國際原油價格不斷高漲，替代性能源的研發愈顯重要，而太陽能為目前替代能源之研發重點項目之ㄧ，其主要之材料即為矽晶圓基板，目前生產矽晶圓基板之主要技術為多線式線鋸切割技術(multi-wire sawing)。本研究之主要目的在建立線鋸切割模式(wire sawing model, WSM)應用於太陽能基板切割製程之移除率(material removal rate, MRR)評估以及進行線鋸切割製程分析比較。本研究WSM之建構基礎為利用微小維克氏壓痕測試機壓印矽晶圓基板，藉由硬脆材料(brittle material)受壓印後之破壞模式(indentation fracture)來估算材料移除率(MRR)，並且利用雷射粒徑分析儀測試切割前與切割後之漿料，比較量測結果估算有效加工磨料數。由移除率模式可以得到磨料有效刃角數為影響移除率之主要因素，模擬時即利用磨料有效刃角數搭配其他參數進行分析，由模擬結果得知材料移除率隨著鋼線速度、工件楊氏模數與瞬間有效加工磨料數之增加而增加，而隨著工件硬度與破裂韌性增加而減少。本研究所建立之線鋸切割移除模式(WSM)，未來可以運用在切割不同材質之硬脆材料上，而有效加工磨料數之評估方法則可以運用在漿料有循環使用之磨料加工模式上。

Multi-wire sawing technology has been widely applied on fabricating the substrates of solar cells. This research is to develop a wire sawing model (WSM) to predict the material removal rate (MRR) of slicing substrate of solar cell and also to invesigate the significant process parameters of wire sawing. The micro Vickers hardness test is used to estimate the indentation fracture of brittle material for estimating the material removal volume by each indentation. Calculation of the number of engaged grits in working area can also be obtained by particle size analyzer to measure the particle size distribution (PSD) before and after wire sawing. Results show that the number of engaged tip of abrasive is the main factor of material removal rate. So the simulation of MRR use this factor collocated with other factors for exploring other effects. Results of simulation show that the MRR is in direct proportion with the wire speed, Young’s modulus of workpiece and the number of engaged grits for each instant sawing in working area and in inverse proportion with hardness and fracture toughness of workpiece. Further research is to predict the MRR of related brittle materials. The method of estimation of the number of engaged grits in working area can also be used in other abrasive machining system with recirculated slurry system.

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