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研究生: 鄧群姿
Cyun-Zih Deng
論文名稱: 光成像材料應用於積體電路載板
Application of Photo-Imageable Dielectric (PID) Materials in Integrated Circuit (IC) Substrates
指導教授: 顏怡文
Yee-Wen Yen
口試委員: 游進陽
Chin-Yang Yu
邱智瑋
Chih-Wei Chiu
學位類別: 碩士
Master
系所名稱: 工程學院 - 材料科學與工程系
Department of Materials Science and Engineering
論文出版年: 2020
畢業學年度: 108
語文別: 中文
論文頁數: 66
中文關鍵詞: 光成像材料載板感光材料介電材料
外文關鍵詞: Photo-Imageable Dielectric, Substrates, PID, Dielectric
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  • 摘要 Abstract 致謝 目錄 圖目錄 表目錄 第一章 前言 第二章 研究背景與動機 2.1 互連技術 2.2 IC載板 2.3 雷射加工 2.4 感光介電材料 2.5 重分佈製程 2.6 壓膜 2.7 曝光 2.8 顯影 2.9 濺鍍 第三章 實驗部分 3.1 實驗材料 3.2 實驗設備與參數 3.3 實驗規劃 第四章 結果與討論 4.1 開孔形貌 4.2 電鍍銅與PID材料間的結合力 4.3 PID材料與濺鍍層間的結合力 4.4 平整度 4.5 電性 4.6 漲縮變化 4.7 介電強度 第五章 結論 參考文獻

    1. S. W. Jones, Introduction to integrated circuit technology. Georgetown, MA: IC Knowledge LLC, Revision (2005).
    2. C. Y. Lee, IC substrate with over voltage protection function, US Patent 7,528,467 (2009).
    3. C. Ting and V. Dubin, Plated copper interconnect structure, US Patent 5,969,422 (1999).
    4. L. Chen, S. Ganguli, C. Marcadal, W. Cao, R. C. Mosely and M. Chang, Copper interconnect barrier layer structure and formation method, US Patent 6,607,976 (2003).
    5. C. J. Alpert, A. Devgan and C. V. Kashyap, RC delay metrics for performance optimization, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 20 (2001) 571-582.
    6. 王陽元,康晉鋒,超深亞微米集成電路中的互連問題—低k介質與Cu的互連集成技術,半導體學報,23 (2002) 1121-1134.
    7. 鄭義榮, 黃俊夫, 高楷傑和黃麒嘉, 內連接導線系統之可靠度—銅導線/低介電絕緣層, 國家奈米元件實驗室奈米通訊, 20 (2013) 34-42.
    8. Y. He and X. Fan, In-situ characterization of moisture absorption and desorption in a thin BT core substrate, Electronic Components and Technology Conference (2007) 1375-1383.
    9. B. K. Appelt, B. Su, A. S. F. Huang and Y. S. Lai, A new, cost-effective coreless substrate technology, IEEE CPMT Symposium Japan (2010) 1-4.
    10. C. G. Gonzalez, R. A. Wessel, and S. A. Padlewski, Epoxy-based aqueous-processable photodielectric dry film and conductive via-plug for PCB build-up and IC packaging, IEEE Transactions on Advanced Packaging 22 (1999) 385-390.
    11. Y. Suzuki, Y. Takagi, V. Sundaram and R. Tummala, Thin polymer dry-film dielectric material and a process for 10 m interlayer vias in high density organic and glass interposers, Electronic Components and Technology Conference (2014) 1427-1432.
    12. B. Dziurdzia, Z. Magonski, S. Nowak, M. Ciez and W. Gregorczyk, Photomageable dielectric - Processing, properties, compatibility with conventional thick film conductors, Advancing Microelectronics (2004) 24-27.
    13. P. D. Knudsen, R.L. Brainard and K. T. Schell, A photoimageable dielectric for sequential PWB fabrication, Circuit World 21 (1995) 5-9.
    14. D. J. Rusel and D. H. Glatzel, Process for high resolution photoimageable dielectric, US Patent 5,993,945 (1999).
    15. C. C. Yeh, K. H. Lan, W. P. Dow, J. H. Hsu, C. Lee, C. H. Hsu, K. Lee, J. Chen, and P. Lu, Micro via filling plating technology for IC substrate applications, Circuit World, 30 (2004) 26-32.
    16. R. Das and A. Chanda, Fabrication and properties of spin-coated polymer films, in Nano-size polymers. Preparation, properties, applications, ed. S. Fakirov, Springer International Publishing, Switzerland (2016) 283-306. DOI : 10.1007 /978-3-319-39715-3_10
    17. E. Kukharenka, M. M. Farooqui, L. Grigore, M. Kraft and N. Hollinshead, Electroplating moulds using dry film thick negative photoresist, Journal of Micromechanics and Microengineering 13 (2003) S67-S74.
    18. S. W. Jones, Photolithography, Georgetown, MA: IC Knowledge LLC, Revision (2008).
    19. Y. Sensu, A. Sekiguchi, and Y. Miyake, Improved resolution of thick film resist, Advances in Resist Technology and Processing, Proc. SPIE 4690 (2002) 861-882.
    20. G. D. Alton, The sputter generation of negative ion beams, Nuclear Instruments and Methods in Physics Research 37 (1989) 45-55.
    21. T. Bito, S. Kihara and J. Oishi, Polyimide resin, US Patent 8,110,652 (2012).
    22. D. G. Schwabe, Spiral crystal growth in the Czochralski process—revisited, with new interpretations, Crystal Research and Technology, 55 (2019) 190073 (10 pages).
    23. J. C. Liang, G. Z. Zheng, J. W. Hu and L Cui, Cross-cut tester, US Patent 9,719,912 (2017).
    24. S. Lee, S. S. Park and H. K. Lee, Improvement of adhesion between copper layer and polyimide films modified with alkaline potassium permanganate and/or alkali surface treatments, Macromolecular Symposia 249 (2007) 586-590
    25. J. Ferguson, Flying probe test systems: capabilities for effective testing, Proceedings International Test Conference (1998) 1163.
    26. M. Hanif, Principles and applications of insulation testing with DC, IEP-SAC Journal (2005) 57-63.

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