本研究主要以多孔質陽極氧化鋁(Porous Anodic Alumina, PAA)為模板製作仿蟬翼結構之研究，先以實驗設計方法找出氧化鋁製程參數，接著製作出仿蟬翼結構之負形孔洞氧化鋁模板，最後結合反向模製(Reverse Molding, RVM)技術製作正型仿蟬翼結構聚甲基丙烯酸甲脂(Polymethylmethacrylate, PMMA)抗反射鏡片(Anti-Reflection Lens, AR Lens)。首先觀察蟬翼結構為底徑160nm、頂徑70nm、間距190nm與高度400nm，接著以電壓80V、草酸0.1M、溫度3oC製作出大徑127nm、小徑66nm、間距170nm與高度390nm之仿蟬翼結構多孔質陽極氧化鋁模板，最後以反向模製PMMA製作出次微米結構底徑131nm、頂徑55nm、間距163nm與高度350nm之AR Lens，其穿透率在波長700nm時為90.81%，比無結構PMMA87.56%高出3.25%，反射率為3.36%，比無結構之參考PMMA薄片(4.14%)低了0.78%，證實了仿蟬翼結構具有增加穿透減低反射之效果；其接觸角從無結構85.55o降低為49.95o，增加了親水性。此研究未來可以應用於太陽能電池模組表面、顯示器螢幕、手機螢幕等增透抗反射膜。

This research is to fabricate a cicada wing mimicked anti-reflection (AR) structure on PMMA with porous anodic alumina (PAA) template by reverse molding(RVM). Firstly, the design of experimental (DOE) is used to find optimal experimental parameters of submicron scaled PAA growth, then to fabricate the cicada wing mimicked structure PAA template for RVM of PMMA. Finally FESEM, spectrophotometer and contact angle instruments are used to investigate the properties of PMMA AR Lens. Results show that PMMA AR lens can increase the transmittance by 3.25% and reduce reflectivity by 0.78% as compared with plain PMMA film. The contact angle of PMMA AR lens is reduced from 85.55o to 35.6o PMMA film. Reverse molding of PMMA has been developed, compared with the plain structure less than 100nm can be replicated. Potentially, the cicada wing mimicked structure and the PAA template and reverse molding could be used to fabricate a large area of AR polymer film. These films can be applied enhanced AR optical films for on surface of solar cells module, cell phone monitor, LCD monitor and others optical applications.

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