本論文主要運用TS740觸發式探頭（touch trigger probe）及LK-G80雷射位移計(reflective distant sensors)整合於海德漢控制器五軸CNC加工機上進行加工間檢測（in-process measurement），並針對機上量測幾何誤差與位置誤差進行探討與研究。探頭與雷射位移計經校正後，可用於量測工程特徵與自由曲面，極適合應用在五軸CNC加工機上進行綜合性量測。
在量測系統架構上，將觸發式探頭及雷射位移計在五軸CNC加工機上進行軟硬體整合。量測點資料分析程式使用MATLAB軟體撰寫，可進行加工間檢測點座標運算，得出幾何形狀誤差或位置誤差。本研究使用ISO切削測試標準件與自行設計四凸一凹自由曲面整合之載具做為量測標的，非接觸式量測時由刀軸投影置待測物量測；接觸式量測則沿量測面之法向量量測，分別規劃量測路徑後進行量測。
在進行量測結果誤差比對方面時，本研究利用CNC三次元座標量測儀（CMM）量測相同工件，與加工間檢測數值進行誤差比對分析，五軸CNC機上量測結果相對於CMM量測之誤差，對自由曲面之最大誤差為0.0485 mm，而對規則形狀量測幾何公差的最大誤差分別為：真直度0.00406 mm、真平度0.00068 mm、真圓度0.00538 mm及真球度0.03749 mm，其結果可印證本量測系統具有良好的量測精度，可實際應用於五軸CNC工具機進行機上量測。

This study mainly focuses on the TS740 touch trigger probe and LK-G80 reflective distant sensors integrated on five-axis CNC machine with Heidenhain controller for in-process measurement, and investigation on the geometric error and position error of the measurement on the machine. After verifying the accuracy of the measurement, the developed system can be used to measure objects of irregular geometry and regular geometry, and is suitable for the comprehensive measurement of a workpiece on 5-axis CNC machines.
By integrating the probe via software and hardware with a 5-axis CNC machine, and a set of measurement data analysis program has been written in MATLAB software. The developed program can be analyze the coordinate data, to obtain the geometric error or position error. An artefact combining the ISO cutting test piece and the free-form surface was used as measurement targets in this study. Concerning the measuring path configuration, the non-contact measurement device used the positive Z-direction measurement configuration and the contact measurement device used the surface normal vector measurement configuration.
This study compared the CMM measurement and the in-process measurement for error comparison analysis. The maximum error for the freeform surface was 0.0485 mm, and the maximum error for the geometrical tolerance of the regular shape measurement was follows: straightness 0.00406 mm, flatness 0.00068 mm, roundness 0.00538 mm and sphereness 0.03749 mm. Base on the measurement result, it showed that the measurement system was with good accuracy to carry out the in-process measurement.

[1] 陳楷祥，「TS740觸發式探頭整合於五軸CNC加工機進行加工間檢測之研究」，碩士論文，國立台灣科技大學，2014。
[2] 黃家順，「應用接觸式探頭於五軸加工機之加工間檢測」，碩士論文，國立台灣科技大學，2013。
[3] 黃泊憲，「以五軸CMM對葉輪進行最佳化避障量測路徑之規畫研究」，碩士論文，國立臺灣科技大學，2008。
[4] 郝家駿，「OMP400觸發式探頭整合於四軸CNC雕刻機進行加工間檢測與避障問題之研究」，碩士論文，國立臺灣科技大學，2008。
[5] 李育茲，「NX二次開發之在線式自由曲面誤差補償法之研究」，碩士論文，國立台灣科技大學，2018。
[6] 蘇保全，「MP700觸發式探頭整合於CNC工具機作自由曲面之加工間檢測與統計製程品管分析研究」，碩士論文，國立台灣科技大學，2005。
[7] 黃偉明，「精密曲面加工與機上量測系統的研製」，碩士論文，台灣大學，1997。
[8] Soichi Ibaraki, Takeyuki Iritani, Tetsuya Matsushita, “Calibration of location errors of rotary axes on five-axis machine tools by on-the-machine measurement using a touch-trigger probe”, International Journal of Machine Tools and Manufacture, Vol. 58, pp. 44-53, 2012.
[9] Soichi Ibaraki, Takeyuki Iritani, Tetsuya Matsushita, “Error map construction for rotary axes on five-axis machine tools by on-the-machine measurement using a touch-trigger probe”, International Journal of Machine Tools and Manufacture, Vol. 68, pp. 21-29, 2013.
[10] M. Holub, R. Jankovych, O. Andrs, Z. Kolibal, “Capability assessment od CNC machining centres as measuring devices”, Measurement: journal of the International Measurement Confederation, Vol. 118, pp. 52-60, 2018.
[11] D. Li, Z. Tong, X. Jiang, L. Blunt, F. Gao, “Calibration of interferometric on-machine probing system on an ultra-precision turning machine”, Measurement: journal of the International Measurement Confederation, Vol. 118, pp. 96-104, 2018.
[12] W.T. Lei, Y.Y. Hsu, “Error measurement of five-axis CNC machines with 3D probe–ball”, Journal of Materials Processing Technology, Vol. 139, Issues. 1-3, pp. 127-133, 2003.
[13] Z. Bohan, G. Feng, L. Yan, Z. Dongya, Z. Wanli, Z. Fei, “Study on generation and optimization methodology of on-machine measurement schemes for multi-axis CNC machine tool”, ASME International Mechanical Engineering Congress and Exposition, Proceedings, Vol. 4A-2017, 2017.
[14] 游鈞皓，「五軸工具機之線上傘齒輪三維掃描式探頭量測」，碩士論文，國立台灣科技大學，2014。
[15] 張志嘉，「自由曲面資料擷取辨識與量測規劃之研究」，碩士論文， 國立台灣科技大學，1998。
[16] 王惠民，「SP2量測技術在逆向工程與電腦輔助設計與製造系統之整合研究」，碩士論文，中原大學，1996。
[17] 李瑞宗，「量測平滑曲面位置與法向量之多光束三角雷射探頭之研究」，博士論文，台灣科技大學，2011。
[18] G. Abe, M. Aritoshi, T. Tomita, K. Shirase, “Development of on-machine measurement system utilizing line laser displacement sensor”, International Journal of Automation Technology, Vol. 5, pp. 708-714, 2011.
[19] Z. Dong, X. Sun, C. Chen, M. Sun, “A fast and on-machine measuring system using the laser displacement sensor for the contour parameters of drill pipe tread”, Sensor, Vol. 18, Issue 4, 2018.
[20] S. Morita, J. Guo, N.L. Yamada, N. Torikai, S. Takeda, M. Furusaka, Y. Yamagata, “Profile measurement of a bent neutron mirror using an ultrahigh precision non-contact measurement system with an auto focus laser probe”, Measurement Science and Technology, Vol. 27, Issue 7, 2016.
[21] Kuang-Chyi, Lee, jiun-Shiang, Yang, Hsin-Her, Yu, “Development and evaluation of a petal thickness measuring device based on the dual laser triangulation method”, Computers and Electronics in Agriculture, Vol. 99, pp. 85-92, 2013.
[22] M. Uekita, Y. Takaya, “On-machine dimensional measurement of large parts by compensating for volumetric errors of machine tools”, Precision Engineering, Vol. 43, pp. 200-210, 2016.
[23] Fang-Jung, Shiou, Ming-Jiunn, Chen, “Intermittent process hybrid measurement system on the machining centre”, J. Adv. Manuf. Syst., Vol. 41, No.18, pp. 4403-4427, 2003.
[24] 陳明俊，「接觸式與非接觸式探頭系統整合於CNC工具機上之混合量測研究」，碩士論文，國立台灣科技大學，2000。
[25] ISO 1101，2017。
[26] 基恩斯LK-G80雷射位移計，https://www.keyence.com/products/
measure/laser-1d/lk-g3000/models/lk-g80/index.jsp?search_dl=1，(2019)。
[27] 海德漢TS740探頭，https://www.heidenhain.com/en_US/
products/touch-probes/workpiece-measurement/ts-460ts-642-ts-740/，(2019)。
[28] 百德機械股份有限公司，https://www.quaser.com/files/proimages/
1487239008_pdf.pdf，(2019)。
[29] MITUTOYO GEOPAK-WINDOW操作手冊，台灣三豐儀器股份有限公司，2005.