研究生: |
劉怡忻 Yi-Hsin Liu |
---|---|
論文名稱: |
以氬氧混合氣體感應耦合電漿低溫輔助氧化4H碳化矽的製程探討 Low temperature oxidation of 4H-SiC using Ar/O2 inductively coupled plasma |
指導教授: |
洪儒生
Lu-Sheng Hong |
口試委員: |
陳良益
Liang-Yih Chen 胡振國 Jenn-Gwo Hwu |
學位類別: |
碩士 Master |
系所名稱: |
工程學院 - 化學工程系 Department of Chemical Engineering |
論文出版年: | 2022 |
畢業學年度: | 110 |
語文別: | 中文 |
論文頁數: | 88 |
中文關鍵詞: | 碳化矽 、感應耦合電漿 、氧化製程 、閘極氧化層 |
外文關鍵詞: | inductively coupled plasma, interface state density |
相關次數: | 點閱:164 下載:0 |
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