目前國外的研究中，主要的微幫浦研究皆是採用微機電（MEMS）的製程技術來做為主要的製作方式，設計上以單純的驅動流體為主，未與特殊用途系統整合來做設計。本研究中針對做為水下微小載具的推進器或是方向輔助元件的目的設計一款製程簡易、成本低廉壓電無閥式微幫浦。配合成本低廉的要求，致動器方面選用了容易取得的壓電蜂鳴片，利用直流電源供應器與頻率控制電路作為驅動源。為了製作所設計的微幫浦垂直擴散口流道的幾何特徵，無法使用現有常見的微機電製程，因此選用了最適合的SDM（Shape Deposition Manufacturing）製程。
為了微小水下載具的設計目的，微幫浦的幾何結構設計了三個進口流道與一個出口流道，外型尺寸為15mm×15mm×3mm，流道擴散角為10度，配合CAD/CAM軟體的輔助，對3D模型做適合的切層與加工規劃，以高分子聚合物材料、蠟材與三軸CNC加工機利用SDM製程製作出微幫浦腔體部分。克服了垂直擴散口流道製作以及支撐材料的溫度造成主要材料變形上的問題。最後進行微幫浦的組裝測試，測試其背壓與流量，並依據本研究中的結果來討論未來的改進方向。

Up to the present, the fabrication of the micropump generally used the MEMS processes were designed micropump for driving flow simply. This study focused on simple manufacture and inexpensive cost for the meso-scale underwater vehicle’s propulsion and direction auxiliary element. For the demands of the cheap cost, the piezo buzzer which was easily-obtained was the first choices for actuator and DC power supply and frequency controlled circuit were used as the driver. Most of the micro-scale manufacturing processes nowadays was unable to achieve the 3D geometry of vertical channel in our designed; therefore, this study chosed SDM (Shape Deposition Manufacturing) as the most suitable process.
This study designed micropump with three inlet channel and one outlet channel for the application of meso-scale underwater vehicle. The dimensions of micropump are 15mm×15mm×3mm and the channel opening angle is 10 degree. CAD/CAM software was applied to slice 3D model and map out the manufacturing plan appropriately. SDM process utilized casting polymer, wax, and 3-axis CNC processing machinery to make the principle part of the micropump. This study conquered the problem of the manufacture of 3D geometry of vertical channel and part material deformation of the high temperature with support material casting. Finally, this study fabricated the micropump and tested the back pressure and flow rate, and furthermore discussed the improvement of future work according to the results of this study.

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