本研究在玻璃基板上建立半透明微奈米陣列結構，改善玻璃的光學特性，並於奈米結構上方濺鍍金屬鋅，再經過氧化處理成為氧化鋅薄膜，探討光波經過光學薄膜層所產生吸收或穿透的光學改變量。製程主要是利用磁控射頻濺鍍機在透光玻璃基板上沉積鋁薄膜;並透過電化學加工，建立具有奈米孔洞陣列結構的氧化鋁薄膜(AAO)，達到結構奈米化，同時借助其透明之特性，有利於光學穿透度分析與探討。透過改變陽極處理製程的電解液及電壓值，得到草酸電解液在40 V電壓以及磷酸在125 V電壓時，能做出符合尺寸奈米化的完整結構，並直接影響光學特性。以可見光譜測量儀分析可見光範圍內的光波變化量;又因奈米化結構使得氧化鋅薄膜能夠更均勻沉積在微結構的表面，達到穿透度改善的效益;並觀察到氧化鋅薄膜在紫外光波段有選擇性吸收的效果，透過驗證發現，光波在386.3nm有一個吸收峰值，使光波產生吸收效應。每步驟所需要的尺寸驗證，皆使用場發射掃描式電子顯微鏡 (Field Emission Scanning Electron Microscope, FE-SEM)，其能同步呈現形貌與微結構尺寸量測，並以X光繞射儀(XRD)確認氧化鋅材料的成分結構。

In this study, a microstructure was set on the glass to change the transmittance of light. Zinc were deposited on the glass substrate by magnetic reactive sputtering with anodic aluminum oxide (AAO) template, after that the ZnO nanoparticles were prepared by thermal oxidation. The procedure of the experiment was mainly used magnetron RF Sputter to deposit Al film on the glass with transmittance and also processed the Al into nano porous structure by using electrochemical process Moreover, the analysis of the optical penetration is attribute to the nano porous structure and transparency of AAO.During the manufacturing process, the electrolyte with anodic treatment and the voltage was changed in order to analyze the variation of light by using Ultraviolet/Visible spectroscopy. In addition, due to the benefit of nano porous structure, ZnO film could deposit on the surface much more homogeneously, improving the transparency Therefore, the study observed that ZnO film had the character of selective absorption in ultraviolet band. For example, it was proved that the ZnO film was opaque in the range of 386.3 nm of the light.
Lastly, the each step of measurement test including used the Field Emission Scanning Electron Microscope (FE-SEM), which could not only show the shape, but also measure the microstructure, as well as make sure the ingredient of ZnO material by X-ray Diffraction (XRD).

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