本研究有兩大主旨，其一，將鑽石線鋸製程更改潤滑條件，根據 Minimum Quantity Lubrication (MQL)理論將潤滑條件分為切削液、切削液噴霧、水噴霧及空氣共四種，探討不同潤滑條件下鑽石線之磨耗行為。實驗機台以本實驗室自行開發之鑽石線材測試機為平台，此機台可量測線張力及切削力變化，同時以雷射位移計偵測即時切深變化，由實際之切削試驗評估不同潤滑條件下之切削能力表現。實驗後以掃描式電子顯微鏡觀測磨耗程度並記錄。實驗後以最大切削力、雷射位移計量測之高度位置變化、鑽石顆粒磨耗量及磨削比四種實驗結果，評估上述四種潤滑條件之優劣，結果以切削液及切削液噴霧兩種潤滑條件最為優良，但切削液噴霧用量相較於傳統之切削液使用方式來的小，可在相似的切削效能下達到節省成本及環境保護的目的。
其二，在晶圓製程中，一般商用複線式線鋸機切削晶圓至少要6個馬達來控制切割線的作動及張力，其中包含Bobbin 2個、Dancer 2個及Guide 2個，另外還有工件進給平台，這些馬達將同時影響線張力、線速度及線的運動，因此，同時控制這些馬達的運算是很困難的。而本研究目的在於開發一台小型複線式線鋸機，若依照商用機台進行切割線運動及張力控制，將無法達到機台簡化的目的，故本研究設計新的繞線機構，其合併進給和回收的線軸，並藉由齒輪及連桿機構達到應有的功能，不僅減少馬達的使用量，且仍然能提供固定的線速度和控制線的位置及平均每條線的張力，因此，僅需一個Z軸載臺與伺服馬達驅動，便能達到與一般商用的複線式線鋸機相同的功能。

This study has two subjects. First, in this study, the application of Minimum Quantity Lubrication (MQL) is investigated for fixed diamond wire sawing process. The cutting behavior is studied under four lubrication conditions: coolant, air, coolant mist and water mist. Experiments were conducted on a customized wire sawing machine. During the test, the cutting force and the depth of cut were monitored by a pair of load cells and a laser displacement sensor. The wear of the diamond grits was observed by the SEM images of the used wires. The results show that the coolant mist lubrication performed as efficient as the coolant. In addition, the grinding ratio is about three times higher than that with air condition. Therefore, coolant mist has the potential to reduce the cost of fixed diamond wire sawing process and is benign to the environment.
Another subject is development of small-scale wire saw machine. Multi-wire sawing is widely used to slice semiconductor materials into thin wafers in wafer manufacturing process. In typical wire sawing machines, a number of servo motors are required for driving wire transmitting mechanisms, in which two motors for the wire bobbins, two motors for the dancer, and two motors for wire guides are required. The large number of motors makes the system complex to be controlled and costly. In this study, an innovative winding mechanism has been designed and fabricated for a simplified multi-wire sawing machine. The new mechanism uses only one motor for the wire feeding and collecting bobbins which are connected by linking mechanisms and gear box to introduce proper helical motion. This design reduces the required motors while the machine still maintains the ability of controlling wire speed and wire motion as in the commercial wire sawing machines.

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