在本論文中使用台積電CMOS 0.18 um 1P6M製成，設計並實作了一個應用於熱療微波加熱回授溫控系統。加熱器採用由2.4 GHz的震盪器(LC-Oscillator) 作為微波訊號源，再通過功率放大器(Power Amplifier)提高微波功率。功率放大器的負載電感器被作為熱施加器，並採用負載補償技術來增強其附近的電場。該加熱器之功耗為136 mW，可以提供25.36 mW (14 dBm)的射頻輸出功率，達到 0.24 °C/min的加熱速率及34.4 J/°C的加熱效率。此外，使用以時間數位轉換器(Time to Digital Converter)為基礎的溫度傳感器提高系統的穩定性。此溫度感測器實現了0.054°C的解析度，適合使用於生物醫學相關應用。在經過兩點校正後，在25 °C至45 °C的溫度範圍內，其誤差為 ± 0.2 °C。溫度傳感器在每次取樣時的功耗為0.65 uJ。

A monolithic microwave heater with thermostatic function and TDC-based temperature sensor is implemented for thermotherapy using TSMC CMOS 0.18 um technology. The heater uses a 2.4 GHz oscillator as the microwave source and its microwave power is raised by a power amplifier. The load inductor of the power amplifier is used as the heat applicator and the load compensation technique is adopted to enhance the electric field in its vicinity. Consuming 136 mW, the heater delivers the RF output power of 25.36 mW (14 dBm). The heating rate of 0.24 °C/min and heating efficiency of 34.4 J/°C is achieved. The stability of system is improved by using a TDC based temperature sensor. The resolution of 0.054 °C is achieved by the temperature sensor, which is suitable for biomedical applications. After the two-point calibration, the accuracy is ± 0.2 °C in the temperature range from 25 °C to 45 °C. The power consumption of temperature sensor for each sample is 0.65 uJ.

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