控濺鍍系統，先以銀靶材濺鍍找出能形成 Ag 2 O 的最適氬氣/氧氣的流量比後，再利用該最佳濺鍍條件進行由化學合成得到的氧化銀/氧化鋅複合粉體所熱壓的自製靶材來製作氧化銀/氧化鋅複合薄膜，該自製陶瓷靶材選用三種組成配方， 分別是 15 wt%、30 wt%、45 wt% Ag 2 O/ZnO 三種複合靶材，進行濺鍍含有細小奈米氧化銀顆粒均勻散佈的複合薄膜，採用基板有不織布及玻璃兩種。
對這些不同條件處理之薄膜以 X 光繞射儀(XRD）分析薄膜的結構及結晶性；場發射掃描式電子顯微鏡（FESEM）觀察薄膜的表面形態；橢圓偏光儀(Ellipseometer)量測得到膜厚性質；原子力顯微鏡(AFM)進一步了解薄膜表面粗糙度；並以能量分散式光譜儀(EDS)半定量分析薄膜元素組成與銀、鋅、氧之含量變化。在光學性質量測方面，採用紫外光/可見光吸收光譜儀（UV-Vis spectrometer）量測薄膜樣品在不同光源下的吸收率。
實驗結果顯示，分別在氬:氧比例為 7:1、3:1 、1:1 以及純氧的電漿條件下，來濺鍍製作氧化銀薄膜。發現當通以氬:氧比 7:1 時，可得到一價銀之 Ag 2 O；氬:氧比 3:1 時，薄膜以 AgO 單相存在；當純氧與氬:氧比 1:1 時，薄膜以(Ag+Ag 2 O)兩相共存。以本實驗氬:氧比 7:1 條件製備的 Ag 2 O 薄膜其表面型態非常平整，Ag 2 O 晶粒很小，且均勻地沉積在基材上。Ag 2 O/ZnO 複合薄膜會隨著氧化銀的增加，使得表面呈現不規則狀，晶粒變得較大，當 Ag 2 O 重量比由 15 wt%上升至45 wt%時，其表面粗糙度會由 1.68 nm 上升至 10.1 nm，此是為了堆疊出更多的半導體 p(Ag 2 O)-n(ZnO)異質接面，讓電子電洞可以更有效地分離，增加與細菌產生電荷牽引的機會，提升複合薄膜的抗菌性，使其達到與氧化銀相仿的抗菌能力。
在抗菌測試上，我們以在初始菌量為 10 4 cfu/1ml 的情形下，進行金色葡萄球菌和大腸桿菌之抗菌能力試驗，得出 Ag 2 O 薄膜具有極佳的殺菌效果，即使在暗室下仍有強抗菌能力，而 45 wt% Ag 2 O/ZnO複合薄膜在兩項細菌的抗菌實驗上，不論是在亮室或暗室均有良好的成效，在第二小時幾乎都已 99.9%抑菌率，已十分接近氧化銀薄膜的抗菌能力，說明異質接面的形成可以彌補 Ag 2 O 的減少，且在薄膜附著性測試上也有不錯的表現，更是提升了其商業化的價值。

The research focused on using RF magnetron reactive sputtering to deposit Ag-based oxide and oxide composite thin films at room temperature for the bactericidal purpose. At first stage, Ag-based oxide films were prepared with a Ag target at different argon-to-oxygen ratios in order to find the right processing condition for forming the right Ag 2 O phase. At the second stage, three kinds of 15 wt%, 30 wt%, and 45% silver oxide/zinc oxide composite cermet targets were made by hot pressing the Ag 2 O nanoparticle-attached ZnO powders. The 15 wt%, 30 wt%, and 45 wt% silver oxide/zinc oxide targets were used to deposited the composite films at the optimal oxygen input, based upon the processing data from the Ag target-formed Ag 2 O film. Two kinds of substrates were used, the glass and the non-woven fabric.
All the oxide and oxide composite thin films were characterized for their the structure and crystallinity by X-ray diffraction, the morphology by field emission scanning electron microscopy, the thickness by Ellipseometer, the surface roughness by atomic force microscopy, the film compositions on Ag, Zn, and O by energy-dispersive spectrometer equipped on electron microscope and, and the film optical absorption property by the ultraviolet-visible spectrometer.
Ag-based oxide films were obtained from t, the pure Ag target under different Ar:O 2 ratios of 7:1, 3:1, 1:1, and 0:1. At the Ar:O 2 ratio of 7:1, the film showed the Ag 2 O single phase and had the smooth surface
morphology and fine grains. At the Ar:O 2 ratio of 3:1, the film show the AgO single phase. At the pure oxygen and the Ar:O 2 ratio of 1:1, the films both contained two phases of Ag and Ag 2 O. For Ag 2 O/ZnO composite films with different Ag 2 O weight ratios, the films became rougher with the roughness value of 1.68 nm at 15 wt% Ag 2 O increasing to 10.1 nm at 45 wt% Ag 2 O. As ZnO is a n-type semiconductor and Ag 2 O a p-type one, the composite films with increasing Ag 2 O content will form more the pn junctions in composite films. The generated pn junctions are for the purpose for effectively separately the photo-induced electron-hole pairs to prolong their lifetime in order to travel to the surface for redox reactions or even the bactericidal ability.
For the antibacterial tests, we selected Escherichia coli and Staphylococcus aureus as the testing strains when their initial bacteria concentration was 10 4 cfu/1ml. We found that the antibacterial performance of Ag 2 O thin film was quite effective to inhibit bacteria even without light ,and antibacterial performance of 45 wt% Ag 2 O/ZnO composite thin film was nearly as good as Ag 2 O thin film regardless of dark room or light room. After two hours, they both almost achieved up to 99.9% antibacterial effect . Therefore, we proved that forming p-n junction could make up for reduing the amount of Ag 2 O. Moreover, they also have stable adhesion on substrate which could increase their commercial value obviously.

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