在本論文中使用台積電 CMOS 0.18 μm 1P6M 製程，設計並實作了一個應用於熱療的微波加熱回授溫控系統。由2.4 GHz的震盪器(LC-Oscillator)產生微波訊號至可調電壓放大器增強，此外，放大器的負載電感用於發射訊號加熱待測物，微波加熱器加上可調溫度感測器(Tunable Temperature Sensor)、11-bit連續漸進式類比數位轉換器(Successive Approximation Analog-to-Digital Converter)以及數位比較器組成具有恆溫功能之微波加熱器。
放大器、振盪器、溫度感測器和類比數位轉換器的消耗功率分別為113, 1.4, 0.83, 4.17 毫瓦。根據模擬結果，放大器的PE/PAE達到18.7 %/17.7 %，藉此可以估算出微波輸出功率為13.2 dBm。溫度感測器的感測範圍從10 ℃ 到 50 ℃，其靈敏度為47 mV/℃。當80毫克的的洋菜仿生肌肉組織被放置於加熱器的電感上方加熱60分鐘，成功使仿生物的溫度上升4 ℃。當恆溫功能開啟時，仿生物的溫度能固定在0.5 ℃、1.0 ℃以及1.5 ℃。整體消耗功率為119 mW。

In this thesis, a monolithic microwave heater with programmable thermostat function for thermotherapy is proposed and implemented using TSMC CMOS 0.18-μm 1P6M process. To achieve microwave heating, the heater adopts a 2.4-GHz oscillator to generate the microwave and uses an amplifier with LC resonance load to enhance the signal strength. Moreover, the load inductor of amplifier is used as a heat applicator. The microwave heater is then integrated with temperature sensors, a 11-bit successive-approximation analog-to-digital converter (SAR-ADC) and a digital comparator to achieve the thermostat function.
The amplifier, oscillator, temperature sensor and ADC consume the power of 113, 1.4, 0.83, 4.17 mW respectively. According to simulation, the amplifier can achieve the PE/PAE of 18.7 %/17.7 %. The output power of 13.2 dBm can be estimated. The temperature detection range of the temperature sensors is from 10 ℃ to 50 ℃, where the temperature sensitivity of sensors is 47 mV/℃. When the 80-mg muscle mimicking agar phantoms are placed above the inductor, the heater can achieve the programmed temperature increases of 0.5, 1.0 and 1.5 °C with the variation of 0.2 °C. The total power consumption of system is 119 mW.

[1] M. Borecki et al., “Fiber Optic Capillary Sensor with Smart Optode for Rapid Testing of the Quality of Diesel and Biodiesel Fuel”, Int. J. Advances in Systems and Mea., vol 7 no 1 & 2, 2014, 57-67.
[2] M. Placinta, M. C. Shen, M. Achermann, and R. O. Karlstrom, “A Laser Pointer Driven Microheater for Precise Local Heating and Conditional Gene Regulation In Vivo. Microheater Driven Gene Regulation in Zebrafish,” BMC Dev. Biol., 9(1), p. 73, 2009.
[3] A. Rosen and F. Sterzer, “Applications of microwave heating in medicine,” IEEE MTT Symp, Dig., 1994, pp. 1615-1618 vol.3.
[4] F. Sterzer, “Microwave medical devices,” IEEE Microw. Mag., vol. 3, pp. 65-70, Mar 2002.
[5] M. H. Falk and R. D. Issels, “Hyperthermia in oncology,” Int. J. Hypertherm., vol. 17, pp. 1–18, 2001.
[6] D. Kim, K. Kim, J. Oh, J. Cho, C. Cheon and Y. Kwon, “A K-Band Planar Active Integrated Bi-Directional Switching Heat Applicator With Uniform Heating Profile,” IEEE Trans. Microwave Theory Tech., vol. 57, no. 10, pp. 2581-2587, Oct. 2009.
[7] K. Kim, T. Seo, K. Sim and Y. Kwon, "Magnetic Nanoparticle-Assisted Microwave Hyperthermia Using an Active Integrated Heat Applicator," IEEE Trans. Microwave Theory Tech., vol. 64, no. 7, pp. 2184-2197, July 2016.
[8] M. Gęca, T. Lizak, A. Kociubiński, M. Borecki, M. L. Korwin-Pawlowski, “Nichrome micro-heaters as actuators for microfluidic sensors,” Proc. SPIE 10031, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments, Sept. 2016
[9] M. Megayanti, C. Panatarani and I. M. Joni, “Development of microheaters for gas sensor with an AT-Mega 8535 temperature controller using a PWM (pulse width modulation) method” AIP Conf., vol 1719, no. 1, Mar. 2016
[10] M. Borecki, M. Gęca, M. Duk and M.L. Korwin-Pawlowski, “Miniature Gas Sensors Heads and Gas Sensing Devices for Environmental Working Conditions - A Review”, J. Elec. Commu. Eng. 2017.
[11] M. Gęca, M. Borecki, and A. Kociubiński “Multiparametric capillary sensor: stabilization of local heating”, Proc. SPIE 10808, Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments vol. 10808, Oct. 2018
[12] Hong-Qi Xiao, ”Monolithic CMOS microwave heaters”, NTUST thesis, 2018
[13] J. P. Jordan, “Application of vacuum-tube oscillators to inductive and dielectric heating in industry,” Electrical Eni., vol. 61, no. 11, pp. 831-834, Nov. 1942.
[14] D. Wetz, D. Landen, S. Satapathy and D. Surls, “Inductive heating of materials for the study of high temperature mechanical properties,” IEEE Trans. Dielectrics and Electrical Insulation, vol. 18, no. 4, pp. 1342-1351, Aug. 2011.
[15] Handbook of Microwave Technology for Food Applications, Marcel Dekker Inc., New York, NY, USA, 2001.
[16] Hsiao-Chin Chen, Hong-QI Xiao and Tzu-Yu Tseng, “A Monolithic CMOS Microwave Heater”, accepted for publication in IEEE Trans. Microwave Theory and Tech.
[17] San-Qing Yang, “An Implantable Biomedical Signal Measurement System for Chronic Disease Monitoring”, NTUST thesis, 2015
[18] Behzad Razavi, Principles of Data Conversion System Design, IEEE Press, 1995.
[19] Sung-Min Chin, Chih-Cheng Hsieh, Chin-Fong Chiu and Hann-Huei Tsai, “A New Rail-to-Rail Comparator with Adaptive Power Control for Low Power SAR ADCs in Biomedical Application,” IEEE Int. Symposium on Circuits and Systems, pp.1575-1578, May 2010.