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研究生: 張志遠
Chih-yuan Chang
論文名稱: 應用自動光學檢測系統於薄膜電晶體液晶顯示器之邊緣瑕疵檢測
Application of Automatic Optical Inspection System to the Edge Defect Inspection of Thin Film Transistor-Liquid Crystal Display
指導教授: 郭中豐
Chung-Feng Jeffrey Kuo
口試委員: 鍾國亮
none
黃昌群
Chang-Chiun Huang
蘇德利
Te-Li Su
學位類別: 碩士
Master
系所名稱: 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 121
中文關鍵詞: 改良式對比增長強化法統計式門檻值形態學貝氏分類器類神經網路輪廓分布圖
外文關鍵詞: Enhancement by modified contrast stretching algo, Statistical threshold, Morphology, Bayes classifier, Neural network classifier, Profile distribution
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  • 近年來面板需求量越來越大,薄膜電晶體液晶顯示器(Thin Film Transistor-Liquid Crystal Display;TFT-LCD)在現代生活中,成為最廣泛的生活必需品,且TFT-LCD 具有體積小、省電、低輻射等優勢;對於TFT-LCD 產品缺陷檢測若依賴人工檢測的方式進行,則會因作業人員的不同及工作狀態而對產品有不同的判斷標準,未來面板尺寸大型化,人工檢測勢必造成極大的挑戰。本研究即在開發一套TFT-LCD 自動光學檢測(Automatic Optical Inspection;AOI)系統,應用影像處理技術判斷面板之端子部與非端子部之瑕疵檢測,檢測項目包含TFT-LCD 邊緣之毛邊(Burr)、破碎(Chipping)、刮痕(Scratches)及汙點(Stains)。首先,將影像中瑕疵目標分割出來,應用改良式對比增長強化法(Enhancement by Modified Contrast Stretching Alorithm)調整對比明暗度,以統計式門檻值(Statistical Threshold)分割前景與背景,接著對獲得的影像進行形態學(Morphology)運算以去除不需要的雜點,並保留完整的瑕疵目標區塊,再對此區塊做數值化處理,獲得其瑕疵的特徵值,由特徵值數據做資料庫,接著使用貝氏分類器(Bayes Classifier)及類神經網路分類器(Neural Network Classifier)分別做瑕疵的分類結果;過程中,利用Sobel運算法及輪廓分布圖來做邊緣的檢測,藉此方法加強瑕疵檢測的準確率。根據分類結果,經過自行設計的檢測系統驗證213 組瑕疵影像,貝氏分類器總辨識率達95.8%,類神經網路分類器總辨識率高達96.2%,驗證所設計的方法適合於TFT-LCD 邊緣瑕疵的檢測系統。


    Panel demand is increasing today with thin film transistor-liquid crystal display (TFT-LCD) becoming one of the most extensive and important technological products. TFT-LCD has some advantages such as small size, power saving, and low radiation. Artificial ways to detect TFT-LCD defects result in companies using different standards due to different personnel. The panel size will be increasing in the future, andartificial detection will inevitably cause greater challenges withoutuniform guidelines.
    In this study, we developed an automatic optical inspection (AOI) system for TFT-LCD to determine the defect of the panel’s terminal and non-terminal via applying image processing technology. The inspectionitems include burr, chipping, scratches and stains on the TFT-LCD edges.During inspection, we will first separate TFT-LCD defects from the image and use the enhancement by modified contrast stretching algorithm to adjust contrast and shading values. Then, we will perform the statistic threshold method to separate the foreground from the background, and then the system will process with the morphology operator, which can delete unnecessary noise while reserving the complete shape of the defect target. We also processed numerical analysis, where we obtained the characteristics of defects and make a database of the characteristics. Next, we used Bayes classifier and neural network classifier to classify defects.In the process, we used Sobel algorithm and profile distribution to make edge inspection. This method enhanced the accuracy of the rate of defect inspection.
    According to our classification results, the automatic optical inspection system investigated 213 groups of the defect image by self-developed inspection system. The Bayes classifier and neuralnetwork classifier total distinguish rates are 95.8% and 96.2%, respectively. Therefore, those rates indicated that this study had successfully developed a set of defect inspection system applicable to the defects on TFT-LCD edges.

    中 文 摘 要 I ABSTRACT III 誌謝 V 目錄 VI 圖目錄 X 表目錄 XIII 第1章 緒論 1 1.1 研究背景 1 1.2 研究動機與目的 2 1.3 文獻回顧 5 1.3.1 影像對比增強方式 5 1.3.2 瑕疵檢測方式 6 1.3.3 瑕疵分類方法 7 1.4 論文架構 8 第2章 影像視覺檢測系統架構 9 2.1 影像擷取系統 9 2.2 作業系統與開發軟體 12 2.3 程式流程 13 第3章 薄膜電晶體液晶顯示器 14 3.1 TFT-LCD簡介 14 3.2 TFT-LCD構造與顯像原理 16 3.3 TFT-LCD製程 18 第4章 研究方法 22 4.1 數位影像處理 22 4.1.1 影像強化 23 4.1.2 改良式對比伸長強化法 24 4.1.2.1 對比伸長強化法 24 4.1.2.2 改良式對比伸長強化法 25 4.1.3 空間濾波器 29 4.1.3.1 低通濾波 30 4.1.3.2 高通濾波 30 4.1.3.3 中值濾波 31 4.2 影像分割 33 4.2.1 邊緣偵測 33 4.2.1.1 Sobel運算子 36 4.2.2 輪廓圖分佈 37 4.2.3 灰階分布柱狀圖分析 37 4.2.4 門檻值法 38 4.2.5 自動門檻值決定法 39 4.2.6 形態學處理 42 4.2.6.1 膨脹 43 4.2.6.2 侵蝕 44 4.2.6.3 閉合與斷開 45 4.2.6.4 清除邊界物體 46 4.2.7 瑕疵特徵值擷取 47 4.3 分類方法 51 4.3.1 貝氏分類器 51 4.3.2 類神經網路分類 54 第5章 實驗與結果 62 5.1 影像處理結果 64 5.2 瑕疵特徵值分析 75 5.3 TFT及CF之邊界 76 5.4 貝氏分類結果 79 5.5 倒傳遞類神經網路分類結果 81 5.6 分類方法比較 84 第6章 結論與未來展望 85 6.1 結論 85 6.2 未來研究方向 86 參考文獻 87 附表1 92 附表2 94 附表3 95 附表4 97 附表5 98 附表6 101 附表7 107 附表8 112

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