研究生: |
曹建偉 Chien-Wei Tsao |
---|---|
論文名稱: |
III族元素修飾之奈米金自組裝陣列其電學性質之研究 Study on electrical properties of self-assembled Au nanoarrys decorated by group 3 elements |
指導教授: |
洪儒生
Lu-Sheng Hong |
口試委員: |
洪儒生
Lu-Sheng Hong 陳良益 Liang-Yih Chen 周賢鎧 Shyan-kay Jou |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 化學工程系 Department of Chemical Engineering |
論文出版年: | 2021 |
畢業學年度: | 109 |
語文別: | 中文 |
論文頁數: | 104 |
中文關鍵詞: | 矽/鍺晶片接合 、團聯式共聚物 、接合中介層 、金銦合金奈米陣列 、功函數 |
外文關鍵詞: | Si/Ge wafer bonding, block copolymer, AuIn alloy nanoarray, intermediate layer, work function |
相關次數: | 點閱:206 下載:3 |
分享至: |
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