本研究旨在提出，因傳統雷射加工平台之進行劃線、切割，在加減速度及轉角時，雷射能量過於集中，容易於加工之中，使物料受損，故運用位置同步輸出(positional synchronized output, PSO)控制雷射觸發時機，進而改善雷射觸發之重複率(overlap)，以降低能量過於集中之問題，藉以提高利用雷射於銦錫氧化物(Tin-doped Indium Oxide, ITO)薄膜加工良率。
本研究以532nm 波長之綠光雷射為雷射加工平台進行ITO薄膜加工實驗，藉由實驗結果，可以清楚比較運用PSO觸發脈衝雷射和連續波雷射光(continuous wave)或脈衝雷射光(pulse)的雷射微加工製程上的差異及改善。運用PSO取得運動軸位置並透過自製之整流穩壓電路板(printed circuit board, PCB)，而使雷射觸發與運動軸能相互配合，提高雷射於薄膜加工良率，以提升製程技術。目前的巿場趨勢，走向少量多樣的複雜幾何圖形(patterning)，傳統製程耗時費工修改不易，利用本文技術可以減少這些問題。

The traditional laser processing onto Indium-Tin-Oxide (ITO) thin film coated substrate involves cutting and scribing. This processing could be serious damage the material because of over-processing laser power regardless of velocity through the contour. Therefore, this study presents how to use the position synchronized output (PSO) as laser trigger to improve the overlapping rate of laser spots in order to precise control and spacing of laser pulses. The result is to provide a consistent, high quality of throughput while applying laser processing on Tin-doped Indium Oxide (ITO).
The laser operated on 532nm wavelength was adopted as the laser processing platform to present how to utilize PSO on ITO thin film during laser processing. Thought the experiments, it is clearly to interpret the differences and improvements by using continuous wave, pulse and PSO as laser trigger respectively. Moreover, by used PSO coordinated with X, Y and Z Axes motion, the laser is operated and accomplished by a fixed distance and real-time position feedback through self-design printed circuit board (PCB). A constant velocity, real time interaction with laser pulses is very important when dealing with the complicated patterns or geometries. Thus, the purpose of this study is to uplift the throughput on cutting and scribing ITO thin film and enhance stability of laser processing in order to meet a demand of diversified, complicated patterns or geometries in the current market trend. Comparing with traditional laser processing, the PSO utilized processing is not only to significantly minimize the timing but also to easily amend the complicated pattern or programming, even though the importing from CAD drawings.

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