本研究以閉迴路控制系統結合射出成形製程應用於具離軸非球面反射式光學元件 (Off-Axial Aspherical Reflective Optical Element, OAAROE) 成形製程。透過整合射出機訊號、模具歷程資料、閉迴路微振動技術(Closed-Loop Micro Vibratile, CLMV)及變模溫系統(Varithermo Mold Temperature, VMT)結合射出成形方法。研究方式首先進行PI閉迴路控制PZT致動器，探討PI控制參數對於PZT響應狀況與上升時間(Raise time)，再結合先後兩組前饋控制器比較，使PZT致動器具有最快響應速度，上升時間為0.107秒。透過調整控制器參數及VMT參數探討對OAAROE之成形影響，並傳統射出成形、開迴路控制系統與閉迴路控制系統進行成形比較。以巨觀尺度探討離軸非球面之成形誤差；以微觀尺度探討微結構成形複製率。利用不同PI控制參數(Kc、Ti)探討微結構成形複製率影響，當模溫為100℃，Kc為4；Ti為0.001且Lead time為0.00245時，最高結構成形複製率為92.06%。同時運用VMT技術，有效改善因肉厚不均所形成翹曲變形缺陷，最大成形誤差由17.898μm降低至6.082μm。透過4組參數各200件試量產測試系統穩定性，證實系統保持極高均一性，代表成形系統穩定性。OAAROE以光學單頻譜檢測，多種單頻線譜皆有聚焦特徵，而雜散光檢測最小為5.84%。後續研究可由離軸非球面設計值與模仁及成品之殘餘誤差優化模仁設計，使OAAROE更有效提升。

This study aims to fabricate an off-axial aspherical reflective optical element(OAAROE) with micro-structure by closed-loop injection molding process. This process combines with the machine signal, molding data acquisition, closed-loop micro vibratile (CLMV) and varithermo mold temperature (VMT) methods. In this research, a Proportional-Integral (PI) controller has been combined with feedforward controller to control piezoelectrical actuator (PZT) in order to find the fastest response and the shortest raise time. Several control parameters to discuss the PZT response condition. The form error of OAAROE can be calculate in the macro scale, the groove filling ratio can be obtained in micro scale. From the experimental result, high mold temperature and controller parameter (Kc=4, Ti=0.001 and lead time=0.00245 min.) can achieve the micro groove filling ratio as 92.06%. The VMT method can reduce the form error from thickness difference of OAAROE part. From the pilot production test of 200 parts each by 4 conditions, the system can maintain high stability. In this study, the best stray light of samples is 5.84%. Further study can focus on form error between off-axial aspherical design value and measurement result of OAAROE in order to augment the off-axial aspherical core design.

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