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| 研究生： |
陳彥彰 Yen-Chang Chen |
|---|---|
| 論文名稱： |
低溫多晶矽面板色不均缺陷檢測之研究 Investigation of mura inspection on low temperature poly silicon substrate |
| 指導教授： |
范慶麟
Ching-Lin Fan |
| 口試委員: |
李志堅
Chih-Chien Lee 王錫九 none |
| 學位類別： |
碩士 Master |
| 系所名稱： |
電資學院 - 電子工程系 Department of Electronic and Computer Engineering |
| 論文出版年： | 2007 |
| 畢業學年度： | 95 |
| 語文別： | 英文 |
| 論文頁數： | 42 |
| 中文關鍵詞： | 色不均 、陣列 、低溫多晶矽面板 |
| 外文關鍵詞： | LTPS, MURA, ARRAY |
| 相關次數： | 點閱：308 下載：4 |
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於本論文中，我們針對低溫多晶矽面板(LTPS)良率無法提升作探討,發現在各式異常的缺陷中,以色不均(Mura)的缺陷令所有面板製造商深受其苦,所有面板業界無不苦思對策,期待能兼顧量產與準確度的要求下,開發出一項能全自動檢測的技術,以符合降低成本的要求.
在此前提下,本項研究特別著重於實際量產的情形下,所衍生的色不均問題.在已知的方法中,沒有一項量測技術是符合業界的要求,無外乎產量(Throughput)無法滿足要求,就是準確度過低沒有參考的價值.
所以在本論文當中,我們偋棄傳統的思維,也就是欲從Mura生成的原因做研究,再研究其檢測技術.新的方法為不問其產生的原因,究其已經表現出的特徵,加以偵測並且予以分類,同時又可兼顧量產的要求,配合設備商的載具,完成此次研究,初步估計,爪痕(Scratch),斑點(Spot)的Mura defect,自動檢測率已經達到90%的準確率,在此項研究完成之前,所有Mura檢測都是在cell process以人工目檢方式完成,而且準確度不高,對於製程整合工程單位解決問題的幫助並不高,此項研究的結論,正可彌補人工檢查不足之處,並且可立即提供正確資訊給前段製程單位,修改生產參數,達成良率提高成本降低的要求.
Recently the TFT LCD becomes the most popular products to replace CRT monitor. There are different types of panels such as a-Si, LTPS, OLED etc.,. We believe the LTPS panel will become the next generation of TV screen option. But so far the LCD makers have to meet some technical problems. Based on this issue, the LCD makers couldn’t maintain the quality as stability and reliability. The most serious defect on LTPS is mura defect.
Before this research, there is no any proper technology to detect the defect with precise accuracy automatically. Until now, we developed a new technique, which has evaluated by many TFT LCD makers to prove it.
In front of this study, we set the target of finishing this project that the accuracy must be up to 80% without overkill at array process. Although there are too many different types of mura appeared at the same panel. Therefore, user requested some of mura defect is the priority to find out which are scratch and spot shape. And also the result must be better than visual inspection of operator.
Finally, we have obtained huge progress about mura inspection after using some special testing technology. The accuracy is up to 90% without any overkill situation offered from user evaluation.
[1] Micro-Electronics No 226.
[2] S. T. Wu and D. K. Yang, Reflective Liquid Crystal Displays, John Wiley & Sons, Ltd, Chichester 2001.
[3] C. G. Philip, Liquid Crystal In Complex Geometries: Formed by Polymer And Porous. Networks: Formed by Polymer And Porous. Networks, Taylor & Francis, London, (1996).
[4] Yukiharu Uraoka, Noboyuki Hirai, Hiroshi Yano, Tomoaki Hatayama, and Takashi Fuyuki, “Hot Carrier Analysis in Low Temperature Poly-Si TFTs Using Picosecond Emission Microscope”, IEEE Transations On Electron Devices, VOL.51, No 1., January 2004.
[5] Lee, J.C; Jeong, J.Y: "Integrated Circuit Design and Technology, 2006. , pp.251-253 (1989).
[6] 微電子技術發展趨勢, 徐爵民, 工研院電子工程研究所, 2002年2月22日.
[7] 張佩琳, Digitimes online, 2000/08/11.
[8] 謝嘉民,陳尊豪,戴寶通,潘犀靈,王怡超,”紅外飛秒雷射退火複晶矽”, 奈米通訊,第十一卷第四期.
[9] Jae-Young Lee, Suk-in Yoo, “Automatic detection of region-mura defect in TFT-LCD,” IEICE Transactions on Information and Systems, Vol. E87-D No. 10 pp.2371-2378, 2004 [10]
[10] Scott A. Wartenberg, RF Measurements of Die and Packages, Artech House 2006, ISBN 1-58053-273-x
[11] Van Der Veen, A.-J. Deprettere, E.F. Swindlehurst, A.L.
Dept. of Electr. Eng., Delft Univ. of Technol. ; “Subspace-based signal analysis using singular value decomposition”, IEEE Volume 81, Sep. 1993.
[12] Chris Kuo, “Testing apparatus & method for thin film transistor display array” patent 2004, Taiwan.
[13] Displayserach chapter1 ,2006.
