本研究針對線性壓電超音波馬達之遲滯以及非線性現象，提出二階段規則推論之專家系統（expert system）、模糊邏輯（Fuzzy logic）、模糊滑動模式（Fuzzy sliding mode）等三種智慧型定位控制方法來改善其缺點。這些方法均不需要建立複雜的數學模型，經由實驗推論得到適當的控制參數，並利用暫態響應、正弦波軌跡與圓形軌跡的追跡來驗證其精密定位的可行性。
當線性壓電超音波馬達用於微奈米級定位時，原點的原始位置可能因重複定位而產生偏差。本研究另一主題即為結合高倍率影像處理技術，發展線性壓電超音波馬達之原點對位系統。此一系統能透過CCD的影像擷取、影像處理及影像分析以取得特徵圖形與標準圖案之誤差資訊，而後將位置補償量透過兩軸之壓電驅動平台進行補償，達到微奈米等級之影像自動對位之目的。

This paper proposes three intelligent precision control algorithms for overcoming the drawbacks of serious hysteresis behavior and highly nonlinear property for the dual-axes linear piezoelectric ultrasonic motor. The proposed control methods include the two-stage rule-based expert system, fuzzy logic and fuzzy sliding mode control. Optimal control parameters are determined by experiments without the need of complicated mathematical modeling. Position control performance for step response, sinusoidal and circular trajectories are evaluated and presented in time domain. The experimental results demonstrate that the proposed control methods are feasible and effective.
In addition, linear piezoelectric ultrasonic motors are often employed for positioning control at micro-nanoscale, and deviation from the original position may occur after repeated positioning. Hence, in this study, a novel automatic micro-nano alignment system using high magnification vision system coupled with a dual-axes linear piezoelectric ultrasonic motor was developed. The analytical algorithm of this vision-aided auto-alignment design makes use of real-time movements captured by CCD as inputs to obtain the difference between the fiducial mark and the target position. Alignment commands can then be fed to the two-axis piezoelectric motors to compensate for the positional difference. Both theoretical deductions and experimental trials have proved that the novel automatic vision-aided alignment system is robust and feasible for achieving precision to the micro-nanometer scale.

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