表面電漿共振被廣泛地應用在生物分子的檢測上，也應用在其它領域。然而現今各地廣泛推廣節能意識，因此本文提出新的表面電漿共振技術應用，藉由表面電漿共振結合光電材料，架設新的系統，達成光譜調製效果，希望未來能加以改良，應用在室外引光進室內，藉由調整入射光譜以符合人的需求(藍光會使人清醒，黃光使人安逸)，又能響應節能省電。

本研究著重於樣本的製程和光路系統設計及架設，先從理論與樣本的製程開始探討，最後使用本實驗所設計的系統量測出表面電漿共振曲線。

The SPR is widely applied in biosensors and many other fields. The energy conservation consciousness is widespread promotion all over the world. Therefore, this article proposed the new SPR technology's application by the photoelectric material. We set up the new system to achieve the spectrum modulation effect. In the future, it can be further improvement. The application is to transmit sunlight to indoor by the suitable adjustment incident light spectrum to satisfy humans’ the demand.It can also save energy.

In this research, we focus on set up the system, designed the path of ray, and fabricated the sample. In the beginning, we discussed the theory of SPR and the process of fabricated sample. Finally we used this system to measure the SPR curve.

[1]R. W. Wood, "On a remarkable case of uneven distribution of light in a diffraction grating spectrum", Phil. Magm., 396-402(1902).
[2]J. Tominoga, J. Kim, H. Fuji, D. Buchel, T. Kikukawa, L. Men, H. Fuckuda, A. Sato, T. Nakano, A. Tachibana, Y. Yamakawa, M. Kumagai, T. Fuckaya, and N. Atoda, "Super-resolution near-field structure and signal enhancement by surface plasmons", Jpn. J. Appl. Phys. 40, 1831,2001.
[3]W. C. Liu, C. Y. Wen, K. H. Chen, W. C. Lin, and D. P. Tsai, " Near-field images of the AgOx-type super-resolution near-field structure", Appl. Phys. Lett. 78, 685, 2001.
[4]Y. K. Kim, P. M. Lundquist, J. A. Helfrich, J. M. Mikrut, G. K. Wong, P. R. Auvil, and J. B. Ketterson, "Scanning Plasmon optical microscope", Appl. Phys. Lett. 66, 3407, 1995.
[5]I. Pockrand, J. D. Swalen, R. Santo, A. Brillante, and M. R. Philpott, "Optical properties of organic dye monolayers by surface Plasmon spectroscopy", J. Chem. Phys. 69, 4001, 1978.
[6]W. P. Chen, and J. M. Chen, "Use of Surface Plasma Waves for Determination of the Thickness and Optical Constants of Thin Metallic Films", J. Opt. Soc. Am. 71, 189, 1981.
[7]W. A. Challener, R. R. Ollman, and K. K. Kam, "A surface Plasmon resonance gas sensor in a ‘compact disc’ format", Sens. & Actuators 56, 254, 1999.
[8]M. Westphalen, U. Kreibig, J. Rostalski, H. Luth, D. Meissner, "Metal cluster enhanced organic solar cells", Solar Energy Materials and Solar Cells 61, 97, 2000.
[9]N. E. Hecker, R. A. Hopfel, and N. Sawaki, "Enhanced ligh emission from a single quantum well located near a metal coated surface", Physica E, 2, 98, 1998.
[10]N. E. Hecker, R. A. Hopfel, N. Sawaki, T. Maier, and G. Strasser, "Surface plasmon-enhanced photoluminescence from a single quantum well", Appl. Phys. Lett. 75, 1577, 1999.
[11]R.H. Ritchie, "Plasma losses by fast electrons in thin films", Phys. Rev., 106, 874-881 (1957).
[12]C.J. Powell and J.B. Swan, "Effect of oxidation on the characteristics loss sepectra of aluminum and magnesium", Phys Rev., 118, 640-643 (1960).
[13]U, Fano, "Effects of configuration interaction on intensities and phase shifts", Phys. Rev., 124,1866-1878(1961).
[14]A. Otto, "Excitation of surface plasma waves in silver by the method of frustrated total reflection", Z. Physik 216, 398-410(1968).
[15]E. Kretschmann, H. Raether, "Radiative decay of non-radiative surface plasmons excited by light", Z. Naturforsch., 23A, 2135-2136 (1968).
[16]X. Yu, D. Wang, D. Wang, Y. J. H. Ou, Z. Yan, Y. Zibo, Y. Dong, W. Liao, and X.S. Zhao, "Micro-array detection system for gene expression products based on surface plasmon resonance imaging", Sensors and Actuators B 91, 133-137 (2003).
[17]P. Pfeifer, U. Aldinger, G. Schwotzer, S. Diekmann, and P. Steinrucke, "Real time sensing of specific molecular binding using surface plasmon resonance spectroscopy", Sensors and Actuators B 54,166-175 (1999).
[18]W. B. Lin, J. M. Chovelon, and N. J. Renault, "Fiber-optic surface-plasmon resonance for the determination of thickness and optical constants of thin metal films", Appl. Opt. 39, 3261-3265 (2000).
[19]吳民耀，劉威志，「表面電漿子理論與模擬」，物理雙月刊，第二十八卷，第二期，2006。
[20]邱國斌，蔡定平，「金屬表面電漿簡介」，物理雙月刊，第二十八卷二期，2006。
[21]張勁燕，半導體製程設備，五南圖書公司，2005年9月。
[22]莊達人，VLSI製造技術，高立圖書公司，第五版，2002。
[23]施敏原著；黃調元譯，半導體元件物理與製作技術，高立圖書公司，2002。