隨著光學雷達技術的不斷發展，設計高性能的光學雷達系統成為研究的焦點之一。在這些系統中，光學相位陣列在發射和接收光波信號感測器中扮演著至關重要的角色。
本論文優化了實驗室之前設計的大型光學相位陣列，主要集中在擴大掃描視野範圍和降低加熱引起的熱干擾方面。包括將天線陣列減少至 32 路、縮小天線間距從 9.5 μm 到 4.5 μm，並引入雙向光學天線陣列的設計以及採用了加熱溝槽設計以提高加熱效率，並交錯排列加熱器以減少加熱引起的熱干擾，在增加掃描範圍時也降低天線間距，並成功下線此晶片。
本論文也著重於量測與分析先前下線於比利時微電子中心(IMEC)製作之16x64 矽光子光學相位陣列，量測結果驗證所有光學開關均顯示在 3.5V 以下的電壓下正常運作，在遠場的量測結果中，波長調動範圍為 1547 nm 至 1570 nm，晶片的涵蓋角度範圍為-18.800 度至 20.406 度，總涵蓋範圍為 39.206 度。量測結果成功驗證了在遠場超過正負 20 度的掃描角度範圍內，根據不同光學天線結構的波長調控效率在 0.144 度/ nm 至 0.153 度/ nm 之間。以平均波長調控效率最小
的 0.144 度/ nm 為例，16 個光學相位陣列要涵蓋 40 度角度範圍，只需調動範圍為 17.4 nm 的波長。本研究成功驗證了 OPA 在使用小波長時實現大範圍角度調控之特性。

As optical LiDAR technology continues to advance, the design of highperformance optical LiDAR systems has become a research hot topic. In these systems, optical phased arrays (OPAs) play a crucial role in transmitting and receiving optical signals. This thesis optimizes a previously designed large-scale OPA in our lab, with a primary focus on expanding the scanning field of view and reducing thermal crosstalk. The major design tasks include scaling down the antenna array to 32 channels, decreasing the antenna pitch from 9.5 μm to 4.5 μm, introducing a bidirectional optical antenna array design, and employing trench-based heating structures to enhance heating efficiency. Interleaved arrangement of heaters is implemented to minimize thermal crosstalk, effectively reducing the antenna pitch while expanding the scanning range. This new design was successfully taped out to IMEC for manufacturing.
This thesis also includes the measurement and analysis of a 16x64 silicon photonics OPA fabricated at the Interuniversity Microelectronics Center (IMEC) in Belgium. Measurement results confirm the normal operation of all optical switches at voltages up to 3.5V. In far-field measurements, within the wavelength tuning range of 1547 nm to 1570 nm, the beam steering can cover an angle range from -18.8∘to 20.4∘,39.206∘in total. Taking the minimum average wavelength tuning efficiency of 0.144∘/nm as an example, achieving a 40∘scanning range for 16 sub-OPAs only requires a wavelength tuning range of 17.4 nm. The final measurement results successfully validate scanning angles exceeding ±20 degrees in the far-field, with wavelength tuning efficiencies ranging from 0.144∘/nm to 0.153∘/nm, showcasing the OPA's capability for large-angle steering with tunable lasers of small wavelength tuning range.

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