本研究針對透明晶片在黏合後對於微流道尺度量測之需求，開發以機器視覺為核心之自動化光學量測系統。系統硬體主要包含五百萬畫素CMOS黑白工業相機、一倍遠心鏡頭、步進馬達、步進馬達驅動器、以及運動控制卡等；系統軟體則是使用NI LabVIEW 2018 SP1將整個自動量測流程進行整合。透過人機介面之設計，操作者只需要進行少數基本參數設定與簡易的按鍵操作，系統將會自動完成透明黏合晶片內全區域直線微流道尺度量測。本研究開發之系統可以達到量測步驟簡單、快速量測、高準確度、高重複性、以及環境限制少等目標。實驗中，樣本的微流道截面為矩形（寬度300 μm、深度300 μm），流道路徑為直線，總長為46 mm，扣除出入口後能夠量測的完整長度為44 mm。實驗結果顯示，本研究之系統可以在20秒內完成量測，得到等距之45個截面尺度，量測微流道寬度以及深度之重複性皆在2 μm以內。此外，實驗中使用工具顯微鏡量測微流道的寬度及深度並作為標準尺度，將標準尺度與系統量測數據進行比對後，顯示系統量測微流道寬度及深度的準確度皆在2%以內。

This study aims at the requirement of microchannel measurement of transparent chips after bonding, and develops an automated optical measurement system with machine vision as the core. The system hardware mainly includes a 5MP CMOS monochrome industrial cameras, 1X telecentric lens, stepper motor, stepper motor driver, motion controller device, etc. The system software uses NI LabVIEW 2018 SP1 to integrate the entire automatic measurement process. By designing the human machine interface, the operator can easily control the machine to automatically measure the dimension of the entire linear microchannel. The development of the system can achieve simple measurement steps, rapid measurement, high accuracy, high repeatability, and less environmental restriction. In the experiment, the cross-sectional shape of the microchannel chip sample is rectangular (width 300 μm, depth 300 μm), the flow path is a straight line, the total length is 46 mm, and the length which can be measured is 44 mm. The experimental results show that the system can complete the measurement within 20 seconds and obtain 45 microchannel cross-sectional dimensions. The repeatability of the system to measure the width and depth of the microchannel are within 2 μm. In addition, the tool microscope was used to measure the width and depth of the microchannel as the standard dimension. After comparison, the accuracy of the measured width and depth of the system are within 2%.

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